1. 전자와 시편의 상호작용(비탄성산란) 2θ Incident Beam (Primary electron)
Backscattered electron
Auger electron
Secondary electron(SEM)
Cathodoluminescence
X-ray
Absorbed electron
Specimen 2θ
Transmitted electron(TEM)

2. 전자와 시편의 상호작용 Types of Signal Produced Electrons: SE, BE, Auger-E
Secondary Electron: from the specimen surface(below 50eV)
Backscattered Electron: from the specimen(more than 50eV)
Auger Electron: created after the absorption of X-rays
Electromagnetics Radiation: X-ray

3. Elastic and Inelastic Scattering

4. Elastic and Inelastic Scattering
Elastic scattering: backscattered electron
beam electron interacts with the electrical field of the
nucleus
resulting in a change in the direction of the beam
without a significant change in the energy of the beam
Inelastic scattering: secondary electron, Auger electron
beam electron interacts with the electric field of electron(c.b electron)
resulting in a transfer of energy to the specimen atom
Change in the direction of the beam

5. Dimensions of the Specimen interaction Volume
Shape of the specimen-beam interaction volume depends on:
1. Energy of the beam electron: the higher the energy of the beam electron is, the greater the penetration

6. Dimensions of the Specimen interaction Volume
2. Atomic Number of the Specimen:

7. Secondary Electron
Both Beam Electrons and Backscattered Electrons Generate Secondary Electrons
3-4 times more SE are generated by BE

8. Bohr Model of the Atom The relationship between energy and state
Ground state and Excited state

9. X-ray Generation X-rays are electromagnetic radiation(10-3 ~ 10nm wl.)
Characteristic X-ray:
-result when the primary electron ejects electrons from the inner shells of the spc. Atom

10. K X-ray Generation

11. L X-ray Generation

12. Types of X-rays Produces

13. Auger Electron

14. 전자와 시편의 상호작용