1. SEM Pictures of Wafers Without Photoresist
Nancy’s Personal Fancy Presentation of …
SEM Pictures of Wafers Without Photoresist
Wafers from dates 7/22/08 and 5/20/08

2. Wafer from
7/22/08

3. Comments: SEM Image Dots for Nancy 7/22/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
7/22/08
Etched, no photoresist
DEEP 10 min
Center
The sides of all these dots are straighter than they appear in the pictures. A combination of the angle of the wafer and a very slow slide (due possible to the wafer slowly charging up?) makes the dots look shorter and the sides more tapered than they acutally are.

4. Comments: SEM Image Dots for Nancy 7/22/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
7/22/08
Etched, no photoresist
DEEP 10 min
Right

5. Comments: SEM Image Dots for Nancy 7/22/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
7/22/08
Etched, no photoresist
DEEP 10 min
Top

6. Comments: SEM Image Dots for Nancy 7/22/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
7/22/08
Etched, no photoresist
DEEP 10 min
Left

7. Comments: SEM Image Dots for Nancy 7/22/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
7/22/08
Etched, no photoresist
DEEP 10 min
Bottom

8. Wafer from
5/20/08

9. Comments: SEM Image Dots for Nancy 5/20/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
5/20/08
Etched, no photoresist
DEEP 10 min
Center

10. Comments: SEM Image Dots for Nancy 5/20/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
5/20/08
Etched, no photoresist
DEEP 10 min
Right

11. Comments: SEM Image Dots for Nancy 5/20/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
5/20/08
Etched, no photoresist
DEEP 10 min
Top

12. Comments: SEM Image Dots for Nancy 5/20/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
5/20/08
Etched, no photoresist
DEEP 10 min
Left

13. Comments: SEM Image Dots for Nancy 5/20/08
User:
Date:
Sample ID:
Sample Description:
Location on Wafer:*
* All orientations given assuming the flat of the wafer is down, or facing you
Comments:
Lili Hsu
7/25/08
5/20/08
Etched, no photoresist
DEEP 10 min
Bottom