1. Fluid Components for Small, Smart, Sampling Systems
Kevin Mracek

2. Agenda Requirements for Fluid Components used in Small, Smart Systems
Components Currently Available
Diaphragm Valves
T2 Series
Face Seal Fitting
Weld Fittings
Regulators
Integrated Gas Components

3. Requirements for Fluid Components used in Small, Smart Systems
Smaller/More Compact
Cleaner (Accuracy)
More Reliable
Easily Automated
Modular

4. Diaphragm Valves Features/Benefits Small Surface Area High Reliability
No Packing to Contaminate System Fluid
Low Internal Volume

5. T2 SERIES PNEUMATICALLY ACTUATED VALVES

6. T2B1 Three Module Network
Features/Benefits
No Cross Contamination
Reliable Valve Function
No Dead Volume
Compact Design
Low Internal Volume
Ease of Installation
Common
Bleed / vent
Common
Outlet
Common
Outlet
Inlet
Inlet
Inlet R
Open
Closed

7. VCR® Features/Benefits All-metal seals
Eliminate crevices around tubing
Low Dead Volume
Zero Clearance Component Removal
Optional Ultra-High-Purity
1) The all metal seal of the VCR® connection offers high purity and excellent corrosion resistance with minimal out-gassing compared to elastomeric seals, providing leak-free services from critical vacuum to positive pressure.
Components: glands
gasket
nuts
2) The seal of the VCR® assembly is accomplished by the interaction of two highly polished beads onto a softer material gasket. Following the make-up procedures of 1/8th of a turn p.f.t. for SS and NI and 1/4 turn for Cu, the beads induce a concentrated force onto gasket which is larger than the gaskets yield strength and plastically deforms it to the point of filling any minute imperfections that may be on the beads or gasket. The connection can be remade multiple times with the replacement of a new gasket.
Features
Std Surf. Finish is max. Ra of 20 micro-inch
Female Nut: test ports silver plated and lubricated for consistent make-up
Clean swept design and Minimal clearance required for removal
Material Heat code and appropriate process designators
UHP ‘P’ Improved Surf. Finish Max Ra of 10 micro-inch and a Avg. Ra of 5
Improved corrosion resistance and cleanliness as stated in SC-01
‘PX’ Max Ra of 5 and a Avg. of 4 Ra

8. “S” Type VCR® Features/Benefits
Boreline Seal: Reduces entrapment zones
Anti-Twist Design
All the features of the standard VCR ®

9. MICRO-FIT® Features/Benefits Compact Design
Allows Close Component Spacing for tubing systems
Automatic Tube Welding
Smooth Surface Transitions
Eliminates Crevices Around Tubing
L-15

10. HF Regulator Features/Benefits
Half the Size of Conventional Regulators
Low Supply-Pressure Effect
Low Droop
High Purity Design

11. igc-I Components: Simple System Integration
Features/Benefits
Modular Design
Easy Replacement of Valves
Smaller Footprint
All Metal Seals to Atmosphere
Variety of Surface-Mount Components Available
Ultra High Purity
Surface mount layer
Bridge Block
Manifold layer
Substrate layer

12. igc -II