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micro-chevron tip dark area is bonded interface crack

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Presentation on theme: "micro-chevron tip dark area is bonded interface crack"— Presentation transcript:

1 micro-chevron tip dark area is bonded interface crack unpatterned wafer patterned wafer mouth Force Figure 1

2 ls = m ws = m ch = m dh = m Figure 2a

3 Force micro-chevron tip dark area is bonded interface hole for mounting to materials testing machine Force Figure 2b

4 crack bonded β B region aj W load line bond plane A0 a H wLL w
unpatterned wafer bond plane b) patterned wafer A0 a H wLL w Figure 3

5 (a) Successful Test (b) Unsuccessful Test Figure 4
Change caption to read: Typical (a) successful and (b) unsuccessful microchevron tests. The vertical drop-off of the unsuccessful test typically represents the measurement of another failure mechanism, for example if one of the two chips breaks. (b) Unsuccessful Test Figure 4


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