1. Thin Film Growth of Amorphous Metal Phosphorus Alloys
Richard A. Jones, Department of Chemistry & Biochemistry, University of Texas at Austin
Organometallic Precursor Synthesis. New PMe3/pyrazolate complexes of Co, Rh and Ru have been prepared and characterized and the most promising candidates screened for use as CVD precursors for thin film growth of metal phosphorus alloys.
Rh(μ-Pz)4Li2(THF)2
Co(PMe3)3Pz
Co(PMe3)Pz3.CoH(PMe3)4
Co(PMe3)4
Co2P
hcp Co
fcc Co
Crystallite Size
HCP Co (100) ~10 Å
HCP Co (002) ~13 Å
Ru(Me2Pz)2(HMe2Pz)2(PMe3)2
(H.-F. Klein, Angew. Chem. Int. Ed. 1971, 10 , 343)