1. Metal Assisted Chemical Etching (MacEtch)
Professor: Xiuling Li
Graduate mentors: Dr. Munho Kim,
Jeong Dong Kim
Andy Haige Chen
Simon Shixin Wu

2. Overview of the Project
Etching: a method in microfabrication to remove layers from the surface of a wafer
MacEtch: uses metal (such as Au) as catalyst; produces extremely high ratio semiconductor nanostructure

3. Overview of the Project
Scanning Electron Microscope (SEM):
a type of electron microscope that produces images of a sample by scanning it with a focused beam of electrons;
we use it to inspect the quality of etching

4. Progress Reading literatures Attending weekly group meetings
Writing proposal for MRL
Attending lectures
Taking trainings both online and onsite for the equipment (we still have two sessions to complete the JEOL 6060 SEM training)

5. Goal by the End of Semester
To be able to work on the project independently
To get trained and gain access on all the techniques we need
To have a better understanding of semiconductor materials and devices

6. Citations http://mocvd.ece.illinois.edu/research/MacEtch.html