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Pixel sensor for ALICE ITS upgrade & CIS

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Presentation on theme: "Pixel sensor for ALICE ITS upgrade & CIS"— Presentation transcript:

1 Pixel sensor for ALICE ITS upgrade & CIS
Y. Kwon (Yonsei Univ.)

2 NA LHC SPS ALICE

3 ALICE Set-up TOF TRD HMPID ITS PMD Muon Arm PHOS TPC
Size: 16 x 26 meters Weight: 10,000 tons TOF TRD HMPID ITS PMD Muon Arm PHOS ALICE Set-up TPC

4 ALICE (Participation)

5 A possibility in Korea

6 Si sensor in general Mature technology Reliable performance
Fine granule Higher energy and time resolution (than gaseous ionization detectors) Key burden is cost.

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8 Typical PIN-type Si sensor

9 R&D environment 300 cm2 ~ $ 500 6 inch fabrication line 8 inch fabrication line

10 Traditional Si sensor operation
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11 How do we make it? (CMOS process)
Metal layer deposition Passivation Etch for contact Ion implant High purity Si wafer Oxidation Oxide layer deposition

12 Processed Wafer

13 New challenge

14 Current ALICE ITS

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16 ALICE ITS Upgrade

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19 Sensor + Digitization

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21 As of now Would it work? In physics?... ITS upgrade is approved and is also top priority. Technically?... Probably, R&D might be initiated. Financially? Politically?


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