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Pixel sensor for ALICE ITS upgrade & CIS
Y. Kwon (Yonsei Univ.)
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NA LHC SPS ALICE
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ALICE Set-up TOF TRD HMPID ITS PMD Muon Arm PHOS TPC
Size: 16 x 26 meters Weight: 10,000 tons TOF TRD HMPID ITS PMD Muon Arm PHOS ALICE Set-up TPC
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ALICE (Participation)
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A possibility in Korea
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Si sensor in general Mature technology Reliable performance
Fine granule Higher energy and time resolution (than gaseous ionization detectors) Key burden is cost.
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Typical PIN-type Si sensor
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R&D environment 300 cm2 ~ $ 500 6 inch fabrication line 8 inch fabrication line
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Traditional Si sensor operation
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How do we make it? (CMOS process)
Metal layer deposition Passivation Etch for contact Ion implant High purity Si wafer Oxidation Oxide layer deposition
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Processed Wafer
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New challenge
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Current ALICE ITS
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ALICE ITS Upgrade
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Sensor + Digitization
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As of now Would it work? In physics?... ITS upgrade is approved and is also top priority. Technically?... Probably, R&D might be initiated. Financially? Politically?
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