1. P09701: Corning Tropel LightGage Metrology System
Matthew Bradley (PM, ME)
Cara Portka (ISE)
Benjamin Arkin (EE)
Nicholas Schneider (ME)

2. Outline
Purpose: To share MSD progress and experience in order to encourage constructive criticism/feedback and incite new ideas.
Objective: Present Week 2 update with deliverables.
5/7/2019

3. Deliverable Status - Week 2
Final Needs Assessment Complete
Preliminary Specifications Complete
Benchmarking Results Complete
Project Plan Elements All Complete
1-page Project Summary
Work Breakdown Structure with Team Roles
2-Quarter schedule/milestones
Upload Documents to Edge Complete
5/7/2019

4. Preliminary Specifications
5/7/2019

5. NEITHER OF THESE SYSTEMS ARE CAPABLE OF TOP/BOTTOM MEASUREMENTS
Benchmarking
Veeco NT9300
Plainview, NY
Technology: Interferometry
Uses two LEDs which both reflect off surface and measures interference patterns
Resolution: 0.1 nm w/ FOV 40µm
FOV up to 8.45mm
Measurement Time: N/A
Automation: XY-Axis: 200mm
Z-Axis: 100mm
Tropel Lightgage
Fairport, NY
Technology: Dual Interferometer heads using near-infrared reflected off surface to measure entire part topology.
Resolution: 10 nm w/ FOV 36mm
FOV up to 150mm
Measurement Time: ≈1 min
Automation: XY-Axis: None
Z-Axis: at least 100mm
Nanofilm EP3 SPR
Germany
Technology: Ellipsometry Reflects a laser at a known angle off of surface and measures the polarization which results
Resolution: 1µm w/ FOV 0.2mm
4µm w/ FOV 2.5mm
Measurement Time: ≈5 min
Automation: XY-Axis:90mm
Z-Axis: 10mm
NEITHER OF THESE SYSTEMS ARE CAPABLE OF TOP/BOTTOM MEASUREMENTS
WILL FULLY SUPPORT DUAL
SURFACE MEASUREMENTS
5/7/2019

6. Matthew Bradley mjb8482@rit.edu Cara Portka csp1106@rit.edu
Benjamin Arkin
Nicholas Schneider
5/7/2019