1. Investigating on the Antireflection Design of Poly sapphire
多晶藍寶石基板之抗反射膜層設計研究
Investigating on the Antireflection Design of Poly sapphire
報告人:羅立翔
指導教授:胡文聰教授、廖洺漢副教授

2. Outline Chapter 1 Motivation
Chapter 2 Literature review and Theoretical basis
Chapter 3 Experimental methods and procedures
Chapter 4 Experimental results and discussion
Chapter 5 Conclusion

3. Outline Chapter 1 Motivation
Chapter 2 Literature review and Theoretical basis
Chapter 3 Experimental methods and procedures
Chapter 4 Experimental results and discussion
Chapter 5 Conclusion

4. Motivation
手機蓋板
智能穿戴裝置保護螢幕
鏡頭保護蓋
手機背蓋
LED襯底

5. Motivation

6. Outline Chapter 1 Motivation
Chapter 2 Literature review and Theoretical basis
Chapter 3 Experimental methods and procedures
Chapter 4 Experimental results and discussion
Chapter 5 Conclusion

7. Literature review and Theoretical basis
Antireflection Design
Anti Reflection thin film
-Single layer reflection thin film
-Multilayer reflection thin film
Antireflection Structures
-Escape Cone Structures
-Subwavelength Structures NL NM NH

8. Literature review and Theoretical basis
Fresnel Equation
Normal line
Y axis
X axis
Interface
Incidence wave
Reflection wave
Transmission wave
為電磁波行進方向 Ni Nt 電 場 垂 直
Fresnel Equation

9. Literature review and Theoretical basis
Fresnel Equation
Normal line
Y axis
X axis
Interface
Incidence wave
Reflection wave
Transmission wave
為電磁波行進方向 Ni Nt 電 場 平 行

10. Literature review and Theoretical basis
Multi - beam interference
＊考慮入射電場在單層薄膜間無窮多次的反射與穿透率與其電場所走的光程造成的相位差。

11. Literature review and Theoretical basis
反射率

12. Literature review and Theoretical basis

13. Literature review and Theoretical basis
nH > nM > nL
nair
薄膜厚度(d) :
dL、dM λ0/4n
dH  λ0/2n
nsub.
反射係數(r)

14. Outline Chapter 1 Motivation
Chapter 2 Literature review and Theoretical basis
Chapter 3 Experimental methods and procedures
Chapter 4 Experimental results and discussion
Chapter 5 Conclusion

15. Experimental methods and procedures
Poly sapphire
Poly sapphire CMP
Crystal sapphire
Crystal sapphire CMP

16. Experimental methods and procedures
Transmittance 97%
SiOx-83nm (n=1.5)
Transmittance 95%
AlN-118nm(n=2.1)
SiOx-20nm(n=1.5)
SiOx-90nm(n=1.5)
AlN-17nm(n=2.1)
Poly sapphire
Poly sapphire
AlN-17nm(n=2.1)
SiOx-90nm(n=1.5)
SiOx-83nm (n=1.5)
AlN-118nm(n=2.1)
SiOx-20nm(n=1.5)

17. Experimental methods and procedures
O2 2sccm
O2 2.5sccm
O2 3sccm
SiOx/glass
SiOx/glass
SiOx/glass
O2 3.5sccm
O2 4sccm
O2 4.5sccm
SiOx/glass
SiOx/glass
SiOx/glass

18. Experimental methods and procedures
SiOx/Glass
Minimum absorption

19. Experimental methods and procedures
N2 5sccm
N2 7.5sccm
N2 10sccm
AlN/glass
AlN/glass
AlN/glass
N2 12.5sccm
N2 15sccm
N2 17.5sccm
AlN/glass
AlN/glass
AlN/glass

20. Experimental methods and procedures
AlN/Glass
Minimum absorption

21. Outline Chapter 1 Motivation
Chapter 2 Literature review and Theoretical basis
Chapter 3 Experimental methods and procedures
Chapter 4 Experimental results and discussion
Chapter 5 Conclusion

22. SiOx/Polysapphire/SiOx
Experimental results and discussion
T-70nm
T-80nm
T-90nm
T-100nm
R-100nm
R-90nm
R-70nm
R-80nm
SiOx
Polysapphire CMP
SiOx/Polysapphire/SiOx

23. SiOx/Polysapphire/SiOx
Experimental results and discussion
T-70nm
T-80nm
T-90nm
T-100nm
R-100nm
R-90nm
R-70nm
R-80nm
SiOx
Polysapphire CMP
SiOx/Polysapphire/SiOx

24. Experimental results and discussion
Poly Sapphire CMP
SiOx 100nm
Poly Sapphire CMP

25. Outline Chapter 1 Motivation
Chapter 2 Literature review and Theoretical basis
Chapter 3 Experimental methods and procedures
Chapter 4 Experimental results and discussion
Chapter 5 Conclusion

26. Conclusion
This study successfully improved the transmittance from 83.3% to 92%, decreased the reflection rate from 14.6% to approximately 4%, and reduced the haze from 49.98% to nearly 40%.
Moth effects not only improve the transmittance but also save poly sapphire property.
Half of poly sapphire' haze is from surface scattering and the other half is from lattice scattering.

27. Conclusion
Moth eye structure
Multi-antireflection thin film

28. Thanks for your participation