1. A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication
Tat Joo Teo1,2, I-Ming Chen1, Guilin Yang2 and Wei Lin2 1School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore
2Mechatronics Group, Singapore Institute of Manufacturing Technology
A novel nano-positioning actuator for driving alignment stages in nano-imprint process.
With flexural bearings, it offers 3 mm of stroke with ± 10 nm of positioning accuracy.
This compact-sized actuator offers 60 N/Amp linear and continuous thrust force.
Detailed theoretical and experimental analyses are conducted on this development.
A prototype of Flexure-Based Electromagnetic Linear Actuator (FELA)