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Add nitride Silicon Substrate

Published byΘέκλα Κοσμόπουλος Modified over 5 years ago

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Presentation on theme: "Add nitride Silicon Substrate"— Presentation transcript:

1 Add nitride Silicon Substrate
Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

2 Add Poly0 Silicon Substrate
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3 1st level mask (Poly0) using Photolithography
Patterning through 1st level mask (Poly0) using Photolithography Patterned Photoresist Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

4 Removal of Unwanted Poly0 using Reactive Ion Etching
Silicon Substrate Patterned Photoresist Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

5 1st Oxide Deposition using LPCVD Silicon Substrate
Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

6 2nd level mask (Dimple) using Photolithography...
Patterning through 2nd level mask (Dimple) using Photolithography... and Deep RIE Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

7 3rd level mask (Anchor) using Photolithography
Patterning through 3rd level mask (Anchor) using Photolithography and Deep RIE Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

8 Blanket un-doped polysilicon deposition(Poly1) using LPCVD...
followed by PSG deposition and annealing Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

9 using Photolithography...
Patterning through 4th level mask (Poly1) using Photolithography... and Deep RIE Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

10 Deposition of 2nd Oxide Layer Silicon Substrate
Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

11 Patterning through 5th level mask using photolithography and deep RIE
Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

12 Patterning through 6th level mask using photolithography and deep RIE
Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

13 Deposition of undoped polysilicon,
followed by PSG hardmask layer, then anneal Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

14 Patterning through 7th level mask using photolithography and deep RIE
Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

15 Patterning through 8th level mask using photolithography and liftoff,
followed by removal of unwanted resist and metal in solvent bath Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

16 Release of structures using HF
Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

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