1. ------ Coordinate Measuring Machines with Computer Tomography ------

2. Starting Point: CT for Non-destructive Testing
Optimized for non-destructive testing – metrology aspects are hardly considered
Missing software integration → change between different software applications
is necessary
Long term stability questionable
“ISO threshold values”
Obtainable accuracy approximately 50 µm

3. Computer Tomography for NDT

4. Coordinate Measuring Machines with Tomography Sensor
Mechanic design with components of CMM technology
CAA-compensation
Temperature compensation
Pre-calibrated magnifications
Automatic calibration procedures
Local edge detection - no manual influence on the measuring results
Integrated artifact correction
Accuracy around 5-20µm (depending on component material and geometry)

5. Werth Coordinate Measuring Machines with Computer Tomography

6. Werth TomoScope® - TomoScope® HV - TomoCheck® Advantages of Two Technologies in One Machine
Multisensor CMM for measuring 3D point clouds using the computed Tomography principle in combination with other sensors (touch probes, optical sensors)
COMPLETE acquisition of the part geometry by CT
ACCURATE measurement of functional dimensions using image processing, laser, or touch probe
Calibration of the tomographic measurements directly on the part and measurement of functional dimensions with CMM accuracy
Use of the measuring machine as a“normal“ multisensor - CMM for measurements with touch probe and optics
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7. Werth TomoScope® - TomoScope® HV - TomoCheck® The Advantages
Precise, traceable measurement results using precision mechanics and a new type of calibration process (patent pending)
Universal software concept : Programming (reproducible measurement conditions), fully automatic measurement and evaluation (even pallet measurements overnight), using WinWerth®
Due to solid construction with long-term stability, calibration is stable and reliable for precise measurements
Using the multi-sensor principle, the configuration can be optimally adapted to the measurement task
Simple operation and compact design allows the device to be used in production QC
Comparable specifications to coordinate measuring machines
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8. Werth Coordinate Measuring Machines with Computer Tomography
Meets all legal requirements for a fully protected device under x-ray regulations.
The safe operation of the machine requires no additional protection.
Additional safety features beyond the legal requirements have been included.
TomoScope®
TomoCheck®
TomoScope® HV
Compact
TomoScope® HV
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9. Werth Multisensor Coordinate Measuring Machines with X-ray Computer Tomography
TomoScope®
Ø=90; L=200
TomoCheck®
Ø=90; L=200
TomoScope® HV Compact
Ø=350; L=350
TomoScope® HV
Ø=350; L=500
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10. Werth TomoScope® - TomoScope® HV - TomoCheck® Software Concept
WinWerth® – graphical interactive, easy-to-use, and user friendly measuring software for Microsoft Windows XP
WinWerth® 3D-Module- Measuring in 3D and CAD- compare
GD&T using WinWerth® 3D-Standardfunctions
Evaluating sections in BestFit and ToleranceFit®
Proven software bundle for the speed optimized 3D reconstruction of part geometries
Extended functions for 2D measurements within the X-ray image
Easy-to-use through integration into the WinWerth®-concept
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11. Data Acquisition
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12. The Workpiece is positioned at the rotary stage
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13. X-Ray Tomography: Adjustment to workpiece size using WinWerth®
Magnification
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14. Controling the X-Ray Source using WinWerth®
Live Image
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15. 2D Measurement in the X-ray Image
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16. „Tomoscopy“ result Measuring points in STL presentation
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17. WinWerth® Software components in one program with one user interface
WinWerth®
Software components in one program
with one user interface
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18. - Measure Completely and Accurately -
Werth TomoScope
Computer Tomography integrated in multisensor coordinate measuring machines
- Measure Completely and Accurately -
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19. Measure Completely and Accurately - Tomography integrated in multisensor coordinate measuring machines
Tactile sensor
X-ray detector
Rotary table
X-ray source
Granite foundation
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20. Werth TomoScope® Important technical data
Maximum part diameter for tomography “in picture“: 45 mm
Maximum part diameter for raster tomography: 90 mm (127 resp. 160 mm
as an option)
Maximum part height for tomography “in picture“: 45 mm
Maximum part height for raster tomography: 200 mm resp. 500 mm
Maximum part diameter for other sensors: 140 mm
Comparable specification to ScopeCheck CMMs Maximum Permissable Error: E1: (2.5+L/120) µm
(according ISO 10360) E2: (2.9+L/100) µm
E3: (4.5+L/75) µm
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21. Werth TomoScope® Sensor technology
Micro focus X-ray source 130 kV
Compact X-ray sensor with 1024x1024 pixel, pixel size 50µm
Voxel size 3-90 µm, field of view between 3 and 45 mm (standard 10 – 45 mm)
Werth standard IP system for processing of X-ray images
Sensor options: Image Processing
Laser Probe WLP
Werth Fiber Probe WFP Touch trigger and scanning probes
Factory calibrated system
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22. - Measurement of large parts and components with high density -
Werth TomoScope HV
Computer Tomography integrated in a Multisensor Coordinate Measuring Machine
- Measurement of large parts and components with high density -
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23. Werth TomoScope® HV Important technical data
Dimension: 3744mm x 1681mm x 1956 mm
Weight: kg
Maximum part diameter for tomography “in picture“: 350 mm
Maximum part height for raster tomography “in picture“: 350 mm
Maximum part height for raster tomography: 500 mm
Maximum part diameter for other sensors: 350 mm
Comparable specification to CMMs Maximum Permissable Error: E1: (2.5+L/120) µm
(according ISO 10360) E2: (2.9+L/100) µm
E3: (4.5+L/75) µm
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24. Werth TomoScope® HV Sensor technology
Micro focus X-ray source 225 kV
X-ray sensor: 2048x2048 pixel (pixel size: 200 µm x 200µm) mm x 400mm
Voxel size 3, µm, field of view between 7 and 350 mm (standard mm)
Werth standard IP system for processing of X-ray images
Sensor options: Image Processing
Laser Probe WLP
Laser Liniensensor LLP
Werth Fiber Probe WFP Touch trigger and scanning probes
Factory calibrated system
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25. TomoScope HV Compact with LLP Measurement of compound material parts
Multisensor:
X-ray detector
Laser Line Probe (LLP),
Optical Measuring Head IP40
Probe
Application:
Measurement of plastic-sheathed metal parts:
Tomography  Steel core
LLP  plastic cover
combining of point clouds for a
complete data record
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26. TomoScope® HV 500:
The basic machine Solid granite design; Tomography “in picture“  Specification is guaranteed on the standard
Measuring area D 350 x H 350mm
 !
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27. TomoScope HV 500 (500 & Compact): Extension 1 Option grid tomography HV  Higher resolution
Measurement of small features, also on large components, in high resolution
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28. Werth CNC Filter Changer
7 different filters can be chosen via software
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29. TomoScope HV 500 (500 & Compact): Extension 2 Preparation Multisensor HV  Higher accuracy on the measured object, more flexibility
Combination with additional tactile and optical sensor technology, such as Werth Fiber Probe or Werth Laser Probe
hochgenaue Sensorik
Highly accurate sensor technology
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30. - Complete 3D-Measurements with the highest precision -
Werth TomoCheck
Computer Tomography in air bearing Multisensor Coordinate Measuring Machine
- Complete 3D-Measurements with the highest precision -
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31. Werth TomoCheck® Important technical data
Maximum part diameter for tomography “in picture“: 45 mm
Maximum part diameter for raster tomography: 90 mm
Maximum part height for tomography “in picture“: 45 mm
Maximum part height for raster tomography: 200 mm
Maximum part diameter for other sensors: 150 mm
Comparable specification to VideoCheck HA CMMs
Scale Resolution: 10 nm Maximum Permissable Error: E1: (0.5+L/900) µm
(according ISO 10360) E2: (0.7+L/600) µm
E3: (1.5+L/500) µm
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32. Werth TomoCheck® Sensor technology
Compact X-ray sensor with 1024x1024 pixel, 50µm, 2048x2048 pixels as an option
Voxel size 3-90 µm, field of view between 3 and 45 mm (standard 10 – 45 mm)
Werth standard IP system for processing of 2D X-ray images
Sensor options: Image Processing
Laser Probe WLP
Werth Fiber Probe WFP Touch trigger and scanning probes
Factory calibrated system
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33. Werth TomoScope HV Compact
Computer Tomography integrated in a Multisensor Coordinate Measuring Machine
- Measurement of large parts and components with high density -
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34. Werth TomoScope® HV Compact Important technical data
Dimension: 2600mm x 1681mm x 1955 mm
Weight: 8500 kg
Maximum part diameter for tomography “in picture“: 165 mm
Maximum part diameter for raster tomography: 350 mm
Maximum part height for tomography “in picture“: 150 mm
Maximum part height for raster tomography: 350 mm
Maximum part diameter for other sensors: 350 mm
Comparable specification to CMMs Maximum Permissable Error: E1: (2.5+L/120) µm
(according ISO 10360) E2: (2.9+L/100) µm
E3: (4.5+L/75) µm
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35. Werth TomoScope® HV Compact Sensor technology
Micro focus X-ray source 225 kV
X-ray sensor: 1024x1024 pixel (pixel size: 200 µm x 200 µm)
200 mm x 200 mm
Voxel size 7 – 330 µm, field of view between 7 and 165 mm (standard mm)
Werth standard IP system for processing of X-ray images
Sensor options: Image Processing
Laser Probe WLP
Laser Liniensensor LLP
Werth Fiber Probe WFP Touch trigger and scanning probes
Factory calibrated system
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36. Note !
Resolution is primarily relevant for the visibility, and thus measurability, of the smallest structures, not for precision.
Too high of a resolution means the measured area is too small, and the measurement time is very high due to rastering and low power (focal spot.)
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37. Examples of Applications Werth Coordinate Measuring Machines with Computer Tomography
Record® E_d01
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38. TomoScope® with plastic part
Complete recognition of the workpiece geometry by Computer Tomography
Highly accurate measurement of functional dimensions with image processing, laser, or tactile sensor systems
Traceability of the tomographic measuring results by multisensor technology (patent pending)
Calibration of the point cloud measured by the X-ray sensor by measurement of calibration points with an accurate tactile or optical sensor
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39. Measure Completely and Accurately - Tomography integrated in multisensor coordinate measuring machines
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40. Comparison Werth TomoScope® Werth TomoCheck® Werth TomoScope® HV
Werth TomoScope® HV Compact
Measuring range
Ø160 x 200
Ø 90 x 200
Ø 350 x 500
Ø 350x350
MPE (E)
E1: (2,5+L/120) µm
E2: (2,9+L/100) µm
E3: (4,5+L/75) µm
E1: (0,5+L/900) µm
E2: (0,7+L/600) µm
E3: (1,5+L/500) µm
X-ray source
typical 130kV,
40W
typical 225kV, 320W
typical max. 225kV,
320W
Detector
1024x1024 Pixel,
50µm Pixel size
2048x2048 Pixel,
200µm Pixel size
Sensor
Fiber Probe
Laser
Image Processing
Laser Line Probe
Image Processing Laser Line Probe
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41. Power Requirements for the X-Ray Source
130 kV
150 kV
190 kV
225 kV
450 kV
Steel / Ceramics
up to 5 mm
up to 8 mm
up to 25 mm
up to 40 mm
up to 70 mm
Aluminum
up to 30 mm
up to 50 mm
up to 90 mm
up to 150 mm
up to 250 mm
Plastics
up to 130 mm
up to 200 mm
up to 450 mm
Embedded Connectors
Pump Housings
Ti - Implants
Zirconium Oxide Implants
Grinding disc
Hollow Drills
Plastic Connectors
Mobile Phone Covers
Teeth Implants
Electric Motors
Car Pistons
Injector Nozzles
Engine Blocks
Dashboards
Turbine Blades
These values are only coarse guide values. Cumulative wall thickness depends on the
material and geometry:
Steel and
Ceramics
Aluminum
Plastics
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42. Maintenance costs – CT Tubes
Closed Tubes
Open Tubes (HV, Compact)
Costs
1x [T€]
every 2 years [thousands of €]
1x [T€]
every 2 years [thousands of €]
Machine maintenance (annually) 3 6 3 6
Basic tube maintenance (annually, including filament replacement) - - 2 4
Quarterly tube maintenance (3x annually, including filament repl.) - - 1 6
Tube costs for replacement approx. every 2-3 years (refurbished, or new tubes at second replacement)
18/30
18/30
(refurbish/new tubes) - -
Machine downtime* for: 1. maint.
2. tube replacement 2 4 2
7/a - 14 -
Travel costs (up to 1500 € per visit, depending on distance)
approx. 0.5 (1x/a) 1
approx 0.5 (4x/a) 4
Total: 31 / 43
Total: 34
* Downtime costs at least 1,000 € per day (based on customer experience)
Closed tubes are currently available only up to 150 kV
Maintenance of open tubes includes filament replacement ( ventilation, tube conditioning, calibration status, testing/restoring magnification, focal point position (anode) adjustment, greasing high-voltage wiring, approval measurement or TÜV (German technical inspection association) inspection, etc. (1.5 page checklist)
Urgently recommended: perform Werth service (otherwise, loss of warranty, training by Werth or tube manufacturer)
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43. Checklist for maintenance of CT tubes in TomoScope HV – short list
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44. Summary
Coordinate measuring machines with CT-Sensor can be used in the middle accuracy range – part tolerances from 50 µm up to 200 µm
For higher accuracy, a correction of systematic deviations of tomography with consideration of workpiece geometry and material is required.
With the Werth AutoCorrection, the traceability of CT measurements on real workpieces and the correction of systematic measuring deviations is possible.
Multisensor coordinate measuring machines with CT-Sensors can be used in the higher accuracy range – part tolerances from 15 µm up to 50 µm
Multisensor coordinate measuring machines with CT-Sensors also allow measurements on workpieces with several materials