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Status of Hamamatsu Silicon Sensors
Oct 2001 Prepared by K. Hara (U. Tsukuba)
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Summary of Institution(+HPK) tests
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Delivery 2063 200~300/month in recent deliveries
Production sensors with modified mask from March 2063
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Leakage current 350V)
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defects
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full depletion voltage
recent delivery wafer thickness full depletion voltage
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Bias resistance, sampling 2/lot
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Implant tests: sampling (2/lot)
June 2001
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Full strip tests: just started…
Measure only detectors with many defects … All defects identified These not identified
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some (?) not identified:
visually not seen as well No new defects created! some (?) not identified: Many HPK defects clustered : problem in HPK prober?
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24hr I stability 2063 delivery 1093 delivery Recent delivery
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