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Fig. 2 Printed three-axis acceleration sensor.
Printed three-axis acceleration sensor. Circuit diagram (A), image (B), and cross-sectional schematic (C) of the acceleration sensor. GND, ground line. Stress distributions extracted from FEM simulations on application of (D) z-axis and (E) y-axis accelerations (20 m/s2). (F) Resistance change of strain sensor #1 under z-axis acceleration of 1 and 2 Hz. (G) Compiled resistance change of sensor #1 under x-, y-, and z-axis accelerations as a function of acceleration frequency. Resistance change of sensor #1 under y- and z-axis positive and negative accelerations (H) and their compiled results, with maximum stress extracted from the FEM simulations (I). (J) Three-axis acceleration detection by measuring the three strain sensors simultaneously when x-, y-, and z-axis accelerations are applied. Yuki Yamamoto et al. Sci Adv 2016;2:e Copyright © 2016, The Authors
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