1. Compositional and morphological characterizations by SIMS, RBS and AFM Paolo Mazzoldi, N. Argiolas, G. Battaglin, C. Sada Physics Department G.Galilei, University of Padova INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 Paris, 2006

2. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 III SIMS Analysis Sample A

3. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 SIMS analysis pointed out that: 1.The sample is made of two layer deposited on the substrate, the total thickness being (152±6)nm (estimation made by referring to the FWHM of Si signal. 2. The first layer has a thickness of (107±3)nm, while the second layer has a thickness of (45±6)nm. Important: the depth is strongly affected by the surface roughness. 3.The first layer contains a significant content of Al, O and presence of Fe, Ni, Co. It presents a segregation peak of Cr at the interface with the second layer, whose composition is dominated by Cr and oxygen. At the interface with the substrate a segregation of Cr is observed.

4. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 SIMS Analysis Sample B

5. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 SIMS analysis pointed out that: 1.The sample is made of two layer deposited on the substrate, the total thickness being (151±6)nm (estimation made by referring to the FWHM of Si signal. 2.The first layer has a thickness of (107±3)nm, while the second layer has a thickness of (44±6)nm. Important: the depth is strongly affected by the surface roughness. 3.The first layer contains a significant content of Al, O and presence of Fe, Ni, Co. It presents a segregation peak of Cr at the interface with the second layer, whose composition is dominated by Cr and oxygen. At the interface with the substrate a segregation of Cr is observed.

6. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 RBS analysis Sample A Compound A a B b where 1° layer Al = 2.00 O= 3.10 2° layer Cr=1.00 O=0.10

7. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 Sample B Compound A a B b where 1° layer Al = 2.00 O= 4.16 2° layer Cr=1.00 O=1.20

8. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 AFM analysis and profilometer scans Characterization of the ruler (Fig.1 sample A, position 1) The estimation of the total length of 20 markers is: 185.9 0.4 m.

9. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 SAMPLE B Quality of the etched edges, height of the structure

10. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 Description Mean value ( m) ( m) m ( m) Sharp edge steepness0.2800.600.020 Total height of the structure0.1890.0060.002

11. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 SAMPLE A Mapping of the test structure in sample A (fig.2, position 2) The scans of the deep groove evidenced an accumulation at the groove borders. The height H g and the width W g of the deep groove with respect to the flat surface (i.e. not considering these accumulations) was quantified: H g =(0.19 0.01) m, W g =(0.96 0.02) m respectively, the error being given by the maximum semi-dispersion.

12. INFM e Dipartimento di Fisica G.Galilei, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova TC19 The scans of the wall evidenced that the height H w and the width W w of the wall was respectively: H w =(0.195 0.007) m, W w =(2.45 0.01) m respectively, the error being given by the maximum semi- dispersion.