1. SRC Review – October 4 th, 2005 © 2005 M.Y. Simmons Single atom imaging and manipulation Don Eigler (IBM), Science 262, 218 (1993) Silicon (100) surface Fe atoms on the Cu(111) surface STM manipulation of single atoms is possible but complete device fabrication procedure in vacuum requires ability to locate devices – 1 in 1 trillion chance

2. SRC Review – October 4 th, 2005 © 2005 M.Y. Simmons Atomically precise single P atom placement 350°C S.R. Schofield, N.J. Curson, M.Y. Simmons et al., Phys. Rev. Lett. 91 136104 (2003). 50 nm Coarse Fine Atomic 150 350 550 750 Temp. (°C) PH 3  PH 2 PH 2  P (incorporated) H desorption P desorption

3. SRC Review – October 4 th, 2005 © 2005 M.Y. Simmons Using STMs to fabricate devices SCANNING TUNNELING MICROSCOPE SCANNING ELECTRON MICROSCOPE OPTICAL MICROSCOPE 30μm100μm HUMAN EYE 2 mm