1. http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Vector Raptor VR Matching This presentation illustrates the VR Matching sub-module of Vector Raptor Data Analysis: Two ASML FOCAL Datasets Both: 2419 resist 1 st dataset with 24 mj center dos, Post Reticle & RS clean 2 nd dataset, 24mj center dos Post RS clean

2. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 2 This is FOCAL data taken from an ASML/FOC_1400_300WN_R6 generation tool Two FOCAL datasets were measured. (originally in “tlg” format) The first was taken after a reticle & stage cleaning The reticle stage was cleaned a 2 nd time after the first data was examined. Approach to the analysis

3. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 3 VR Matching Interface InterField Precision data INTRAField Focus Data “Best Focus” INTRAField Focus Data “Best Focus” Plot Selection: Vector Contour Radial Horizontal XY Vertical XY Plot Selection: Vector Contour Radial Horizontal XY Vertical XY Mouse Commands: Graph Editor Cull data points Cull wafers Plot/Display data from boxed area Copy area to clipboard Mouse Commands: Graph Editor Cull data points Cull wafers Plot/Display data from boxed area Copy area to clipboard

4. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 4 Variable control Data cull by variable Select data to plot/display from “Features” combo  With this data we can choose vector, dz-H, dz-V or dz  dz=(H+V)/2 for focus data  Can be overlay, focus, film or CD data Select Family of data  Here it is based on the precision or full field data points Select wafers to use Data culling by variable name  Select variable  Press “Variable” to display a histogram of the variable  Includes only points in range  Min<Points<Max Plotted here is a 1-D vector plot (not contour) of the InterField precision focus and the IntraField focus uniformity

5. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 5 Vector Graph for dz-V (= “x focus” or vertical line focus) Graph along X axis shows focus has shifted down for 2 nd dataset C1 to C2 feature-family split is less Variation across field is greater Scales are set to same level InterField focus variation has shifted to lower values in the 2 nd dataset Focus profile of IntraField data has changed

6. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 6 Focus for dz-H (Horizontal line, Y-Focus) 1 st DataSet 2 nd DataSet

7. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 7 InterField Variation of Focus 1 st DataSet2 nd DataSet

8. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 8 IntraField Focus uniformity 2 nd cleaning of stage did not really help. 1 st dataset end-columns of field provided greatest variation in focus 1 st DataSet2 nd DataSet

9. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 9 IntraField Focus Radial Field Plot

10. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 10 IntraField with 5% & 95% Population Confidence Graph editor added in the BoxPlot confidence intervals