1. Semicon Pte Ltd Semicon Pte Ltd

2. 1. Purpose If a chemical leaks at the bottom of equipment or pipe fitting area, An Engineer can confirm the chemical type by visual without inspection without using litmus paper Even small leaks or fumes can be detected. Therefore, an Engineer can find the exact leak point and can prevent secondary accidents. Chemical Leak Finder Semicon Pte. Ltd

3. 2 2. Current Issues 1.An engineer needs Litmus paper to determine if a leak is acidic or alkali 2.Its not easy to find the exact leak point at the bottom of the tool. 3.Its difficult to detect small volume leaks. 4.Its almost impossible to detect chemical fumes without leak detectors. 5.Its too expensive to install leak detectors in all areas 6.It’s difficult to confirm chemical type at upper plenum area because it is difficult to reach. 7.Can’t use Litmus paper due to particle and fire issues. If Litmus Paper meets Acid it will cause a burn Chemical Leak Finder Semicon Pte. Ltd

4. 3. Tool Weak Point * If a chemical leak occurs in the inside of tool, Engineers need litmus paper to check chemical type. They also need time to find the exact leak point. It is very dangerous for the engineer to spend too much time identifying the type and exact leak point inside the tool because long exposures can cause health issues. * If a chemical leak occurs in the inside of tool, Engineers need litmus paper to check chemical type. They also need time to find the exact leak point. It is very dangerous for the engineer to spend too much time identifying the type and exact leak point inside the tool because long exposures can cause health issues. Chemical Leak Finder Semicon Pte. Ltd

5. 3. Line Weak point * At the bottom of equipment and upper area of Plenum, there are many * At the bottom of equipment and upper area of Plenum, there are many chemical pipe lines and difficult reach to check for leaks. chemical pipe lines and difficult reach to check for leaks. Chemical Leak Finder 3 2 Semicon Pte. Ltd

6. 3. Valve area Weak Point 1. Can’t confirm chemical type by visual 2.Need litmus paper if find liquid leak. 3. Can’t detect small size leak even if onje has a liquid leak detector 4. Can’t detect Chemical Fume (Chemical fume is more dangerous) (Chemical fume is more dangerous) Chemical Leak Finder 3 3 Semicon Pte. Ltd

7. 4 4. The Solution If one installs leak finder at suspect areas, Engineers can easily find chemical leak points and type by visual inspection. If one installs leak finder at suspect areas, Engineers can easily find chemical leak points and type by visual inspection. Leak finder can detect chemical fume and small leaks as well so engineers can prevent secondary accident with quick action Leak finder can detect chemical fume and small leaks as well so engineers can prevent secondary accident with quick action Chemical Leak Finder * Leak finder material is PVC. It doesn’t catch fire nor generate particles. * Leak finder material is PVC. It doesn’t catch fire nor generate particles. Semicon Pte. Ltd

8. 5. Product Test Chemical Leak Finder After install ACID Pipe ACID leak After install Alkali Pipe Alkali leak 5 1 Semicon Pte. Ltd

9. 5. Product Test Chemical Leak Finder Paper type Bottom area of tool Acid chemical leak 5 2 Semicon Pte. Ltd

10. 6. Chemical Reaction Test ( Sheet & Tape type) Chemical Leak Finder ■ Character : Same character with Litmus paper by Chemical optimization Can detect DI water Leak by visual. ■ Reaction Test : Different colors based on Acid & Alkali Ph concentration, It doesn’t melt even with 100% H 2 SO 4 PH 1 PH 2 DIWPH 9PH 11 PH 3PH 10 PH 7~8 6 1 Semicon Pte. Ltd

11. 6. Chemical Reaction Test ( C Ring type) Chemical Leak Finder ■ Character : Can detect Acid, Alkali and DI water. Can use high temperature ( Max 100 ℃ ) ■ Reaction Test : Different colors based on Acid & Alkali Ph concentration, Can confirm chemical type by visual PH 1 PH 2 DIWPH 9PH 11 PH 3PH 10 6 2 Semicon Pte. Ltd

12. Chemical Leak Finder 6 3 6. Fume Reaction Test (C Ring Type) Pump Exhaust line (No Gas Flow ) Chamber BCL3 Gas flow Pump Exhaust BCL3 Gas flow React by Chloline Fume Semicon Pte. Ltd

13. 7. Product Type Chemical Leak Finder 7 1 Ring Type Leak Finder Product Sheet Type Apron Type Wipes Type Tape Type Semicon Pte. Ltd

14. 7. Product Type : C Ring Type Chemical Leak Finder ■ Application : Liquid Delivery pipe Fitting ■ Size : Can supply Customer spec ( ¼”, ½”, ¾”, 1”, 2” etc. ) ■ Packing : 12EA / Box ■ Use : Acid & Alkali ■ Material : PE(Polyethylene) 7 1 Semicon Pte. Ltd

15. 7. Product type :Tape Type Chemical Leak Finder ■ Application : Bottom area of tool ■ Size : 20mm ~ 250mm / 50m ■ Packing : 1 EA ■ Use : Acid & Alkali ■ Material : PVC (Polyvinyl chloride) 7 2 Semicon Pte. Ltd

16. 7. Product type : Wiper Type Chemical Leak Finder ■ Application : Tool Cleaning or out side cleaning Can check Chemical during cleaning ■ Size : 215mm * 215mm ■ Packing : 100EA ■ Use : Acid & Alkali ■ Material : Polyester ■ Application : Working and Repair ■ Size : 770mm * 620mm ■ Packing : 10EA ■ use : Acid & Alkali ■ Material : PU Coating and no Particle 7 3 Wiper type Semicon Pte. Ltd

17. 7. Product type : Pipe cover Chemical Leak Finder 7 3 Semicon Pte. Ltd

18. 8. Leak zone Install sample 8 Chemical Leak Finder ■ Installed Tape and sheet type leak finder at base of tool. ■ Installed name and contact point sheet at corner area Semicon Pte. Ltd

19. 1010 10. Benefit Chemical Leak Finder This product doesn’t have any particle and fire issues and can detect Acid and Alkali chemicals by visual inspection. Its easily to find the exact leak point in order to prevent secondary accidents This product doesn’t have any particle and fire issues and can detect Acid and Alkali chemicals by visual inspection. Its easily to find the exact leak point in order to prevent secondary accidents Semicon Pte. Ltd

20. 9. Product Feature 9 Chemical Leak Finder Specifically designed for Chemical Lines No melting and fire issue for high concentration acid chemicals (PH 0~2) for Tape & Sheet No Particle issue No twisting or lifting with Chemical reaction Long life time inside of Fab. ( Only reacts with chemicals and Direct Sun light ) Semicon Pte. Ltd

21. 11. RFID Reader for Safety Patrol 11 Chemical Leak Finder ■ RFID READER with Software Option : 1D, 2D BARCODE SCANER 및 CAMERA MODULE After the engineer attaches an RF Tag at the Leak zone, Engineer can input Leak status (OK/no good) Can manage Patrol history with status Semicon Pte. Ltd