1. Birck Nanotechnology Center All-User Meeting January, 2013

2. BNC All-User’s Meeting Slide DeckJanuary, 2013 Nano-material Safety

3. BNC All-User’s Meeting Slide DeckJanuary, 2013 Handling Nano-materials Reducing potential for exposure:Reducing potential for exposure: –Work with material is a solution Double gloveDouble glove Wear a lab coatWear a lab coat –Dry material should be handled in an enclosure

4. BNC All-User’s Meeting Slide DeckJanuary, 2013 General Housekeeping Lithography Bay –Cleaning up of spilled material and maintaining equipment in and around the solvent hoods Fume-hood Etiquette –Please remove trash and glassware following use

5. BNC All-User’s Meeting Slide DeckJanuary, 2013 Cleanroom Reminders Waste Containers –Make sure capped following use –Please make sure halogenated waste is not mixed with non- halogenated waste. Waste Containers –Make sure capped following use –Please make sure halogenated waste is not mixed with non- halogenated waste.

6. BNC All-User’s Meeting Slide DeckJanuary, 2013 Unlabeled or partially labeled waste containers Bay D – 80% full Bay M – 20% full Bay N- 30% full Container are to have the name of the chemicalContainer are to have the name of the chemical And the estimated quantity placed in the containerAnd the estimated quantity placed in the container Partial and unlabelled bottles

7. BNC All-User’s Meeting Slide DeckJanuary, 2013 Empty Container Disposal Proper disposal of empty containers:Proper disposal of empty containers: –Container has been rinsed and semi-dried using a nitrogen gun. Cap has been removed. Disposal label has been applied.

8. BNC All-User’s Meeting Slide DeckJanuary, 2013 CHP/ RTK Compliance Plan Chemical Inventories and Material Safety Data Sheets Chemical Inventories and Material Safety Data Sheets Standard Operating Procedures Standard Operating Procedures Required Facility Training Required Facility Training Engineering Controls Engineering Controls Personal Protective Equipment Personal Protective Equipment Designated Areas of Use Designated Areas of Use Chemical Inventories and Material Safety Data Sheets Chemical Inventories and Material Safety Data Sheets Standard Operating Procedures Standard Operating Procedures Required Facility Training Required Facility Training Engineering Controls Engineering Controls Personal Protective Equipment Personal Protective Equipment Designated Areas of Use Designated Areas of Use Material Safety Data Sheets BNC 105 BNC 150

9. BNC All-User’s Meeting Slide DeckJanuary, 2013 MSDS Locations First Floor Locations Second Floor locations Material Sheets Data Safety

10. BNC All-User’s Meeting Slide DeckJanuary, 2013 MSDS’s at BNC MSDS manuals in the galleys are organized by lab room numberMSDS manuals in the galleys are organized by lab room number The chemicals filed numerically and the alphabetically by lab Note: A list of general chemicals with MSDS’s are supplied are listed in the front of the manuals to reduce space and redundancy in the manuals Note: A copy of the Chemical Hygiene Plan, Personal Protective Equipment Policy and Laser Safety Policy is available

11. BNC All-User’s Meeting Slide DeckJanuary, 2013 Emergency Spill Materials Chemical Spill Carts are available in the galleys for minor (< 1 gallon ) Except for fluorine-based chemicals (i.e. HF, BOE, Ammonium Fluoride). Contact Staff for assistance

12. BNC All-User’s Meeting Slide DeckJanuary, 2013 Chemical Spill Cart Locations 2 nd Floor 1 st Floor

13. BNC All-User’s Meeting Slide DeckJanuary, 2013 Cleanroom Emergency Equipment HF First Aid Spill Carts

14. BNC All-User’s Meeting Slide DeckJanuary, 2013 2 nd Floor 1 St Floor HF Decontamination Solution Locations

15. BNC All-User’s Meeting Slide DeckJanuary, 2013 Proper Pre-cleaning of Substrates TolueneAcetone/ trace Toluene IPA or methanol Blow dry with nitrogen gun Decant solvent

16. BNC All-User’s Meeting Slide DeckJanuary, 2013References REM Booklets and Guidelines page: Nanoparticle Safety and Health Guidelines REM Chemical Hygiene Program Page: http://www.purdue.edu/REM/ih/chp.htm http://www.purdue.edu/REM/ih/chp.htm Right-to-Know/Hazard Communication Program page: http://www.purdue.edu/REM/ih/hazcom.htm http://www.purdue.edu/REM/ih/hazcom.htm