1. Cleanroom safety in McGill Nanotool fab
John Li
Feb-2013

2. Contents Purpose cleanroom safety rules Emergency procedures Summary
New rules implemented
Emergency procedures
Summary

3. Purpose Reinforce the general safety policies
Keys safety practices in the cleanroom
New safety practices implementation

4. Cleanroom safety: where to start
Review the Safety and Behavior video
Review the Microfab's Policies
Review the chemical list (with MSDS)
Review the wet benches process
Review online safety training from McGill EHS unit

5. Cleanroom safety: The consequence not following rules
Dangerous for yourself and other users if not follow the rule properly (HF burned examples)

6. Cleanroom safety: Do’s/Don’ts
Always use bottle rinser to rinse/dry emptied bottle (acid/solvent) before put in pass-through and marked
Always use the dedicated green glove to transfer new acid bottle to acid bench
Always label your chemical in beaker (acid/solvent bench) all the times
Never touch acid bench N2 gun with cleanroom gloves
Never leave glassware in dump rinser after done
Never leave outside of green marker area with PPE on (except for getting chemical from cabinet or pass-through)

7. Cleanroom safety: Do’s and Don'ts at Acid bench (I)

8. Cleanroom safety: Do’s and Don'ts at Acid bench (II)

9. Cleanroom safety: Transfer samples at wetbench
Prepare your solution with PPE on
Wearing Apron and cleanroom gloves(Not green gloves), and with your own tweezers, to transfer your samples on clean/dry wipes
Put back on all PPE, using tweezers at wetbench to put samples in your beaker
Once Etching done, rinse, dry your samples and clean/dry the bench surface as well. And put the your samples on dry/clean wipe
Remove green gloves, and face shield (if you prefer), using your own tweezers to put the samples in your petri dish

10. Cleanroom safety: Pictorial steps of transferring samples at wetbench
Before Etch
Prepared Acid solution
with PPE on
Remove green gloves, transfer your sample
With your own tweezers to clean/dry wipe
After Etch
Once finished your work, Put back PPE to
Rinse/dry your samples and clean bench
Then remove green gloves, with cleanroom
gloves transfer your samples from wipes to
petri dish with your own tweezers

11. Cleanroom safety: Cleanup
A clean wetbench is a safe wetbench
Wet Bench checklist:
Return all chemicals to their proper storage area
Dispose of any used chemicals
Rinse out all containers you have used (graduated cylinders, beaker, etc.) and remove them from sink after rinse
Clean and dry the wetbench surfaces

12. Cleanroom safety: Transfer chemical bottles from pass-through to wetbench
Use the dedicated green gloves (which clamped by pass-through
Do NOT use cleanroom gloves

13. Cleanroom safety: green gloves in the proper position and order
Gloves for Metal bench
Gloves for Acid bench

14. Cleanroom safety: cleanup
Gloves for Site Coater
Gloves for Laurell coater

15. Cleanroom safety: Chemical disposal
Solvent and resist (To solvent waste container)
Acid and Base (TMAH) (cool down and dump in drain)
Metal etchant (dedicated waste containers)
Empty bottles of Acids and Solvents (rinse, mark and put in pass-through)

16. Emergency Procedures: Evacuation (I)
Should any of the following situations occurs: • Ventilation system failure (ie., fresh air/exhaust systems/cleanroom power failure) • Large chemical spill • Fire alarm sounded • or should any other imminently dangerous situation present itself

17. Emergency Procedures: Evacuation (II)
Must take the following actions IMMEDIATELY: • WARN anyone within their immediate area of the danger. • TURN OFF any equipments being used via the safest manner if possible. • EXIT the fab in a calm, orderly manner via: • INFORM Fab Personnel OR call McGill Security by dialing 3000

18. Emergency Procedures Accidental contact with a chemical
Remove contaminated clothing and flush with cold water for at lease 15 minutes.
The extent of any injury, even if no injury seems apparent, MUST be evaluated by a medical doctor immediately
In case of HF, gently massage calcium gluconate ointment into skin. This material in the NanoLab First Aid Kit

19. Emergency Procedures: Fire safety
When you hear a fire alarm you must immediately exit the Clean Room through the closest emergency exit doors (No need to remove clean room bunny suits).
Trigger an alarm if it is possible when a fire occurs in cleanroom

20. Report to staff immediately when
There is abnormal smell or odour
There is strange noise/sound
There is gas/water leak
Or any other abnormal situations

21. Summary Clean fab is a safe fab
All users in the microfab are expected to take steps to ensure that health and safety of other lab members will not be endangered.
Every users are requested to correct other users dangerous behaviours in cleanroom
It is YOUR fab and YOUR safety matters