1. 1 Granite table 1000×1500×500, 2.2tons CFRP SUS Channel 100x50 → 150x75 Level Jack < 5000kg Dec. 04,’03 KEK H. Yamaoka

2. 2 FEM Model ・ Thermal Effect(±1 ℃ ) ・ Deformation due to self-weight ・ Resonant frequency ・ P.S.D

3. 3 Thermal Effect(±1 ℃ ) CFRP SUS Granite SUS SUS Granite CFRP Young’s modulus(kg/mm 2 ) : 2.1×10 4 4.8 ×10 3 1.5×10 4 Density(×10 -6 kg/mm 3 ) : 7.85 2.8 1.6 Thermal expansion coeff.(×10 -6 / ℃ ): 17 8 0.

4. 4 P2 = -6  m P1 P2 P1-P2 = 0.23  m Self-weight P1 P2 P2 = +11  m P1-P2 = 4.3  m Self-weight + +1 ℃ P2 = -23  m P1-P2 = 3.8  m Self-weight + -1 ℃ CFRP SUS Granite SUS P2 = +16  m P1-P2 = 4.1  m P1 P2 +1 ℃ P2 = -16  m P1-P2 = 4.1  m -1 ℃

5. 5 CFRP→ GFRP or Alumina(Ceramics) SUS Granite SUS → GFRP or Alumina(Ceramics) GFRP Alumina Granite Young’s modulus(kg/mm 2 ) : 4.5×10 3 1.5×10 4 3.5×10 4 Density(×10 -6 kg/mm 3 ) : 2 2.9 2.8 Thermal expansion coeff.(×10 -6 / ℃ ): 7, 23 8 7.8 Alumina ceramics, most widely used material among fine ceramics, has same sintered crystal structure (Al 2 O 3 ) as Sapphire and Ruby. Its application is widely used due to its superb properties such as high insulation, high strength, high wear-resistance and chemical resistance.

6. 6 Deformation @P2 Difference(P1-P2) Side plate SUS Granite Base plate Ref. bar Unit:  m P1P2

7. 7 P2 = -4.5  m P1P2 P1-P2 = 0.18  m P2 = +13  m P1-P2 = 0.09  m P2 = +9  m P1-P2 = 0.3  m Self-weight +1 ℃ Self-weight + +1 ℃ P2 = -18  m P1-P2 = 0.1  m Self-weight + -1 ℃ P2 = -13  m P1-P2 = 0.09  m -1 ℃ Alumina SUS Granite Alumina

8. 8 Resonant Frequencies 2nd: 110Hz 3rd: 143Hz 4th: 239Hz 1st: 88Hz CFRP SUS Granite SUS

9. 9 L C R Z Y X Fixed 0.5nm/Hz 1/2 0.03nm/Hz 1/2 0.3nm/Hz 1/2 X-direction Y-direction Z-direction