1. Excimer Laser Repair Corporation™ Corporate Profile

2. MISSION STATEMENT:
ELRC’s mission is to reduce the cost of ownership for users of Cymer lasers through reduced parts costs, training and maintenance tools to enable the customer control performance and operation of customer’s excimer lasers.
ELRC Confidential

3. ELRC Customer Focus
Dedicated saving operating costs for their photolithography lasers.
Repair, refurbish, service, and supply maintenance tooling for Cymer lasers series 5000, 6000, and 7000 series.
Training and tools to enable customer to take greater control of all aspects of their excimer lasers.
ELRC Confidential

4. ELRC History Founded: March 2005 Location: San Diego, California
Target market: Cymer excimer lasers
Ownership: Private Funding
Employees: 10 full time and 6 part time
Properties: >6,000 square feet of space
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5. ELRC Key Employee Profile
Role
Experience
Ken Rebitz
CEO, Founder
32 yrs. (Cymer, National, ST, AMAT, Litel)
Roger Nielson
VP, Sales and Marketing, Founder
25 yrs. (Cymer, Spectranetics, Coherent)
Dr. Jesse Buck
CTO, Founder
25 yrs. (Cymer, Molectron, Microradian, Intralase)
Curt Mixon
Engineering and Operations, Founder
31 yrs. (Cymer, Mostek, JMAR, General Atomics)
Dave Schreck
Facilities Manager
20 yrs. (Cymer, US Navy, Northrup Grumman)
Miguel Sanchez
Field Service Engineering Supervisor
10 yrs. ( Cymer, Samsung, ELRC)
Ty Krebs
Final Test Supervisor
5 yrs. (Coherent, ELRC)
Arsenio Austria
Manufacturing Supervisor
10 Years (Cymer, ELRC)
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6. Products and Services Offered
Photolithography Excimer Laser Full system support
System refurbishment with OEM equivalent warranties
Parts and service for the following Models;
ELS-5000
ELS-6000
NL-7000*
*Non-Consumables available now, consumables late 2011.
ELRC Confidential

7. Additional Products and Services Offered
Refurbish entire lasers with warranties.
On-site training with maintenance tools
95% or more of laser maintenance can be done by customer personnel.
Save on expensive service contracts
Increase uptime—no waiting for service people.
Consignments
Current consignments in Austin, Portland, Seoul, Singapore and in Europe.
Can be set up at customer location or local office.
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8. Products and Services Your business strategy Train customers
Buy parts as needed
Equivalent to OEM “by-the-pulse”.
Other ideas, we are flexible.
Train customers
ELRC facility
Customer fab
Laser Operations, level 1 and Higher
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9. Products and services--Tools
ELRC developed maintenance tools to diagnose electrical, mechanical and optical performance
Software: Works with other tools to automate the power and pressure calibration of the laser.
(PPMD) Portable Pressure Measurement Device: Calibrates gas pressure transducers.
(PMCT) Power Measurement Calibration Tool: Calibrates internal energy monitor.
(CBAT) Coarse Beam Alignment Tool: Visual beam alignment check.
(QBIT) Quantitative Beam Imaging Tool: Digital image of the beam profile and alignment—optimize laser energy output.
(PTTT) Pulse Timing Tool: Ensures accurate timing between trigger and laser pulse.
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10. ELRC software interface
Software calculates offsets and configurable settings then automatically updates laser with new values.
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11. Portable Pressure Measurement Device (PPMD)
Calibrates internal pressure transducers
Software calculates and updates the offsets and configurables.
Accurate gas refills
Precise gas injections to optimize voltage, bandwidth, and energy sigma.
No manual data entry-fewer mistakes.
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12. Power Meter Calibration Tool
Calibrates the internal energy monitor.
Software automatically updates laser system with the calibration data.
Meter easily fits on laser at beam dump location.
Custom Power meter with
insertable mirror attached
Installed on laser
ELRC Confidential

13. Coarse Beam Alignment Tool
Visual image of the beam
Ensure the line narrowing module, chamber, and wavelength stabilization module are aligned.
Fits on laser at beam dump location
Installs in seconds.
In use
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14. Quanititative Beam Imaging Tool
Digital image of beam profile.
Image stored for comparison to prior images
Track performance over module life.
Quantitative beam energy distribution
Align for maximum energy out.
June ’11 ELRC Confidential

15. QBIT Tool Software Screen view Unit installed in Laser
July ‘10 ELRC Confidential

16. Facilities in San Diego
Four labs with 7 lasers installed.
3-5000s, 1 development, 2 test
3-6000s, 1 development, 2 test
used for both development and test
500 square feet of clean assembly
clean and tear down area
Warehouse with large parts storage
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17. Current install base 5000 series >120 discharge chambers
>60 optical modules, WSM and LNM
6000 series
>50 Discharge Chambers
> 25 Optical modules
Other parts required to support the systems available.
Other parts including vacuum pumps, High Voltage Power supplies, commutator, F2 traps, boards, water modules etc.
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18. Customer Installations
European Installations:
Germany, Israel
Asia Installations:
S. Korea, China,
Japan, Singapore,
Taiwan, Malaysia
USA Installations:
Austin, Dallas,
Colorado Springs,
Los Angles, Portland,
San Jose, Virginia
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19. Sales and Support Direct Sales in the US
Expert service engineers in Austin and Escondido.
Phone support from factory and service engineers.
Parts depots in Austin, Portland and Escondido.
Representatives in overseas locations
OEM trained service engineers.
Inventory stocked in Europe, Seoul, Singapore,
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20. Distribution and represtation
Europe is covered
both direct and with
representation
USA
Direct Sales
Asia representation in:
S. Korea, China,
Japan, Singapore,
Taiwan, Malaysia
Consignment Stock:
USA , S. Korea, China, Japan, Singapore, Taiwan
ELRC Confidential

21. Conclusion ELRC provides a low cost solution for laser operations
Provide ALL parts necessary for your 5000, 6000 generation Cymer lasers
Provide the parts, services, tools and training to be your complete source for Cymer laser support.
ELRC Confidential