1. Industrial Electrical Engineering and Automation Actuators Linear movement and vibration

2. Industrial Electrical Engineering and Automation Linear movement In some (many) industries the most common movement. Realised from rotating via tooth belts or screws.

3. Industrial Electrical Engineering and Automation Translation (linear) motor ”Stationary” ”Moving (Rotor)” Airgap

4. Industrial Electrical Engineering and Automation Hydraulics Positive High force and power density Established technic Negative Pump Oil storage (fire risk) Filter Maintenance

5. Industrial Electrical Engineering and Automation Pressure air Positive No storage Established technic Negative Compressor Filter Maintenance

6. Industrial Electrical Engineering and Automation Piezoelectric Lead Zirconate Titanate d 33 is on the order of 450 to 650 x 10 -12 m/V, d 31 is on the order of -200 to -300 x 10 -12 m/V.

7. Industrial Electrical Engineering and Automation Properties Unlimited Resolution A piezoelectric actuator (PZT) can produce extremely fine position changes down to the subnanometer range. The smallest changes in operating voltage are converted into smooth movements. Motion is not influenced by stiction/friction or threshold voltages. Large Force Generation PZTs can generate a force of several 10,000 N. PI offers units that can bear loads up to several tons and position within a range of more than 100 µm with subnanometer resolution (see "PZT Actuators" section)."PZT Actuators" Fast Expansion Piezo actuators offer the fastest response time available (microsecond time constants). Acceleration rates of more than 10,000 g's can be obtained. No Magnetic Fields The piezo effect is related to electrical fields. PZT actuators don't produce magnetic fields nor are they affected by magnetic fields. They are specially well suited for applications where magnetic fields cannot be tolerated. Low Power Consumption The piezo effect directly converts electrical energy into motion only absorbing electrical energy during movement. Static operation, even holding heavy loads, does not consume power. No Wear and Tear A piezo actuator has neither gears nor rotating shafts. Its displacement is based on solid state dynamics and shows no wear and tear. PI has conducted endurance tests on PZTs in which no change in performance was observed after several billion cycles. Vacuum and Clean Room Compatible Piezo actuators are ceramic elements that do not need any lubricants and show no wear and abrasion. This makes them clean room compatible and ideally suited for Ultra High Vacuum applications. Operation at Cryogenic Temperatures The piezo effect is based on electric fields and functions down to almost zero Kelvin (with reduced specifications).

8. Industrial Electrical Engineering and Automation Laminar design  L  d 31 *L * U/d D31 = - 250e-12 m/V d=thickness  d  d 33 * U D 33 = + 500e-12 m/V

9. Industrial Electrical Engineering and Automation Tube design  L  d 31 *L * U/d d31 = - 250e-12 m/V

10. Industrial Electrical Engineering and Automation Stack design  L  d 33 * U d 33 = + 500e-12 m/V

11. Industrial Electrical Engineering and Automation Actuators

12. Industrial Electrical Engineering and Automation Applications Optics, Photonics and Measuring Technology Image stabilization Scanning microscopy Auto focus systems Interferometry Fiber optic alignment & switching Fast mirror scanners Adaptive and active optics Laser tuning Mirror positioning Holography Stimulation of vibrations Disk Drive MR head testing Pole tip recession Disk spin stands Vibration cancellation Microelectronics Nano-metrology Wafer and mask positioning Critical Dimensions measurement Microlithography Inspection systems Vibration cancellation Precision Mechanics and Mechanical Engineering Vibration cancellation Structural deformation Out-of-roundness grinding, drilling, turning Tool adjustment Wear correction Needle valve actuation Micro pumps Linear drives Piezo hammers Knife edge control in extrusion tools Micro engraving systems Shock wave generation Life Science, Medicine, Biology Patch-clamp drives Gene technology Micro manipulation Cell penetration Micro dispensing devices Audiophysiological stimulation Shock wave generation

13. Industrial Electrical Engineering and Automation TERFENOL-D ACTUATOR ADVANTAGES HIGHEST DISPLACEMENT OF ANY SOLID STATE ACTUATOR HIGH FORCE RELATIVELY FLAT FREQUENCY RESPONSE MICROSECOND RESPONSE PRECISE CONTROL OPERATES OVER A WIDE RANGE OF TEMPERATURES LOW VOLTAGE OPERATION

14. Industrial Electrical Engineering and Automation Applications MACHINE TOOLS POSITIONING AND CONTROL INTERNAL COMBUSTION ENGINES FUEL INJECTORS HYDRAULICS PUMPS AND VALVES AEROSPACE PRECISE POSITIONING

15. Industrial Electrical Engineering and Automation Link http://www.physikinstrumente.com/tutorial/index. htmlhttp://www.physikinstrumente.com/tutorial/index. html