1. © 2003 Swagelok Company HF Series Compact, High Flow Gas Regulators

2. © 2003 Swagelok Company Compact Size High Flow Less Droop Overpressure Protection Low Creep Tamper-Free / All-Welded Design Preset Pressure and Adjustable FeaturesFeatures

3. © 2003 Swagelok Company Design and Construction Body Pressure Sensing Assembly

4. © 2003 Swagelok Company Design and Construction Body Inlet Flow Path Outlet Seat Sensing Chamber Orifice

5. © 2003 Swagelok Company Design and Construction Diaphragms Poppet Nitrogen/Helium Charge Damper Face Plate Poppet Retaining Wafer Support Housing Fill Screw and Gasket Charge Screw Stem

6. © 2003 Swagelok Company How HF Series Regulators Work

7. © 2003 Swagelok Company OperationOperation HF Series Regulator in an Unpressurized System Face Plate Poppet Inlet

8. © 2003 Swagelok Company OperationOperation Designed Operating Condition Inlet

9. © 2003 Swagelok Company OperationOperation Inlet Pressure Increases

10. © 2003 Swagelok Company OperationOperation Designed Operating Condition

11. © 2003 Swagelok Company OperationOperation Inlet Pressure Decreases

12. © 2003 Swagelok Company OperationOperation Designed Operating Condition

13. © 2003 Swagelok Company OperationOperation Flow Increases

14. © 2003 Swagelok Company HF Series Regulators Features

15. © 2003 Swagelok Company Compact size  Less than half the size of conventional diaphragm regulators High Flow Less Droop Overpressure Protection Low Creep Tamper-free / All-welded Design Preset Pressure and Adjustable FeaturesFeatures

16. © 2003 Swagelok Company Compact Design HF Series Conventional

17. © 2003 Swagelok Company Compact Design HF Series Conventional

18. © 2003 Swagelok Company Compact Design Conventional HF Series

19. © 2003 Swagelok Company Compact Size High Flow  Up to 300 std L/min Less Droop Overpressure Protection Low Creep Tamper-free / All-welded Design Preset Pressure and Adjustable FeaturesFeatures

20. © 2003 Swagelok Company High Flow Flexible Welded Diaphragm Greater Poppet Movement

21. © 2003 Swagelok Company Compact size High Flow Less Droop  Eliminates the need for adjustment in many systems  May reduce the number of regulators in a system Overpressure Protection Low Creep Tamper-free / All-welded Design Preset Pressure and Adjustable FeaturesFeatures

22. © 2003 Swagelok Company Less Droop Flexible Diaphragm More Consistent Load Larger Effective Sensing Area

23. © 2003 Swagelok Company Flow Rate std L/min 01020304050 0 5 10 15 20 25 Outlet Pressure (psig) low pressure limit for MFC one tool two tools three tools four tools DroopDroop 0 0.3 Outlet Pressure (bar) 0.6 0.9 1.2. 1.5 1.7

24. © 2003 Swagelok Company DroopDroop What is Droop?  Droop is a performance characteristic of all regulators where outlet pressure decreases as flow increases. 100 psig 6.8 bar 20 psig 1.3 bar 10 std L/min 100 psig 6.8 bar 30 std L/min 16 psig 1.1 Bar

25. © 2003 Swagelok Company DroopDroop low pressure limit for MFC one tool two tools three tools four tools inlet pressure is constant Flow Rate std L/min 01020304050 0 5 10 15 20 25 Outlet Pressure (psig) Conventional Regulator 0 0.3 Outlet Pressure (bar) 0.6 0.9 1.2. 1.5 1.7

26. © 2003 Swagelok Company DroopDroop Flow Rate std L/min 0 5 10 15 20 25 01020304050 Outlet Pressure (psig) low pressure limit for MFC one tool two tools three tools four tools inlet pressure is constant Conventional Regulator HF series Regulator 0 0.3 Outlet Pressure (bar) 0.6 0.9 1.2. 1.5 1.7

27. © 2003 Swagelok Company Tools Isolation Gas Boxes H 2 CylinderGasCabinets CF 4 SF 6 4 SiH Gas Splitter Boxes / VMB N 2 O Specialty Gas Distribution System

28. © 2003 Swagelok Company Specialty Gas Distribution System Specialty Gas Distribution System Cylinder Gas Cabinets 4SiH Gas Splitter Boxes / VMB Gas Isolation Box 20 psig 1.7 bar 10 std L/min Cylinder Gas Cabinets 4SiH Gas Splitter Boxes / VMB Gas Isolation Box 20 psig 1.7 bar 10 std L/min Conventional HF Series

29. © 2003 Swagelok Company Specialty Gas Distribution System Specialty Gas Distribution System Cylinder Gas Cabinets 4SiH Gas Splitter Boxes / VMB Gas Isolation Box 20 std L/min Cylinder Gas Cabinets 4SiH Gas Splitter Boxes / VMB Gas Isolation Box 20 std L/min Conventional HF Series 18 psig 1.2 bar 19 psig 1.3 bar

30. © 2003 Swagelok Company Specialty Gas Distribution System Specialty Gas Distribution System Cylinder Gas Cabinets 4SiH Gas Splitter Boxes / VMB Gas Isolation Box 40 std L/min Cylinder Gas Cabinets 4SiH Gas Splitter Boxes / VMB Gas Isolation Box 40 std L/min Conventional HF Series 14 psig 1.0 bar 17.5 psig 1.2 bar

31. © 2003 Swagelok Company Less Droop Can Provide  Fewer alarms  Fewer regulators  More consistent process

32. © 2003 Swagelok Company Compact size High Flow Less Droop Overpressure Protection  Tolerates full inlet pressure through the outlet without damage Low Creep Tamper-free / All-welded Design Preset Pressure and Adjustable FeaturesFeatures

33. © 2003 Swagelok Company OverpressureOverpressure Poppet Retaining Wafer Extends to Protect the Poppet and Diaphragm Diaphragms Compress Against the Backstop

34. © 2003 Swagelok Company Compact size High Flow Less Droop Overpressure Protection Low Creep  Decreases the likelihood of damage or shutdown from pressure build up due to outlet pressure creep Tamper-free / All-welded Design Preset Pressure and Adjustable FeaturesFeatures

35. © 2003 Swagelok Company Tied Poppet Dampening Mechanism Self Centering, Non-rotating Poppet Low Creep Flexible Diaphragm

36. © 2003 Swagelok Company Compact size High Flow Less Droop Overpressure Protection Low Creep Tamper-free / All-welded Design  Reduces potential for improper adjustment  All-welded design reduces the potential for leaks Preset Pressure and Adjustable FeaturesFeatures

37. © 2003 Swagelok Company HF series Regulators Set Pressure Regulators  HFS4A High pressure  HFS4B High Pressure  HFS3B Compact size Remote Adjustable Regulators  HFD3B Conventional Mounting  MSM-HFD3B Modular Surface Mount (igc TM ll)

38. © 2003 Swagelok Company Remotely Adjustable HF Regulators Gas Actuator Inlet Poppet Retaining Wafer Dampening Mechanism Outlet Poppet Flexible Diaphragm

39. © 2003 Swagelok Company 35 psig (2.4 bar ) Control Panel Pilot Regulator Welded Seal Adjustable or Preset Conventional Mount Regulator Remotely Adjustable HF Regulators

40. © 2003 Swagelok Company Preset Models of:  0.7 bar (10 psig)  1.4 bar (20 psig)  2.0 bar (30 psig)  3.4 bar (50 psig)  5.5 bar (80 psig) Custom Settings Preset Pressure Settings (4.1) (3.4 ) (2.7) (2.0) (1.4) (0.7)

41. © 2003 Swagelok Company VCR  Split-Nut™ Female Split Nut Male Split Nut Spring Pins Pins Guides Hex Collar

42. © 2003 Swagelok Company VCR  Split Nut Assemblies™

43. © 2003 Swagelok Company HF Series Regulators