1. Metallic Nanoneedles Arrays for “Lift-Out” TEM Sample Preparation Romaneh Jalilian, Brian Miller, David Mudd, Neil Torrez, Jose Rivera, and Mehdi M. Yazdanpanah NaugaNeedles LLC, Louisville, KY

2. Purpose Introduction to NaugaNeedles technology Review Standard probe for TEM Lift-out Using Needle Array to sharpen W probe (Needle-Tipped Probe ) Needle-Tipped Probe for TEM Lift-out Summary 2

3. 10  m Silver coated cantilever Ga droplet Time lapse images of an Ag 2 Ga needle growing from a melted drop of gallium An Introduction to NaugaNeedles Technology 5m5m 3 [M.M. Yazdanpanah, J. Appl. Phys. Vol. 98 (2005)]

4. 4 Properties 1.Mechanical Spring constant (K) = 0.1 - 1 (N/m), Resonance frequency (f 0 ) = 20 -10 (MHz) Young’s modulus (E) = 84 ± 1 (Gpa) 2.Electrical Electrical Resistivity (ρ)= 2 × 10 -7 (Ωm) Max Current Density (J) : 1.5 × 10 -11 (A/m 2 ) 3.Thermal Melting point (experimental) = 950 o C 4.Resistive to Reactive Ion Etching (RIE) Applications AFM, SGM, SECM, EFM, STM, nano-cantilever, … Ag 2 Ga Nanoneedles

5. 5 Example of Nanoneedle Application for AFM (EFM) Enhancement of electric force microscopy (EFM) imaging on CNT nano-composite [M. Zhao et al, Nanotechnology 21 (2010) 225702

6. Grow arrays of Ag 2 Ga nanoneedles on prefabricated structures Nanoneedles Diameter (W, Ag, Cr, Pt coated) : 500nm- 1000nm Nanoneedles Length : 15µm to 50µm Array contains minimum of 1000 nanoneedles NaugaNeedles Array Technology 6 [R. Jalilian et al, Nanotechnology 22 (2011)] Overall SEM view of a NaugaNeedles array Close up view of a coated needle in the array 5 µm 40 µm

7. Problems With Lift-Out Using Standard Tungsten Probes 7 Sharpening process usually takes several minutes A tungsten probe may be replaced after a few uses The extended sharpened tungsten tip is on axis with the tungsten probe, which limits application

8. Fabrication of Needle-Tipped Probe 2 µm Weld a Needle ~ 1 min 5 µm Cutting from base ~ 1 min Remaining needle Find a needle in the array and approach the probe ~ 3 min The Needle-Tipped probe is ready to use 1.Locate a selected nanoneedle on array 2.Rotate the needle array at the desired angle 3.Weld a tungsten probe to the needle 4.Cut the needle free from the array substrate 8 (a) (b) (c)(d)

9. Lift-Out Process Using Needle-Tipped Probe 9

10. Clear view of connection in FIB when the needle is in contact with the specimen Improved sample viewing in SEM when the needle is in contact with the specimen Improved Sample Viewing Using Needle-Tipped Probes 10

11. Needles-Tipped Probes are Flexible and Durable 11 Needle bend without plastic deformation Keep similar properties after cutting and re-welding After cutting, back to original shape Bending test after second welding 1.7 µm 1 µm (c) (d) First bending test 1.8 µm (b) (a) Before bending 1 µm

12. 12 Vibration Test of the Welded Needle During Sample Movements The Welded Needles can survive severe mechanical vibration and shocks

13. A Nano-Fork Made from Needles for Weldless Lift-Out The movie demonstrates the use of fork made by needles for weldless lift-out 13

14. Advantages of Using NaugaNeedles Array for Lift-Out Better mechanical properties than W probe More FIB uptime due to less W tip changes User maintained tip by sharpening inside TEM Curve the shape for best sample viewing Needles have constant small diameter Needles flexibility during touch down No sample welding using nano-Fork 14

15. Introduced Ag 2 Ga Nanoneedles technology Reviewed Nanoneedles properties and application Demonstrated W probes sharpening using needle array Demonstrated Lift-Out using Needle-Tipped Probe Examined the Needle-Tipped Probe properties Reviewed Needle-Tipped probes advantages for Lift-Out Summary 15

16. 16 Thank You

17. Needle-Tipped Probe fabrication: 1.Locate a nanoneedle on array in the TEM system 2.FIB-weld the W probe to the nanoneedle 3.FIB-cut the needles from the array Needle-Tipped Probe for Lift-Out: 1.Bring the Needle-Tipped Probe in contact 2.Weld the nanoneedle to the sample 3.FIB-cut the specimen 4.Transfer the specimen to TEM grid 5.FIB-cut the Needle-Tipped Probe Procedure 17

18. More examples of Needle-Tipped probe in action 18

19. 19 5 µm Needle Slightly buckles Robust Nanoneedles, Less Buckling The needle pushed against the specimen  The specimen displaced severely  But Nanoneedle buckles slightly