1. Confidential Mega SD200 Model 104L and Mega MB1120 Slurry Dispense Systems Level 1 Training Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Home Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation

2. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 1: Safety

3. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Safety Rules Before operating any Mega Fluid Systems, Inc. equipment, follow these safety rules: All personnel must have proper training in related safety procedures. Do not allow unauthorized or untrained personnel in the area of the system. Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system. Personal Protective Equipment (PPE) is required. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE. Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS. Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance. Treat all chemical spills or leaks as hazardous and clean up immediately. Safety Rules

4. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Safety Features Emergency Machine Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. Door Interlocks Opening an interlocked door triggers an alarm (unless the interlock bypass is activated) To prevent disrupting chemical/slurry dispense, bypass interlocked doors before opening (as needed; return to normal operating mode as soon as possible) Leak Detectors Stops the tool and activates a critical alarm Safety Features

5. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Safety Hazards & Symbols Pick one (until you’ve picked all 3) Pay attention to system labeling! DANGER WARNING CAUTION Safety Hazards & Symbols

6. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Safety Hazards & Symbols Pay attention to system labeling! DANGER indicates a hazardous situation which, if not avoided, WILL result in death or serious injury. Safety Hazards & Symbols DANGER WARNING CAUTION

7. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Safety Hazards & Symbols Pay attention to system labeling! WARNING indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. Safety Hazards & Symbols DANGER WARNING CAUTION

8. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Safety Hazards & Symbols CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries. Pay attention to system labeling! Safety Hazards & Symbols DANGER WARNING CAUTION

9. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Lockout/Tagout 1.Bleed off the pressure or flush all lines carrying hazardous chemicals. 2.Turn off or return all operating controls to the neutral mode. 4.Place the AC Disconnect switch in the Off position. 3.Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic. 5.Place and lock a padlock on the disconnect switch. 6.Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag. 7.Test the valve or switch to ensure the control cannot be moved to the activated position. 8.Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work. 9.Re-test the controls of the individual machine or equipment to verify the operation is positively off. Lockout/Tagout

10. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Emergency Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. CAUTION EMO button must be accessible! Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency. Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure. Emergency Off (EMO)

11. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Key Failure Points Changing out an empty supply drum/tote Sampling system chemical Flushing the system Checking for leaks Performing a particle count Transporting chemicals to the system Filling the pipes with air Changing pumps, valves, filters, pressure switches, etc. Handling PPE after use The following procedures (but not limited to) may place you at risk of chemical exposure:

12. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Spill Mitigation Treat all chemical spills as extremely hazardous. Notify the proper site authority. Follow all site specific rules for chemical spills. Follow all information contained in the MSDS. If possible, contain the spill with absorbent barriers. If possible, neutralize the spill according to the MSDS. Mega systems are designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If a spill should happen:

13. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 2: System Overview

14. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation SD200 System Overview The Mega SD200 Slurry Distribution System, Model 104L continuously transfers and filters raw slurry from a transport container (drum/tote) to a day tank. The slurry is then filtered again and dispensed from the day tank to the distribution header. The system enables placement of slurry totes and/or slurry drums in close proximity while the global distribution to tools can be at a different elevation within 40 meters of the system.

15. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Wait… Start Animation Press Start Animation SD200 Sequence of Operations Overview Transfer Mode CDA Global Loop Return PT MV S02 MV S01 MV S03 PT AV G01 MV S05-A MV S06-B MV S06-A MV S07 Global Loop Supply PT Drain DI MV S04 MV S05-B AV G02 MV D04 MV D03-B MV D03-A MV W07-A MV D02-A MV W07-B MV D02-B MV W06 MV D01 MV S08 MV W03 Drain Sample Drain NV Q01 Sample Port Jet Nozzle Sparger The first operating mode is the transfer mode from the raw material shipping container; either IBC totes or drums. The raw slurry is withdrawn from a drum using a pneumatic dual diaphragm pump. The material is then pumped through a 10" filter and into the day tank. The filter is equipped with manual flush/drain/and vent valves to permit elimination of gas and to facilitate maintenance, such as filter element change. Pressure drop across the filter is monitored and a filter element change alarm is triggered by the appropriate differential pressure. Next Page SD200 Sequence of Ops

16. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation CDA SD200 Sequence of Operations Overview, continued Dispense Mode Slurry is taken from the day tank and pumped to the global loop (GL). This dispense goes through a 20" filter remove particles to an acceptable level for consumption. This dispensing material can be manually sampled after the filter for QA/QC check and analysis. The dispense circuit filtering has two parallel 20" filters with isolation valves to permit continuous operation during filter maintenance. The pressure drop across the active filter is continuously monitored. An alarm is triggered based on the set differential pressure measurement. CDA Global Loop Return PT MV S02 MV S01 MV S03 PT AV G01 MV S05-A MV S06-B MV S06-A MV S07 Global Loop Supply PT Drain DI MV S05-B AV G02 MV D04 MV D03-B MV D03-A MV W07-A MV D02-A MV W07-B MV D02-B MV W06 MV D01 MV S08 MV W03 Drain Sample Drain NV Q01 Sample Port Wait… Start Animation Press Start Animation Next Page Jet Nozzle Sparger MV S04 SD200 Sequence of Ops

17. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation SD200 Sequence of Operations Overview, continued Day Tank Local Recirculation Mode The Day Tank local recirculation occurs prior to the filtration system and helps maintain local suspension of the slurry if the global loop is not in service. The level in the day tank is maintained by two level sensors that signal to start and stop the transfer pump to maintain an acceptable level for a given dispense consumption. CDA Global Loop Return PT MV S02 MV S01 MV S03 PT AV G01 MV S05-A MV S06-B MV S06-A MV S07 Global Loop Supply PT Drain DI MV S04 MV S05-B AV G02 MV D04 MV D03-B MV D03-A MV W07-A MV D02-A MV W07-B MV D02-B MV W06 MV D01 MV S08 MV W03 Drain Sample Drain NV Q01 Sample Port Wait…Start Animation Press Start Animation Next Page Jet Nozzle Sparger SD200 Sequence of Ops

18. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation SD200 Sequence of Operations Overview, continued Pump Operations SD200 Sequence of Ops CDA Global Loop Return PT Global Loop Supply PT Drain DI Drain Sample Drain Sample Port Jet Nozzle Sparger YS S01 YS S02 Pump operations are monitored for both the transfer and dispense pumps by the first pressure transducer immediately downstream of each pump. The raw slurry supply drum and day tank both have empty sensors to detect loss of slurry to the pumps; this triggers an alarm as well as a pump shut down. Wait…Start Animation Press Start Animation Next Page

19. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation MB1120 System Overview The Mega MB1120 Blend and Dispense System, Model 101 transfers and mixes chemical and DI water in a 15 liter blend tank, then transfers the blend to a 40 liter distribution tank. The blend is delivered to the point-of-use (POU) upon request.

20. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation MB1120 Sequence of Operations Overview MB1120 Sequence of Ops Chemical Transfer Mode CDA DI Water Supply LSHH C03 LSL C01 PI CDA Pressurized Drain Drain Sample Global Loop LSH C05 LSHH C06 LSL C04 DI Water Return MV W01 AV W02 AV C01A AV C01B NV Q01 AV G01 AV G02 NV Q02 MV D03 AV C05 MV C04 MV C03 MV D02 MV D01 AV C02 15 Liter Tank 40 Liter Tank NV W03 Chemical is drawn from one of two chemical bottles using a pneumatic dual diaphragm pump. Raw chemical can be sampled during transfer to the blend tank for quality check and analysis using the Sample needle valve. Wait…Start Animation Press Start Animation Next Page LSH C02

21. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation MB1120 Sequence of Operations Overview, continued MB1120 Sequence of Ops Blend Mode CDA DI Water Supply LSH C02 LSHH C03 LSL C01 PI CDA Pressurized Drain Drain Sample Global Loop LSH C05 LSHH C06 LSL C04 DI Water Return AV C01A AV C01B NV Q01 AV G01 AV G02 NV Q02 MV D03 AV C05 MV C04 MV C03 MV D02 MV D01 AV C02 40 Liter Tank NV W03 DI water and chemical are automatically, and sequentially, added to the blend tank to the required dilution ratio. Liquid addition volumes are set by manually adjusting the external level sensors on the blend tank. Wait…Start Animation Press Start Animation Next Page The contents of the blend is transferred to the distribution tank when the level sensor indicates a low level. The system continues to blend and transfer batches until the high level sensor on the distribution tank is reached. MV W01 15 Liter Tank AV W02

22. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation MB1120 Sequence of Operations Overview, continued MB1120 Sequence of Ops Dispense Mode CDA DI Water Supply LSH C02 LSHH C03 LSL C01 PI CDA Pressurized Drain Drain Sample Global Loop LSH C05 LSHH C06 LSL C04 DI Water Return AV C01A AV C01B NV Q01 AV G01 AV G02 NV Q02 MV D03 AV C05 MV C04 MV C03 MV D02 MV D01 AV C02 40 Liter Tank NV W03 Once blended material has filled the distribution tank, the distribution pump is automatically initiated. The blend is taken from the distribution tank and pumped to the Global Loop upon request via an auto-distribution supply valve. Wait…Start Animation Press Start Animation Next Page The blended chemical can be manually sampled during recirculation and dispense for quality check and analysis. MV W01 15 Liter Tank AV W02

23. Confidential SD200 Sequence of Ops SD200 System Overview MB1120 System Overview MB1120 Sequence of Ops Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation MB1120 Sequence of Operations Overview, continued MB1120 Sequence of Ops Pump Operations Both blend and distribution pumps use a combination of auto and manual operations. Each pump starts/stops automatically based on level sensors in the blend and distribution tanks. The transfer, recirculation and dispense rates of the blend and distribution circuits are adjusted via the manual regulators on the pump air supply lines.

24. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 3A: SD200 Operation

25. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation HMI Overview The HMI on the SD200 M104L is a simple to use touch screen. Buttons on the bottom of the screen are used to access other screens in the system. Buttons within the screen operate various functions relating to that screen.

26. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation System Startup The system is initially set up and powered on by an operator or engineer with an administrative password. Refer to Restarting after EMO if restarting the system. 1.Toggle the AC Disconnect switch to the ON position. 2.Ensure the EMO is disengaged (pulled out). 3.Press the green Start button on the front of the Controls cabinet. When the startup is complete, the Main Menu is displayed.

27. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation System Setup When setting up the system, choose the global loop filter bank, and the system setpoints before the initial operation of the system. Once set, the setpoints do not need to be changed unless necessary. NOTICE Obtain permission before changing setpoints! Setpoint values should not be altered without proper permission. Erroneous values may have detrimental effects on the system. 1.From the Main Menu, press the Overview button to access the Overview screen. 2.Select which global loop filter bank to make active; Filter 02 or Filter 03. 3.Following the prompts, open and close the following manual valves: StateFilter 02Filter 03 OpenMV S05-A MV S06-A MV S05-B MV S06-B CloseMV S05-B MV S06-B MV S05-A MV S06-A

28. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation System Setup, continued System Setup 3.Press the Confirm button to confirm the valves have been opened and closed accordingly. The Setpoints screen displays. 4.Enter all setpoint values and then press the Done button. The Start button will not display until all values are entered.

29. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Restarting after an EMO Restarting after EMO If the system shuts down while running an operation, it does not continue where it left off after the restart. An Abort decision is required before continuing to Local or Global recirculation to ensure a high-quality batch in the tank. 1.If the system is shut down due to an EMO condition, pull the EMO button out before the next step. 2.Toggle the AC Disconnect switch to the ON position. 3.Ensure the EMO is disengaged (pulled out). 4.Press the green Start button on the front of the Controls cabinet.

30. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Transferring Slurry from Drum to Day Tank Transferring to Day Tank The first operating mode is the transfer mode from the raw material shipping container; either IBC totes or drums. The raw slurry is withdrawn from a drum using a pneumatic dual diaphragm pump. The material is then pumped through a 10" filter and into the day tank. 1.Press the Overview button on the Main Menu to access the Overview screen. 2.Following the prompts, open MV S01 MV S02 MV S03

31. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Transferring Slurry from Drum to Day Tank, continued Transferring to Day Tank 3.Press the Confirm button to confirm the valves have been opened. If the day tank high level sensor (LSH S02) indicates the tank is full, a signal is sent to the tool indicating slurry is available, automatic valve AV G01 closes, the pump turns off, and the drum transfer sequence is complete. Drum transfer continues until the high level sensor (LSH S02) indicates the day tank is full, at which point the CDA automatic valve AV G01 closes, and the drum transfer sequence is complete. LSL S02 LSH S02

32. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Drum Replacement When a supply drum is emptied, the unit will activate a drum empty warning. Ensure the slurry supply drum is immediately replaced to avoid shutting down the system due to a lack of slurry. NOTICE Follow Site Specific Procedures! Follow all site specific procedures regarding drum replacement, including drum handling and disposal regulations. 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Acknowledge the drum empty alarm. 3.Verify the drum is empty. If the drum is not empty, check the Drum Empty sensor for accuracy. 4.Verify the supply drum is off line. 5.Remove the quick connect fitting from the empty drum. 6.Replace the empty drum with a full drum. 7.Attach a quick-connect fitting to the dip tube on the new drum. 8.Reset the drum empty alarm.

33. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Recirculation Mode The day tank can be set into local recirculation mode. This recirculation occurs prior to the filtration system and helps maintain local suspension of the slurry if the global loop is not in service. 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Press the Overview button on the Main Menu to access the Overview screen. 3.Following the prompts, open and close the following manual valves: StateManual Valve OpenMV S04 MV S08 CloseMV S05-A MV S05-B 4.Press the Confirm button to confirm the valves have been opened and closed accordingly. The CDA automatic valve AV G02 opens, pump S02 initiates, and slurry is circulated through the local loop until a slurry demand is received from the customer tool.

34. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Recirculation Mode, continued Recirculation Mode CDA Global Loop Return PT MV S05-A Global Loop Supply PT Drain DI MV S04 MV S05-B AV G02 MV S08 Drain Jet Nozzle

35. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Recirculation Mode, continued Recirculation Mode StateManual Valve CloseMV S08 5.When a slurry demand is received from the customer tool, the system prompts to close the following manual valve: 6.Press the Confirm button to confirm the valve has been closed accordingly. CDA Global Loop Return PT MV S05-A MV S06-B MV S06-A MV S07 Global Loop Supply PT Drain DI MV S05-B AV G02 MV S08 Drain NV Q01 Jet Nozzl e Sparger MV S04

36. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Dispensing from Day Tank In dispense mode, slurry is taken from the day tank and pumped to the global loop (GL). This dispense goes through a 20" filter to provide for removal of particles to an acceptable level for consumption. 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Press the Overview button on the Main Menu to access the Overview screen. 3.Following the prompts, open and close the following manual valves: StateWhen dispensing through Filter Bank 02 When dispensing through Filter Bank 03 OpenMV S04 MV S05-A MV S06-A MV S07 MV S04 MV S05-B MV S06-B MV S07 CloseMV S05-B MV S06-B MV S05-A MV S06-A 4.Press the Confirm button to confirm the valves have been opened and closed accordingly. The CDA automatic valve AV G02 opens, pump S02 initiates, and slurry is dispensed through the global loop.

37. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Dispensing from Day Tank, continued Dispensing from Day Tank

38. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Dispensing from Day Tank, continued Dispensing from Day Tank

39. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Dispensing from Day Tank, continued Dispensing from Day Tank 5.If pressure transducers PT S03 and PT S04 on either side of Filter 02 exceed the pressure differential setpoint, an alarm will occur and the user will be prompted to switch filter banks. Switch filter banks following the steps in Switching Filter Banks. Otherwise, slurry dispenses to the customer tool through the global loop as requested. 6.When the slurry demand stops, automatic valve AV G02 closes, pump S02 stops, and the system prompts to close the following manual valves: StateWhen dispensing through Filter Bank 02 When dispensing through Filter Bank 03 CloseMV S04 MV S05-A MV S06-A MV S07 MV S04 MV S05-B MV S06-B MV S07 7.Press the Confirm button to confirm the valve has been closed accordingly.

40. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Switching Filter Banks Because the pressure drop across the active filter is monitored, it may become necessary to switch filter banks during the dispense operation. If the differential pressure exceeds the setpoint, an alarm is triggered at which time it is necessary to switch filter banks and change the filter. 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Press the Overview button on the Main Menu to access the Overview screen. 3.Following the prompts, open and close the following manual valves: StateWhen switching from Filter 02 to Filter 03 OpenMV S05-B MV S06-B MV S05-A MV S06-A CloseMV S05-A MV S06-A MV S05-B MV S06-B

41. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Switching Filter Banks, continued Switching Filter Banks When Switching from Filter 02 to Filter 03 4.Press the Confirm button to confirm the valves have been opened and closed accordingly. 5.Following the prompt, allow the system to circulate long enough to thoroughly remove air from the line (visual observation).

42. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Switching Filter Banks, continued Switching Filter Banks When Switching from Filter 03 to Filter 02 6.Press the Confirm button to confirm air has been thoroughly removed from the line. Upon confirmation, the filter banks have been switched and dispense continues. 7.Change the filter.

43. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Filter Circuit Flush/Purge A filter circuit flush and purge may be necessary if the differential pressure exceeds the slurry filter differential setpoint. Filter Flushing 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Press the Overview button on the Main Menu to access the Overview screen. The AV G01 valve closes and the pump stops. 3.Following the prompts, open and close the following manual valves to drain the filter canister and filter cartridge: StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 CloseMV S01 MV S02 MV S03 MV S05-A MV S06-A MV S05-B MV S06-B then… OpenMV D04 MV D01 MV D03-A MV D02-A MV D03-B MV D02-B 4.Press the Confirm button to confirm the valves have been opened and closed accordingly.

44. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Filter Circuit Flush/Purge, continued Filter Circuit Flush/Purge The filter canister and filter cartridge drain. 5.Press the Confirm button to confirm the filter canister and filter cartridge have drained adequately. 6.Following the prompts, open the following manual valves to flush the filter with water: 7.Press the Confirm button to confirm the valves have been opened, and the filter canister and filter cartridge have been flushed adequately. 8.Following the prompts, close the following manual valves to flush the filter with water: 9.Press the Confirm button to confirm the valves have been closed accordingly. The flush is complete. StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 OpenMV W03 MV W06 MV W03 MV W07-A MV W03 MV W07-B StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 CloseMV D04 MV D01 MV D03-A MV D02-A MV D03-B MV D02-B

45. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Filter Circuit Flush/Purge, continued Filter Circuit Flush/Purge Filter Purging 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Press the Maintenance button on the Main Menu to access the Maintenance screen. The following CDA automatic valve(s) close and the pump(s) stop: StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 CloseAV G01AV G02 StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 Open---MV S05-AMV S05-B CloseMV S01 MV S03 --- MV S04 MV S05-B MV S06-A MV S04 MV S05-A MV S06-B 3.Following the prompts, open and close the following manual valves:

46. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Filter Circuit Flush/Purge, continued Filter Circuit Flush/Purge 4.Following the prompts, connect the following Nitrogen purge line manual valve to the upstream pump port, and then open the valve MV N02. 5.Following the prompts, open the following manual drain valves: 6.Press the Confirm button to confirm the valves have been opened and closed accordingly (Step 3), the Nitrogen purge line is connected (Step 4), and the manual drain valves have been opened (Step 5). StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 OpenAV G01AV G02 The following CDA automatic valve(s) open, the pump(s) start, and the purge timer begins: StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 OpenMV D04 MV D01 MV D02-A MV D03-A MV D02-B MV D03-B When the purge timer setpoint has been met, the following CDA automatic valve(s) close and the pump(s) stop: StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 CloseAV G01AV G02

47. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Filter Circuit Flush/Purge, continued Filter Circuit Flush/Purge StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 CloseMV D04 MV D01 MV D02-A MV D03-A MV D02-B MV D03-B 7.Following the prompts, close the following manual valves: 8.Following the prompts, disconnect the Nitrogen purge line MV N02. 9.Following the prompts, close the following manual valves: StateRaw Slurry Circuit Filter 01 Dispense Circuit Filter 02 Dispense Circuit Filter 03 CloseMV N02 MV S05-A MV N02 MV S05-B 10.Press the Confirm button to confirm the manual valves have been closed and the Nitrogen purge line has been disconnected. The purge is complete. If another flush and purge is required, repeat the flush and purge

48. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Sampling CAUTION Chemical Hazard! Sampling system chemistry exposes the operator to chemical hazards. Wear the following PPE when taking samples: Acid-resistant gloves Chemical safety goggles and full-face shield Protective clothing such as a lab coat, apron, or coveralls Use an approved container to hold the sample.

49. Confidential HMI Overview System Startup Restarting after EMO Filter Circuit Flush/Purge Sampling Transferring to Day Tank Recirculation Mode Dispensing from Day Tank Switching Filter Banks System Setup Drum Replacement Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Sampling, continued Sampling 1.Ensure the system is currently in dispense mode. If not, wait to take a sample until in dispense mode. 2.Open the sample cabinet door. 3.Place the sample container (open) into the sample cabinet. 4.Open the sample needle valve one (1) turn only for the sample and fill the sample bottle according to site procedures. 5.Carefully remove the sample and close the sample door. 6.Remove PPE and dispose according to site regulations and MSDS requirement. NOTICE Opening the needle valve too much may cause pressure transients on the system resulting in excess sample flow to knock over empty the sample bottles.

50. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation

51. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation System Startup The system is initially set up and powered on. A restart my apply after a power outage. Refer to Restarting after EMO if restarting the system after an EMO shutdown. 1.Toggle the AC Disconnect switch to the ON position. 2.Ensure the EMO is disengaged (pulled out). 3.Press the green Start button on the front of the Controls cabinet. The unit begins the startup procedure. The programmable logic controller (PLC) initializes and begins its first scan. The audible annunciator sounds for approximately 15 seconds.

52. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Restarting after an EMO If the system shuts down while running an operation, it does not continue where it left off after the restart. 1.If the system is shut down due to an EMO condition, pull the EMO button out before the next step. 2.Toggle the AC Disconnect switch to the ON position. 3.Ensure the EMO is disengaged (pulled out). 4.Press the green Start button on the front of the Controls cabinet. Restarting after EMO

53. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Transferring Chemical to Blend Tank Chemical to Blend Tank The first operating mode is the transfer mode from one of two raw chemical supply bottles to the blend tank. Chemical is withdrawn from the bottles using a pneumatic dual diaphragm pump, and then pumped into the blend tank. The chemical suction lines from each bottle are equipped with a presence sensor that triggers an automatic bottle switch should the active bottle run empty. YS C01A YS C01B

54. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Replacing the Supply Bottle Replacing Supply Bottle When a concentrated chemical supply bottle is emptied, the system automatically activates the second supply bottle. Immediately replace the empty supply bottle with a full bottle to ensure the system switches to a full bottle when the other bottle is empty. WARNING Chemical Hazard! Personnel familiar with chemical handling should change supply bottles. No valve tag out is required for bottle change out. Wear proper protective clothing and eye shields. Refer to site MSDS for chemical-specific information.. NOTICE Follow Site Specific Procedures! Follow all site specific procedures regarding chemical replacement, including bottle handling and disposal regulations.

55. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Replacing the Supply Bottle, continued Replacing Supply Bottle 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Acknowledge the Reagent Bottle Empty alarm. 3.Verify the bottle is empty. If the bottle is not empty, check the Reagent Bottle Empty sensor for accuracy. 4.Verify the reagent bottle is off line. 5.Remove the quick connect fitting from the empty bottle. 6.Replace the empty bottle with a full bottle. 7.Attach a quick-connect fitting to the dip tube on the new bottle. 8.Reset the Reagent Bottle Empty alarm.

56. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation The blend tank receives the raw chemical from the supply bottle and automatically mixes DI water with the chemical to achieve the required dilution ratio. When the mixture is correctly blended, the chemical is transferred to the distribution tank. The liquid addition volume level in the blend tank is maintained by level sensors mounted on the exterior of the tank that signal to start and stop the transfer pump to maintain an acceptable level for a given dispense consumption. Blending the Chemical in the Blend Tank Chemical Blending

57. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Open the main cabinet door. 3.Adjust the position of one or more of the following three level sensors on the Blend Tank to achieve the desired addition level of chemical and DI water in the blend tank. 4.Close the cabinet door. 5.Remove PPE and dispose according to site regulations and MSDS requirement. Level Sensor NameSensor Alignment LSHH C03Level - Blend Tank Hi/Hi LSH C02Level - Blend Tank Hi LSL C01Level - Blend Tank Low The liquid addition volume for the Blend Tank can be adjusted by altering the position of the three level sensors mounted on the outside of the tank. Adjusting Blend Tank Level Sensors Adjusting Blend Lvl Sensors

58. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Dispensing from Distribution Tank Dispensing The distribution tank automatically dispenses the blended chemical to the global loop. A pulse dampener regulates the chemical distribution so it is a smooth and consistent flow. The level in the distribution tank is maintained by level sensors mounted on the exterior of the tank that signal to start and stop the transfer pump to maintain an acceptable level for a given dispense consumption. The distribution tank uses local recirculation mode if the global loop is not in service. This recirculation helps maintain local suspension of the blended chemical. CDA DI Water Supply PI CDA Pressurized Drain Drain Sample Global Loop LSH C05 LSHH C06 LSL C04 DI Water Return AV C01A AV C01B NV Q01 AV G01 AV G02 NV Q02 MV D03 AV C05 MV C04 MV C03 MV D02 MV D01 AV C02 40 Liter Tank NV W03 15 Liter Tank AV W02 MV W01

59. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Adjusting Distribution Tank Level Sensors Adjusting Dist Level Sensors 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. 2.Open the main cabinet door. 3.Adjust the position of one or more of the following three level sensors on the Distribution Tank to achieve the desired addition level of chemical and DI water in the blend tank. 4.Close the cabinet door. 5.Remove PPE and dispose according to site regulations and MSDS requirement. Level Sensor NameSensor Alignment LSHH C06Level - Blend Tank Hi/Hi LSH C05Level - Blend Tank Hi LSL C04Level - Blend Tank Low The liquid addition volume for the Distribution Tank can be adjusted by altering the position of the three level sensors mounted on the outside of the tank.

60. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Setting Local Recirculation Flow Rate Setting Recirc Flow Rate Local recirculation maintains suspension of the blended chemical when the POU is not requesting chemical. The flow rate of the local recirculation loop is adjusted to keep the blended chemical in recirculation while also dispensing to the POU upon request. Open and adjust MV C04 enough to reflect the correct dispense pressure (as displayed on the Pressure Indicator (PI C04)). This allows the chemical blend to recirculate while dispensing to the POU upon request. CDA DI Water Supply PI CDA Pressurized Drain Drain Sample Global Loop LSH C05 LSHH C06 LSL C04 DI Water Return AV C01A AV C01B NV Q01 AV G01 AV G02 NV Q02 MV D03 AV C05 MV C04 MV C03 MV D02 MV D01 AV C02 40 Liter Tank NV W03 15 Liter Tank AV W02 MV W01

61. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Sampling CAUTION Chemical Hazard! Sampling system chemistry exposes the operator to chemical hazards. Wear the following PPE when taking samples: Acid-resistant gloves Chemical safety goggles and full-face shield Protective clothing such as a lab coat, apron, or coveralls Use an approved container to hold the sample.

62. Confidential System Startup Restarting after EMO Chemical to Blend Tank Replacing Supply Bottle Chemical Blending Dispensing Setting Recirc Flow Rate Adjusting Dist Level Sensors Sampling Adjusting Blend Level Sensors Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Sampling, continued Sampling 1.Open the sample cabinet door. 2.Place the sample container (open) into the sample cabinet. 3.Open the sample needle valve one (1) turn only for the sample and fill the sample bottle according to site procedures. 5.Carefully remove the sample and close the sample door. 6.Remove PPE and dispose according to site regulations and MSDS requirement. NOTICE Opening the needle valve too much may cause pressure transients on the system resulting in excess sample flow to knock over empty the sample bottles. LocationSample Needle Valve ChemicalNV Q01 Blended chemical (distribution tank)NV Q02

63. Confidential Alarm Types Responding to Alarms Light Dome Description Possible Causes/Resolutions Module 5: Maintenance Module 1: Safety Module 2: System Overview Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 4: Alarms

64. Confidential Alarm Types Responding to Alarms Light Dome Description Possible Causes/Resolutions Module 5: Maintenance Module 1: Safety Module 2: System Overview Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 4: Alarms Alarm Types Alarms are activated when a system interlock is tripped. CRITICAL alarms are activated by urgent situations that require immediate attention and threaten the performance of the system (SD200 only). A critical alarm sounds the audible annunciator and shuts down the system (SD200 only). A chemical system shutdown (CSS) critical alarm stops the distribution pumping (SD200 only). WARNING are activated by those situations that do not need immediate attention, but could escalate into a more serious problem if ignored. PROCESS alarms are activated by situations that require immediate attention, but do not threaten the performance of the system. An audible annunciator is sounded and the sequence of actions are paused (SD200 only). Process Alarms shut down the affected station (SD200 only).

65. Confidential Alarm Types Responding to Alarms Light Dome Description Possible Causes/Resolutions Module 5: Maintenance Module 1: Safety Module 2: System Overview Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 4: Alarms Responding to Alarms The alarms have three states: active, acknowledged, and reset. An active alarm indicates the interlock is currently tripped but has not been acknowledged. The alarm status is viewed from the light tower located on the front of the system. The audible annunciator sounds when active alarms exist. When an operator presses the Acknowledge key, the audible annunciator turns off and the alarm is lowered to the acknowledged state. When the operator presses the Reset key, the alarm is reset. If the condition which caused the interlock has not been corrected, the alarm is reactivated.

66. Confidential Alarm Types Responding to Alarms Light Dome Description Possible Causes/Resolutions Module 5: Maintenance Module 1: Safety Module 2: System Overview Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 4: Alarms Light Dome Description SD200 Light Dome Any VMB leak alarm is a Process Alarm for all three systems, displaying as a fast flashing red light, and stopping dispense on all systems. System 2 will have an additional steady yellow, blue, or green light (depending upon the VMB) indicating a VMB leak. ColorStateIndication RedSlow flashing Indicates a warning alarm; flashes 1 second on, 1 second off. Fast flashing Indicates a process alarm; flashes ½ second on, ½ second off. SteadyIndicates a critical alarm. VMB Alarm Indicators GreenSteadyVMB 1 leak alarm (system 2 only). FlashingVMB 1 door alarm (system 2 only). YellowSteadyVMB 2 leak alarm (system 2 only). FlashingVMB 2 door alarm (system 2 only). BlueSteadyVMB 3 leak alarm (system 2 only). FlashingVMB 4 door alarm (system 2 only). The light tower used on the Mega SD200 contains 4 indicator lights; red, yellow, blue, green.

67. Confidential Alarm Types Responding to Alarms Light Dome Description Possible Causes/Resolutions Module 5: Maintenance Module 1: Safety Module 2: System Overview Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 4: Alarms Light Dome Description, continued Light Dome Description MB1120 Light Dome ColorStateIndication RedAlternating yellow, then yellow/red Indicates a warning alarm if the warning alarm is active. Alternating red/greenIndicates a pressure switch warning alarm. Fast flashingIndicates a process alarm. GreenSteadyIndicates the system is ready for dispensing. YellowAlternating yellow/redIndicates a warning alarm when alternating with the red LED if the warning alarm is active. The light dome contains red, green, and yellow indicator lights that illuminate in various combinations to announce the occurrence of specific events. The light dome provides additional visual status indicators for system alarms and their associated LEDs.

68. Confidential Alarm Types Responding to Alarms Light Dome Description Possible Causes/Resolutions Module 5: Maintenance Module 1: Safety Module 2: System Overview Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 4: Alarms Possible Causes & Resolutions Possible Causes/Solutions Refer to the Alarms & Warnings chapter in the following manuals for possible causes and resolutions to alarm conditions. Mega SD200 Slurry Distribution System, Model 104L Mega MB1120 Blend and Distribution System, Model 101

69. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Module 5: Maintenance

70. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Component Description Swagelok Relief Valve Manual Valve Automatic Valve Valves Check Valve Manual Valves

71. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Component Description, continued Pressure Transducer Measuring line pressure allows for obtaining valuable and critical diagnostic information, which is used for monitoring or controlling process conditions such as DI water and chemical dispense. Pressure Transducer Component Description

72. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Component Description, continued Regulators Reducing Regulators Flow regulators consist of a solid float inside a tapered vertical tube that widens at the top. Fluid enters at the base of the tube, causing the float to rise. The upward or downward movement of the float corresponds to the rate of fluid flow in the tube. A rotameter consists of a tapered tube with a float inside that is pushed up by flow and pulled down by gravity. At a higher flow rate the float rises. The float is shaped so it rotates axially as the fluid passes. Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. The diaphragm moves to compensate for any changes in incoming N 2 pressure. Flow Regulator Rotameter Component Description

73. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Component Description, continued Pressure Switches Pressure switches notify the PLC when conditions meet or do not meet specifications and are associated with alarm conditions. The digital pressure switch is generally used for communicating the system pressure (psi) and two pressure switch outputs. Setpoints are adjustable from the front panel keys. Component Description Level Sensors Liquid Level Sensor Able to read and monitor the liquids levels through clear tubing (transparent). Able to read and monitor the liquids levels through the walls of the tank (not transparent). Omron Level Sensor

74. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Component Description, continued Component Description Tanks are used to blend and distribute slurry to the Local /Global Loops. Different sized tanks are used to blend and distribute slurry, chemicals, or UPW (Ultra Pure Water). Tanks SD200 Model 104L MB1120 Model 101

75. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Component Description, continued Component Description Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. SD200 Model 104L

76. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Setting Timers & Setpoints Setting Timers/Setpoints SD200 Setpoints Process setpoints are set from the Setpoints screen. The Setpoints screen is accessed when selecting a new filter bank from the Overview screen. Process setpoints should only be changed with permission. 1.Press a Filter button on the Overview screen. The Setpoints screen displays. 4.Change the setpoint values accordingly, then press Done.

77. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Preventive Maintenance Before performing system preventive maintenance: Why is Preventive Maintenance Important? What Should I Consider Before? Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. Preventive maintenance also helps prevent unexpected downtime and disruption of the blend and distribution system. Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system. Review all appropriate maintenance procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand.

78. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Verifying Device Settings Obtain the latest device settings list for the system. 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. 3.Record all deviations from the previously recorded settings on the Device Settings Record Sheet. 4.Consult with the Process Engineer to verify that deviations require correction. 5.Correct deviations, as required.

79. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Humidifier Settings A humidifier is essential to prevent slurry from drying on the sides of the tanks. Malfunction can occur for several reasons: The air pressure is too high or too low to create the mist. The mist pad is clogged and the pad does not work correctly. The drain is clogged. The water pressure is too high or low to create the proper mist. The water pressure is too high and the water sheets down the walls creating no mist (the mixture goes down the drain).

80. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Humidifier Settings, continued 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Visually verify the humidifier is operating correctly. The water droplets should accumulate on the humidifier walls. There should be a minimal flow of water through the humidifier drain. 3.If the humidifier requires adjustments adjust the humidifier CDA/ N 2 and DI water pressure. CDA/ N 2 pressure should always be greater than water pressure. 4.To measure the DI water flow rate, shut off the CDA/ N 2 supply and measure the volume of water draining from the humidifier drain line. The flow rate should be approximately 15 ml/min. Humidifier Settings

81. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Changing Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. Mykrolis’ Chemlock filter cartridges are locked into the bowl with a 1/4-turn. For filter cartridge removal, do not grab the filter cartridge body, simply unscrew the locking ring and the filter cartridge will disengage from the housing head. WARNING Chemical Hazard! The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. Refer to the site MSDS for chemical- specific information.

82. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Changing Filters, continued 1.Wear the proper PPE. Refer to the MSDSs and site regulations. 3.Unscrew the locking ring and the filter cartridge will disengage from the housing head. 5.Insert the filter cartridge into the bowl. 6.Twist the filter cartridge 1/4-turn to lock. 7.Attach the bowl to the head. 8.Tighten the locking ring to seat the double O-rings. Use a housing wrench to ensure proper tightening. 2.Ensure the filter bank has been taken off line and the manual drain valve has been opened to release all cartridge and bowl contents. Note:Filters are mounted with the bowl up on slurry systems and with the bowl down on chemical systems. 4.Remove the filter cartridge and discard according to MSDS and site regulations. Insert Twist Attach Tighten Changing Filters

83. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Checking Pump Operation 1.If the doors must be opened, wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Ensure the pump is operating. 3.Record the pump operating pressure on the Preventive Maintenance List. 4.Force a pump switchover for redundant pumps by closing the manual valve downstream of the pressure switch. Ensure that pump 1 faults and pump 2 begins operation. 5.Reset the pump fault alarm. BPS-4 Pump ARO Diaphragm Pump 6.Ensure the pump is correctly set online or offline. Typically, all pumps are online. Schedule maintenance for pumps that are not ready for operation. 7.Record the pump runtime from the Timers Setpoint screen. If the pump value exceeds the maintenance setpoint, verify the date of the last maintenance completed. If the last maintenance was recent, ensure that the runtime was reset. If the run timer was not reset, consult a supervisor and reset the run timer upon approval

84. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Checking Leak Detectors 1.The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit. 2.Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off. If the sensor does not change, test the wiring with another leak detector. If the replacement sensor functions, the first sensor was faulty. If the replacement sensor does not function, check leak detector wiring. Replace the leak detector or repair the wiring, if required. WARNING Chemical Hazard! Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.

85. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Checking and Replacing Fittings Checking Fittings Inspecting the fittings requires opening the cabinet doors. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings. Flared and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Checking Fittings WARNING Electrical Hazard – Type 3! Risk of exposure to hazardous electrical current. Use extreme caution during preventive maintenance procedures to avoid accidental contact with energized parts. CAUTION Pressure Hazard! Relieve pressure in lines before loosening and replacing fittings.

86. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Checking and Replacing Fittings, continued Checking Fittings, continued Ensure all fittings are tight. Loose plastic fittings should be hand-tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. If the fitting leaks after it is tightened, replace it. Avoid over-tightening fittings! Over-tightening fittings may strip the fitting threads. Place the system in Automatic operation and check for leaks. Checking Fittings

87. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Checking and Replacing Fittings, continued Replacing Fittings 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Place the system into Manual operating mode. 3.Flush and purge the pipes in the area of the repair. 4.Vent the line pressure by opening valves to the drain or exhaust. 5.Close the closest isolation valves in order to isolate the fitting. 6.Lockout/tagout the isolation valves. 7.Remove the leaking fitting and the necessary plumbing. 8.Replace the leaking fitting and install removed plumbing. 9.Remove the lockout/tagout devices. 10.Open the isolation valves. 11.In Manual mode, fill the repaired area with liquid (or gas) and check for leaks. If the fitting leaks, ensure the fitting is tight. If the fitting still leaks, return to Step 3. 12.Flush and purge the pipes in the area of the repair. Checking Fittings

88. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Humidifier Settings Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Module 1: Safety Module 2: System Overview Module 4: Alarms Module 5: Maintenance Module 3A: SD200 Operation Module 3B: MB1120 Operation Cabinet Cleaning Clean the cabinet after all other PM procedures are completed. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution. Thoroughly dry the cabinet interior. Wipe the cabinet exterior clean. Dispose of all wipes according to site requirements and MSDS recommendations.