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Published byHadley Saxe Modified over 9 years ago
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Small solenoids cause plasma scrape-off F.F. Chen, X. Jiang, and J.D. Evans, Plasma injection with helicon sources, J. Vac. Sci. Technol. A 8, 2108 (2000)
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Large coil allows all plasma to be injected F.F. Chen, X. Jiang, and J.D. Evans, Plasma injection with helicon sources, J. Vac. Sci. Technol. A 8, 2108 (2000)
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The low-field peak can be seen with a large coil F.F. Chen, X. Jiang, and J.D. Evans, Plasma injection with helicon sources, J. Vac. Sci. Technol. A 8, 2108 (2000) F.F. Chen and G. Chevalier, Experiments on helicon plasma sources, J. Vac. Sci. Technol. A 10, 1389 (1992) Original low-field peak we were trying to reproduce Result with single tube + large coil
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A multitube source with small solenoids gave low n F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001)
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Large coil + stubby sources work very well! F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001)
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Details of 7-tube distributed helicon source F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001) m = 0 antenna
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Azimuthal uniformity at various radii F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001)
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+/- 3% over 40 cm diameter F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001)
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> 10 12 cm -3 at 20 G, 5 mTorr, 13.56 MHz F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001)
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Even smoother at 27 cm downstream F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001)
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