Download presentation
Presentation is loading. Please wait.
Published byWesley Profit Modified over 9 years ago
1
Revolution in physical vapor deposition BY MEAN OF PLASMA ARC ACCELERATOR www.greseminnovation.com
2
Technology Highlights Coating of heat labile materials Effective operation in the residual gas atmosphere and reactive gases (nitrogen, oxygen) environment Coatings with specified properties Several different materials can be deposited simultaneously or in controlled sequence Synthesis of the non-transferable material on the surface Multilayer films can be grown Roll-to-Roll modification of linear model Different types of consumables Operation without micro-drop fraction Substrate control and transfer of composition Transfer of electrophysical properties Substrate zone plasma beam focusing Permanent “activation” of the substrate by helicon source www.greseminnovation.com
3
Technology Highlights Known vacuum coating technology, such as thermal, electron-beam, vacuum-arc evaporators and magnetron sputtering systems, cause fractionation of consumable materials and ensure the preservation of its composition in the deposited film. In case this is due to the evaporators Time of Flight effects for components with different masses, and for the magnetron systems - due to the effect of selective spraying at which light components from the target sprayed with greater speed. Technology from GreSem is performed using a specially designed magnetically activated vacuum-arc source as the generator of the accelerated plasma flow of multi-component coating film and helicon plasma source for surface preparation and its activation during the coating process. www.greseminnovation.com TRL rate stage 8 of 9
4
Specification Deposition rate of metal coatingsto 5 µm / min Deposition rate of dielectric coatingsto 3 µm / min Electricity consumption while depositing 1 µm per 1 dm²0.068 kWh Working pressure for stainless steel depositionFore-vacuum - 3×10+3 to 1×10−1 Pa Ion flow density of the coating material30 mA/cm 2 Energy ion flow30... 120 eV Coating thickness0.001... 200 µm www.greseminnovation.com
5
Plasma source Ion flow density of the coating material is 30 mA/cm 2 www.greseminnovation.com
6
Properties of the coatings Adhesion allows punching, bending and polishing without flaking of the coating; Coating stainless steel with a thickness of 2 microns to reproduce the purity of the surface treatment article, at a thickness of greater than 5 microns roughness of 0.5... 0.7 µ; If using two sources consumable cathodes of 70 mm diameter, inhomogeneity of the coating thickness is plus or minus 2.5% at the site of an 800 mm wide; Specific conductivity and density of the coating film thickness of 1... 2 microns tabulated values correspond to the volume of fused material www.greseminnovation.com
7
Helicon source Helicon source affects on stainless steel substrate with 30... 120 eV ion flow energy Evaporation of Cr is visible (blue) www.greseminnovation.com
8
Comparison Our PVD technologyMarket leader PVD technology Deposition rate 300 µm per hr0.5 – 3 µm per hr Deposition temperature (adhesion is equal) 20 … 90 °C250… °C Cathode Regular alloy cathodeSpecial alloy cathode Cathode usage % Up to 60 on substrate…35 recyclable.5…40 Electricity consumption while depositing 1 µm per 1 dm² 0.068 kWh15…21 kWh Working pressure for stainless steel deposition Fore-vacuum - 3×10+3 to 1×10−1 PaHigh vacuum - 1×10−1 to 1×10−7 Pa x100 faster x10 cheaper x2..20 effective x250 cheaper and ecoFriendly x2..10 easier
9
Deposit Materials www.greseminnovation.com Any steel alloy and contactors Elements – Ag, Au, Al, C, Cr, Co, Cu, Fe, Hf, In, Mg, Mo, Mn, Nb, Ni, Pd, Ru, Si, Sn, Ta, Ti, V, W, Y, Zn, Zr. Nitrides – most nitrides of the elements listed Oxides – most oxides of the elements listed Carbides – most carbides of the elements listed Precious metals – gold, platinum, silver, palladium, ruthenium and iridium. Compounds and alloys – AlSi, AlSn, AZO, B4C, brass, CrB2, CoCrMo, CuO, Hastelloy, Inconel, ITO, Monel, MoS2, MoST, MoSi2, NiCr, NiCrAlY, NiTi, Permalloy, Stainless Steel, TiAlV, TiB2, WS2, ZnS, ZrB2. Multilayers Synthesis of the non-transferable material on the surface
10
Substrate Materials www.greseminnovation.com Plastic Steel Ceramics Any alloys incl. heat labile Graded compositions Co-deposited coatings Some optical coatings Ceramics
11
Contacts 10G Starokyivska str. Office 501 04116 Kyiv, Ukraine www.greseminnovation.com tel/fax +380442216725 office@greseminnovation.com
Similar presentations
© 2024 SlidePlayer.com. Inc.
All rights reserved.