1. Who are we? Charged Particle Optics Group

2. What we want 1. pattern dimensions: nm-scale single atom! 2. any material

3. Electron beam induced deposition

4. Muller, 1971 Urban 1997 Koops What do people do with EBID? Intel, 2005

5. Our approach (nm-sized patterns & any material) simulation EBID experiments surface science Rutgers Univ. Howard Fairbrother, Johns Hopkins Univ.

6. Our approach (nm-sized patterns & any material) modelling EBID experiments surface science Rutgers Univ. Howard Fairbrother, Johns Hopkins Univ. our simulation: <1 nm! literature: >15 nm EBID resolution transmission electron microscope

7. W(CO) 6 dr. Peter Crozier, Arizona State University

8. Results of 9 Smallest dots: 0.7 nm in diameter

10. Poisson distributions Deposit mass distributions Volume per λ: 0.4 nm 3 Volume of W(CO) 6 molecule: 0.22 nm 3

11. Our approach (nm-sized patterns & any material) modelling EBID experiments surface science Rutgers Univ. Howard Fairbrother, Johns Hopkins Univ. our simulation: <1 nm! literature: 15 nm EBID resolution transmission electron microscope TPD experiments XPS, RAIRS, MS Better understanding: dissociation mechanism

12. methylcyclopentadienyl – platinum - trimethyl

13. Step 1. Cool Au sample to ~120 K and expose to precursor gas. gas nozzle Step 2. Heat in front of QMS while the QMS monitors m/z = 289

14. Step 1. Cool Au sample to ~120 K and expose to precursor gas. gas nozzle Step 2. Heat in front of QMS while the QMS monitors m/z = 289

15. Step 1. Cool Au sample to ~120 K and expose to precursor gas. gas nozzle Step 3. Heat in front of QMS while the QMS monitors m/z = 289 Step 2. Irradiate with electrons (broad beam) e-gun

16. Dissociative electron attachment Dipolar dissociation Direct ionization

17. Thanks!