1. M olecular L ayer D eposition ”ORGANIC ALD”

2. Overview  MLD: Technology and principle  Opportunities and challenges  Applications  Summary 2

3. MLD: Technology and principle (1/2)  In short: ALD, but with molecules  (Generally) self-limiting reactions  Solution-based and gaseous phase techniques  Hybrid technology with ALD to create ALD-MLD films 3

4. MLD: Technology and principle (2/2)  Basic cycle:  Fill chamber with inert gas to purge atmosphere of foreign particles  Replace with desired gaseous reactant  Substrate surface will react with gaseous reactant until all of surface is covered  One layer of desired material is deposited  Repeat from the top, changing reactants for different materials 4 [1] p.534

5. Opportunities and challenges  Organic component increases flexibility, decreases density and can reduce cost  Structural benefits from hollow/cavernous structures for catalysts (after removing organic constituent)  Wide range of possibilities (metal + organic molecule)  Issues with even growth per cycle, due to molecule geometry 5 [1]: p.539

6. Applications  Widest research area so far: metalcones (metal+alcohol)  Al, Zn, Zr, Hf, Mg, Sn, In, Ti, V, Mn are all viable metals for metalcones  Organic component: Ethylene glycol, Glycerol, Hydroquinone  Zincones can be used for flexible transparent conductive displays  Titanicone structures can be utilized in solar cells  Porous films can act as catalysts or sensors (Sn, In, V, Mn)  MLD also used to coat fine particles (passive or active) 6

7. Summary  MLD: In essence ALD, but with organic molecules  Self-limiting surface reactions  Stackable with ALD for organic-inorganic composite films  Main benefits in flexible and lightweight structures  Tuneable thin-film structural composition 7

8. Thank You! 8 [2] [4]

9. Sources  [1]: Lee, B.H., Yoon, B., Abdulagatov, A.I., Hall, R.A., George, S.M. Growth and properties of hybrid organic- inorganic metalcone films using molecular layer deposition techniques. (2013) Advanced Functional Materials, 23 (5), pp. 532-546. http://www.scopus.com/inward/record.url?eid=2-s2.0- 84873356095&partnerID=40&md5=dc679dabf8c7895d0e39926b603cd207http://www.scopus.com/inward/record.url?eid=2-s2.0- 84873356095&partnerID=40&md5=dc679dabf8c7895d0e39926b603cd207  [2]: http://www.hanyang.ac.kr/code_html/H3HNCK886/introEng/research/img/2.jpghttp://www.hanyang.ac.kr/code_html/H3HNCK886/introEng/research/img/2.jpg  [3]: King, D.M, Liang, X., Weimer, A.W. Functionalization of fine particles using atomic and molecular layer deposition. (2011) Powder Technology, 221 (2012), pp.13-25.  [4]: http://3.bp.blogspot.com/_tCh0LGvTCqE/THyN-E7cAOI/AAAAAAAAALY/kyT9eUPSSZg/s1600/MLD.JPG 9