1. Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films Richard Sandberg Shannon Lunt, Elke Jackson, Kristi Adamson, Ross Robinson, Guillermo Acosta, Nick Webb, Mike Dheil, Luke Bissell

2. Purpose: Will the Opticlean polymer remove hydrocarbon? Does this cleaning process damage our thin films? Outline 1. Sample Creation &Contamination rate 2. Effects of hydrocarbon “goo” buildup 3. Opticlean Process 4. Opticlean Residue 5. Damage to thin films 6. Removing Opticlean Residue 7. Conclusions

3. Sample Creation & Contamination Rate  Creation in vaccum chamber RF Sputtering Evaporation  Rates Goo Thickness (Ǻ) Action Performed Elapsed Time (Hrs) 21Open Air425 143Touch fingersInstantaneous 10Dipped in WaterInstantaneous

4. Reflectivity Effects With Goo Thickness

5. Opticlean Process Opticlean Residue Opticlean significantly removes goo, but leaves a residue Ellipsometric Results Goo thickness on two runs: 1.17 Anstroms 2. 22 Anstroms

6. Thin Film Damage  Scanning Electron Microscope with EDAX showed no thin film damage  X-Ray Photoelectric Spectroscopy found no metal traces

7. Scanning Electron Microscope with EDAX

8. X-Ray Photoelectric Spectroscopy

9. Conclusions Subsequent removal of Opticlean residue with plasma etch Conclusion: Opiclean a very effective way to remove hydrocarbon buildup 1.Sufficiently removes goo 2.Does not damage the surface of thin film samples