1. Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.1

2. F 1 D' specimen dimension (log D) strength or yield criterion a b nominal strength  N LEBM D Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.2

3. a b c d Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.3

4. 17.6 2 0.1 IN TRON MODEL 1362 load cell adapter micro-tensile testing device internal load cell specimen 0.1 2 1.172 Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.4

5. 0 0.2 0.4 0.6 0.8 1.0 60 50 40 30 20 10 0 standard specimen l = 50 mm 0 25 °C 100 °C 175 °C 225 °C 25 °C 100 °C 175 °C microspecimen l = 10 mm 0  (%)  (MPa) Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.5

6.  q  l specimen correlated video image data aquisition -0.20 -0.15 -0.10 -0.05 0.00 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50  (%) a b Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.6

7. 0 0.1 0.2 0.3 0.4 0.50 0.45 0.40 0.35 0.30 0.25 0.20 0.15 0.10 EP + filler (SiO ) = 0.27 PP + chalk = 0.20 PVC + filler = 0.22 2 l  (%) Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.7

8. standard CT mini CT 0 20 40 60 80 100 120 100 80 60 40 20 0 v (µm) F (N) Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.8

9. PEI PC PSU PF ceramics PMMA epoxy resin ceramics 0 30 60 90 120 150 150 120 90 60 30 0 K (MPamm ) for mini CT Q 1/2 K (MPamm ) for standard CT Q 1/2 Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.9

10. a load PMMA PS glass interface crack 0 h (nm) A B D C E b F (mN) indenter Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.10

11. a b Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.11

12. a b Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.12

13. F loading module scan device optical device CT specimen a F Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.13

14. 200 160 120 0 10 20 30 µm 180 140 100 0 10 20 30 µm 0.36 10 crack 10 crack height profile 0.28 polishing trace a b nm line of height profile evaluation Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.14

15. 30 25 20 15 10 5 0 0 5 10 15 20 25 30 µm 0.1 30 5 10 15 20 25 30 µm crack flank left crack flank rigth a b µm displacement perpendicular to the crack µm 0.0 -0.1 25 20 15 10 5 Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.15

16. y r x  u (x) y u y l y r Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.16

17. a 4.5 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 0 1 2 3 4 x coordinate (µm) displacement u (µm) y 0 1 2 3 4 7 10 6 10 5 10 4 10 3 10 2 10 1 10....... -4 y = 2.1 10 x + 6.9 10. -4. x coordinate (µm) y coordinate (µm) b Chapter 12: Michel, B.: Testing of Microcomponents. In: Grellmann, W., Seidler, S. (Eds.): Polymer Testing. Carl Hanser Verlag, Munich (2013) 2. Edition Fig.: 12.17 ((u − u )/2) (µm ) u l y y 2 2