Presentation is loading. Please wait.

Presentation is loading. Please wait.

FAB VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS.

Published byMarybeth Norton Modified over 10 years ago

Similar presentations

Presentation on theme: "FAB VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS."— Presentation transcript:

1 FAB VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS

2 PROJECTS START UP OF SVG 1 IDLE TIME STUDY FILTER FLOW EXP (DOE) DI SUPPLY DIAGRAMS OTHER

3 START UP OF SVG1 EXPLORE TRACK MECHANISM IDENTIFY PARTICLE ISSUE EXPERIENCE POINTS TO IDLE TIME IDLE TIME EXP

4 SVG TRACK PARTICLES PR CRATERS RESIST RESIDUE ADD ON PARTICLES SCRATCHES OVAL/CIRCLES

5 IDLE TIME EXP RESULTS

6 CONCLUSIONS ABOUT IDLE TIME

7 TRACK PARTICLE ELIMINATION IS NOT JUST A FUNC OF IDLE TIME MINIMAL IDLE TIME IS DESIRED TRACK SHOULD PURGE AFTER 1 HOUR

8 SVG1 STARTUP BEGAN WITH NON CRIT LEVEL EXP ECN AND GREW TO FULL PROCESS CAPABILITY IN ONE ROOM INCREASED WORKCENTER CAPACITY BY 33 LOTS PER DAY ALL LITH PROCESSING STEPS ON THE FIRST FLOOR

9 RINSE EXPERIMENT BASED ON DEFECTS CONCLUDE RESIST DAMAGE EXPERIENCE ISOLATES RINSE MECHANISM EXPLORE FACTORS AFFECTING RINSE

10 POSSIBLE FACTORS: WAFER TEMP BOWL COVER O/F BAKE COVERS O/F DEV DISP. TIME DI DISP. TIME SPIN SPEEDS DEV DISP. POS. DI DISP. POS. BACKSIDE RINSE O/F DI DISP. PRESSURE TRACK IDLE TIME IMPACT POINT BUFFER WAFERS HISTORICAL DATA ELIMINATED SOME FACTORS OTHERS COULD NOT BE RIGOROUSLY MEASURED SOME COULD NOT BE CONTROLED

11 FACTOR CHOICES THEORY THAT RESIST DAMAGE IS PURELY MECHANICAL S1 : 6.2 S5: 5.9 S1: 2.1 S5: 1.6 13.7 20 40 60 80

12 FACTORS STUDIED DI DISP. TIME DI DISP. HEIGHT IMPACT POINT RINSE SPIN SPEED DI DISP. FLOW*

13 CONCLUSIONS ABOUT RINSE THESE ARE STATISTICALLY DISPUTABLE: IMPACT POINT IS SIGNIFICANT FACTOR FLOW IS ALSO A SIGNIFICANT FACTOR ALTHOUGH NOT STUDIED

14 DI SUPPLY DIAGRAMS POTENTIAL CONTAMINATION SOURCES DOCUMENTATION COMPARISON

15 SVG 1 DI SUPPLY COMPONENTS

16 SVG 1 & 2*

17 OTHER PROJECTS CHANGED DI DISP POS. ON SVG2 DATA COLLECTION FOR J ANDRUS PROCESS SUPPORT THROUGH SVG 5 “CRISIS” RESPONSIBILITY FOR DAILY QUAL

18 SUMMARY START UP OF SVG 1 IDLE TIME STUDY FILTER FLOW EXP (DOE) DI SUPPLY DIAGRAMS OTHER

19 ACKNOWLEDGEMENTS OPERATIONS STAFF IN LITH WORKCENTERS BRIAN HANDEL JOE SUMMA & ENGINEERS DAN FULLERTON & BRIAN HARDING ERIC PREY ANDREW WELSH

Download ppt "FAB VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS."

Similar presentations

© 2013 IBM Corporation Reducing Cost with R in IBM Storage Products Manufacturing Elaine Jones Integrated Supply Chain Engineering.

© 2013 IBM Corporation Reducing Cost with R in IBM Storage Products Manufacturing Elaine Jones Integrated Supply Chain Engineering.
Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 1 SSI Process Backup using the SVG Lilah Cook MCEE 550 Fall 2013 Factory.

Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 1 SSI Process Backup using the SVG Lilah Cook MCEE 550 Fall 2013 Factory.
1 OZONE AND OXYGEN GAS SYSTEM CLEANING AND VERIFICATION PRESENTED BY: DARYL L. ROLL, P.E.

1 OZONE AND OXYGEN GAS SYSTEM CLEANING AND VERIFICATION PRESENTED BY: DARYL L. ROLL, P.E.
Corrosion Products Sampler (CPS)

Corrosion Products Sampler (CPS)
Outline LP formulation of minimal cost flow problem

Outline LP formulation of minimal cost flow problem
1 Just-in-Time/Lean Production A repetitive production system in which the processing and movement of materials and goods occur just as they are needed!

1 Just-in-Time/Lean Production A repetitive production system in which the processing and movement of materials and goods occur just as they are needed!
Using Benchmarking to Identify Energy Efficiency Opportunity in Cleanrooms; The Labs 21 Approach William Tschudi and Peter Rumsey June 29, 2004

Using Benchmarking to Identify Energy Efficiency Opportunity in Cleanrooms; The Labs 21 Approach William Tschudi and Peter Rumsey June 29, 2004
Profitability and Risk Management 1 Theory of Constraints Let’s go back to the CVP model: What “constrains” your profit? If you can choose X to be arbitrarily.

Profitability and Risk Management 1 Theory of Constraints Let’s go back to the CVP model: What “constrains” your profit? If you can choose X to be arbitrarily.
Case Studies of Batch Processing Experiments Diane K. Michelson International Sematech Statistical Methods May 21, 2003 Quality and Productivity Research.

Case Studies of Batch Processing Experiments Diane K. Michelson International Sematech Statistical Methods May 21, 2003 Quality and Productivity Research.
Assumptions about Indoor Environments Mark Lawton P.Eng Patrick Roppel M.A.Sc.

Assumptions about Indoor Environments Mark Lawton P.Eng Patrick Roppel M.A.Sc.
ECM Sensors. Air Temperature Sensor Air Flow Meter.

ECM Sensors. Air Temperature Sensor Air Flow Meter.
Motors: a System Approach Kurt Heinzmann DEKA Research & Development Corp. January 2007.

Motors: a System Approach Kurt Heinzmann DEKA Research & Development Corp. January 2007.
Experimental Design Fr. Clinic II Dr. J. W. Everett.

Experimental Design Fr. Clinic II Dr. J. W. Everett.
9. Cleanroom Testing and Monitoring. Purposes for initial test: Fulfill the design –working correctly and achieving the contamination standards Bench-mark:

9. Cleanroom Testing and Monitoring. Purposes for initial test: Fulfill the design –working correctly and achieving the contamination standards Bench-mark:
JIT/Lean Production. ©2006 Pearson Prentice Hall — Introduction to Operations and Supply Chain Management — Bozarth & Handfield Chapter 15, Slide 2 Some.

JIT/Lean Production. ©2006 Pearson Prentice Hall — Introduction to Operations and Supply Chain Management — Bozarth & Handfield Chapter 15, Slide 2 Some.
Slide 1Rod Production presented by Jim Lamb (UCSB)April 9, 2004 Rod Production Rod Production, April 9 2004, presented by Jim Lamb (UCSB)

Slide 1Rod Production presented by Jim Lamb (UCSB)April 9, 2004 Rod Production Rod Production, April , presented by Jim Lamb (UCSB)
Experimental Control & Design Psych 231: Research Methods in Psychology.

Experimental Control & Design Psych 231: Research Methods in Psychology.
FLAIR ENGINEERING Ltd.. Learning Objectives  Understand how real life organizations develop and implement strategy  Show how staff can be motivated.

FLAIR ENGINEERING Ltd.. Learning Objectives  Understand how real life organizations develop and implement strategy  Show how staff can be motivated.
System for Engine Location of the WebTrain Adam Weintrop and Paul Wimmer Advisors Dr. Irwin and Dr. Schertz.

System for Engine Location of the WebTrain Adam Weintrop and Paul Wimmer Advisors Dr. Irwin and Dr. Schertz.
Wafer processing - I Clean room environment Semiconductor clean room: - controlled temperature (20ºC), air pressure, humidity (30%) - controlled airbone.

Wafer processing - I Clean room environment Semiconductor clean room: - controlled temperature (20ºC), air pressure, humidity (30%) - controlled airbone.

Similar presentations

Ads by Google