1. Hybridization studies at Fermilab Prototype detectors –Readout chip mated to sensor –Experiences with both single dies and 4” and 6” wafers using Indium –2 5-chip modules mated at AIT Dummies –Large scale studies using daisy-chained patterns –Process characterization, yield determination, working with industry to find out the problems and establish quality control procedure –Indium, Eutectic Pb/Sn solder treated with flux or PADS(Plasma assisted fluxless soldering)

2. Vendor search A lot of enquiries/contacts but most companies are not interested or consider the job too challenging Prototyping – BOEING, AIT (both used indium and could do wafer or single dies) Dummies – AIT (indium at 30  m pitch) – AIT also tested wafer bumping with 200  m thick wafers – MCNC/Unitive (solder both flux and fluxless); only 6” wafers (needs modification for 4”).

3. Bump Bonding Technologies Indium Bumps –Fabrication process (evaporation) –Minimum achievable bump size and pitch –Properties (electrical and mechanical) –Bumping and flip-chip bonding yields Solder Bumps –Fabrication process (electroplating) –Minimum achievable bump size and pitch –Properties (electrical and mechanical)

4. Indium Bumps Fabricated by thermal evaporation (using a lift-off process) for small bumps, finer pitch, better uniformity and control, single die bumping possible Requires sputter deposited 2-metal layer barrier diffusion UBM Soft compliant bump with a melting point of 156°C Form a non-conducting oxide layer (which has to be penetrated) Both sides have to be indium bumped Minimum bump sizes of 12 µm with a height of 8-10 µm on a 18 µm pitch Large arrays with 500K+ bumps on a single die possible Flip-chip bonding using compression only (room temperature process) requiring ~1-2 grams/bump Bump resistance of ~1-2 Ohms for a 15 µm x 15 µm square bump Requires a flip-chip bonder with 1-2 micron alignment accuracy and planarization Expensive to fabricate!

5. Indium bumps on ROC done at AIT

6. Results on Indium-bumped (AIT) prototype detectors Hit-map for three FPIX1-implemented detectors using radioactive source

7. Indium Bumps Summary Indium bump/bonding is proven, able to fabricate small bumps on fine pitch (by evaporation) with good mechanical strength and high-yields for both bumping and bonding Indium bonding requires bumps on both sides and a highly accurate flip-chip aligner/bonder with planarization capability Indium bumps are expensive to fabricate! Current achievable minimum bump dimensions of 12 µm diameter, height of 8-10 µm, 18 µm pitch

8. Electroplated Lead-Tin Solder Bumps Versatile in selection of solder alloy composition and MP Self-aligning and self-planarizing bumps (upon reflow) Requires fabrication of solder bump on one side only with an opposing "wettable" pad Excellent electrical and mechanical characteristics: –low resistance electrical path (2-3 µOhms) –low inductance (~0.1 nH) –shear values in excess of 30 grams for 50 micron bump Alpha particle emission from bumps Potential for low-cost in high volume Minimum size of 15 µm diameter bumps on a 20 µm pitch!

9. Eutectic Lead-Tin (37:63) Bumps After Reflow @ 215°C 25 micron diameter, 50 micron pitch

10. Tests on dummies from MCNC/Unitive Structures with 50  m pitch (BTeV) and 150  m pitch(CMS) on same wafer 80 PADS single-chip assemblies and 38 fluxed single-chip assemblies (BTeV) US-CMS also tested 5 double-chip assemblies and 1 5-chip assembly (using flux-less solder) Check connectivity between matched pair of pads using a semi-automatic probe station Sometimes, need to apply a low voltage to break through Also look for shorts between neighbors

11. Wafer layout

12. Solder bumps from MCNC

13. Results on connectivity Much better results in the PADS assemblies than the ones using flux. The latter ones have a lot of visible residues Concentrate only on PADS assemblies 6 out of 71 assemblies have a lot of opens due to operator error. Assembly yield is 65/71 or 91.5% 190 traces per assembly. 52 opens. Trace yield =99.58% 26 bonds per trace. Bump yield =99.98% Preliminary results from CMS module assemblies are comparable.

14. Problems Operator error – gross misalignment by one column Channels need voltage to break through –thought to be due to incomplete removal of oxide on Al before UBM was put on Bridges (see X ray picture) Irregular reflow Lab vs cleanroom condition Module assembly –PADS process needs modification

15. Defect joint

16. Solder Bumps Summary Solder bumps may provide an alternative to indium bump/bonding Versatile in choice of alloy with MP between 150- 210°C Current minimum achievable bump sizes of 15 µm diameter on a 20 µm pitch! Excellent electrical and mechanical characteristics Self-aligning and self-planarizing bonding process Lower fabrication cost than indium requiring bumping on one side only and a wettable layer on the other

17. Conclusions Satisfactory results on real detectors using Indium Dummy tests on 30  m ongoing Fluxless solder by MCNC has good bond yield Whole chip losses need to be better understood and controlled Module assembly – non-industrial standard (closely abutted to one another); MCNC needs to learn how to do this Next round – real detectors will be bumped and bonded at MCNC