1. batch 12 wafer 7 summary comparison to baseline

2. N+ Sheet Resistance (  / ) Wide structure method, Target = 30  /

3. N+ Sheet Resistance wafer map wafer flat

4. N+ sheet resistance statistics

5. P+ Sheet Resistance (  /) Wide structure method, Target = 39  /

6. P+ sheet resistance statistics

7. Poly Sheet Resistance (  /) Wide structure method, Target = 49  /

8. Poly Sheet Resistance wafer map wafer flat

9. Poly wide sheet resistance statistics

10. Poly CD Narrow #1 & #2 (  m) Target = 2  m

11. Poly CD statistics

12. Poly COMB leakage (A) Target = 1E-12 A

13. Poly COMB leakage statistics

14. Poly Serpentine Resistance (  ) Target = 166 k 

15. Poly serpentine resistance statistics

16. NMOS & PMOS Threshold Voltage (V) W=5  m, L=varying*

17. NMOS & PMOS Threshold Voltage (V) W=10  m, L=varying*

18. VT w=10, l=5um statistics

19. NMOS & PMOS Threshold Voltage (V) W=50  m, L=varying*

20. NMOS & PMOS Saturation Current (A) W=5  m, L=varying*, Log10 scale

21. NMOS & PMOS Saturation Current (A) W=10  m, L=varying*, Log10 scale

22. NMOS & PMOS Saturation Current (A) W=50  m, L=varying*, Log10 scale

23. NMOS & PMOS Off Current (A) W=5  m, L=varying*, Log10 scale

24. NMOS & PMOS Off Current (A) W=10  m, L=varying*, Log10 scale

25. NMOS & PMOS Off Current (A) W=50  m, L=varying*, Log10 scale

26. N+ Contact Resistance (  ) Target = 0.1 

27. N+ contact resistance statistics

28. N+ Contact Chain Resistance (  ) Target = 5k 

29. N+ contact chain resistance statistics

30. P+ Contact Resistance (  ) Target = 1 

31. P+ contact resistance statistics

32. P+ Contact Chain Resistance (  ) Target = 4 k 

33. P+ contact chain resistance statistics

34. Poly Contact Resistance (  ) Target = 0.1 

35. poly contact resistance statistics

36. Poly Contact Chain Resistance (  ) Target = 4.9 k 

37. poly contact chain resistance statistics

38. M1 COMB leakage (A) Target = 1E-12A

39. M1 COMB leakage statistics

40. M1 Serpentine Resistance (  ) Target = 85 

41. M1 Serpentine Resistance wafer map

42. M1 serpentine resistance statistics

43. M1 Van der Pauw Sheet Resistance (m  /) target = 56.7 m  / very high resistance

44. M1 sheet resistance statistics

45. M2 to M1 Via Resistance (  ) Target = 0.1  Batch 4 & 5 did not receive M2 processing

46. Via1 resistance statistics

47. M2 to M1 Via Chain Resistance (  ) Target = 19 

48. Via1 contact chain resistance statistics

49. M2 Van der Pauw Sheet Resistance (m  /) target = 42.5 m  / very high resistance batches 4 & 5 didn’t receive M2 processing

50. M2 sheet resistance statistics