1. MKS사 MFC
TMS Co., Ltd
장원재

2. G-SERIES MFC 대용량 MFC MF1 I-SERIES MFC 1179A / 1479A P-SERIES MFC
50~1,000 slm
GE250A
IE250A, IE500A, IE1000A,IM250A
P250A
1579A
저 비용, 높은 성능의 MFC
 대부분 산업분야에 적합
Oring seal / Metal –sealed MFC
5 sccm ~ 250 slm
Digital and Analog I/O
MF1
I-SERIES MFC
작은 사이즈의 MFC
분석 기기 및 sputter 분야
Oring seal MFC
10 sccm ~ 20 slm
물과 먼지에 MFC가 노출되는 환경에
사용 가능 (IP66)
Oring seal / Metal-sealed MFC
5 sccm ~ 1,000 slm
Digital and Analog I/O
1179A / 1479A
P-SERIES MFC
Analog MFC
Oring seal / Metal-sealed
10 sccm ~ 20 slm
일반산업분야에 가장 많이 사용
높은 정확도, 반복성 및 Inlet 압력
변화에 영향 없는 중요 공정분야에 적합
Metal-sealed MFC/MFM
5 sccm ~ 250 slm
Digital and Analog I/O
ALTA MFC

3. MFC-저비용 고성능 1179A GE-50A 1479A Analog type Digital type
(Elastomer seal)
1479A
(Metal seal)
GE-50A
Analog type
Digital type
Elastomer Sealed
item
Spec
Range
10sccm~20slm
Accuracy
±1.0% of F.S
Repeatability
±0.2% of F.S
item
Spec
Range
5sccm~50slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC, 4~20mA 통신
DeviceNet,
RS485,Profibus,
EtherCAT
MFM
179A (All metal MFM)
M10B (Elastomer sealed)

4. MFC-저비용 고성능 GM-50A GV-50A Digital type Metal Sealed Digital type
-MFM 모델로
선택가능.
Digital type
Elastomer Sealed
Shut-Off Valve
item
Spec
Range
5sccm~50slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC, 4~20mA 통신
DeviceNet,
RS485,Profibus,
EtherCAT
item
Spec
Range
5sccm~50slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC, 4~20mA 통신
DeviceNet,
RS485,Profibus,
EtherCAT

5. MFC-산업용(방진,방수) IE-50A IM-50A IP66 RATED(방진,방수형),
(elastomer seal)
IM-50A
(Metal Seal)
IP66 RATED(방진,방수형),
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 500msec
item
Spec
Range
5sccm~50slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC, 4~20mA 통신
Profibus, RS-485, Devicenet

6. MFC-가스용 π-MFC π-MFC P5A,P6A P2A 2016년 단종 예정 : 대체모델 P5A=> GM50A, P4B
Multi Gas, Multi Range
NC-Sapphire/Teflon seal
PFC-50 (P5A)
PFC-60 (P6A)
: 입력 압력에 영향받지 않음.
Multi Gas, Multi Range
NC-Teflon Seal
Safe Delivery Source gases
-- Ion Implant Applications
2016년 단종 예정
: 대체모델
P5A=> GM50A, P4B
P6A=> P9B
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 1.5sec
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 1.5sec
item
Spec
Range
5sccm~50slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC 통신
Devicenet, RS-485
item
Spec
Range
2 sccm ~ 20 sccm
Inlet pressure
4~1200 Torr
(with Vacuum Outlet)
Accuracy
± 1% of setpoint for 10 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.2% of reading
Analog Output
0~5VDC

7. MFC-가스용 MFC P4B MFC P9B Multi Gas, Multi Range 빠른 제어를 위한 MFC.
NC/NO valve-Teflon seal,
MFM 옵션
Inlet압력에 영향없음.
Multi Gas, Multi Range
빠른 제어를 위한 MFC.
NC/NO valve-Teflon seal,
MFM 옵션
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 0.75sec
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 0.75sec
item
Spec
Range
5sccm~50slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC 통신
Devicenet, RS-485
item
Spec
Range
5sccm~50slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC 통신
Devicenet, RS-485

8. MFC-가스용 MF1 Compact, General MFC All Metal Sensor MFM기능 옵션임.
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 0.8sec
item
Spec
Range
10sccm~20slm
Accuracy
± (0.5% of reading +0.2% of F.S.)
Repeatability
±0.2% of reading
Analog Output
0~5VDC 통신
Profibus, Modbus, USB,
EtherCAT, Profinet

9. MFC-가스용 ALTA MFC 1480A-MFC MC20A-MFC Digital Metal sealed Type
MC20A High Flow Thermal MFC
Devicenet, Analog Version
Devicenet, Analog Version
10sccm~30slm
50,100,200slm

10. MFC-대용량가스용

11. MFC-대용량가스용 1559A 1579A 2016년 단종 예정 1559A=>GE250A Analog type
2016년 단종 예정
1559A=>GE250A
1559A
(Elastomer seal)
1579A
(Elastomer seal)
Analog type
Analog 15Pin
Digital Profibus
item
Spec
Range
20slm~200slm
Accuracy
±1.0% of F.S
Repeatability
±0.2% of F.S
item
Spec
Range
50slm~300slm
Accuracy
±1.0% of setpoont
Repeatability
±0.3% of reading
2016년 단종 예정
558A=>579A

12. MFC-대용량가스용 P250A GE-250A Multi Gas, Multi Range Metal Sealed
(Elastomer seal)
Multi Gas, Multi Range
Metal Sealed
 MOCVD, silicon epitaxy, RTP
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 1~2sec
DIGITAL MASS FLOW CONTROLLER
:Controller setting time < 3sec
item
Spec
Range
100slm~250slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.5% of reading
Analog Output
0~5VDC, 4~20mA
item
Spec
Range
100 slm~200slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.3% of reading
Analog Output
0~5VDC 통신
Devicenet

13. MFC-대용량: 방진방수 IE-250A IE-500A IM-250A IE-1000A 대용량 IP66 RATED(방진,방수형),
(elastomer seal)
IM-250A
(Metal Seal)
IE-500A
(elastomer seal)
IE-1000A
(elastomer seal)
대용량
IP66 RATED(방진,방수형),
DIGITAL MASS FLOW CONTROLLER
Controller setting time < 2~3sec
IP66 RATED(방진,방수형),
DIGITAL MASS FLOW CONTROLLER
IE250A :Controller setting time < 1~2sec
IM250A :Controller setting time < 2~3sec
item
Spec
Range
250~500 slm, 501~1000 slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.5% of reading
Analog Output
0~5VDC, 4~20mA
item
Spec
Range
100~250slm
Accuracy
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability
±0.5% of reading
Analog Output
0~5VDC, 4~20mA

14. PRESSURE-BASED MASS-FLO® CONTROLLER
Type 1640
item
Spec
Range
2sccm ~ 20sccm
최대 Inlet 압력
5 psig
최소 동작 Inlet 압력
10 torr 이하 (typical)
Control Range
5% to 100% of F.S.
Repeatability
±0.2% of F.S.
Analog Output
0~5VDC
Resolution
0.1% of F.S.
Safe Delivery System (SDS®) Applications