1. 14 - 1 Lecture 14 Taken in part from Chapters 13-15 Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda

2. 14 - 2 Objectives Basic concepts for photolithography, including process overview, critical dimension generations, light spectrum, resolution and process latitude. Difference between negative and positive lithography. Eight basic steps to photolithography. Wafer surface preparation for photolithography. Photoresist physical properties. Applications of conventional i-line photoresist. Deep UV resists Photoresist application techniques Soft bake processing

3. 14 - 3 Wafer Fabrication Process Flow Implant Diffusion Test/Sort Etch Polish Photo Completed wafer Unpatterned wafer Wafer start Thin Films Wafer fabrication (front-end)

4. 14 - 4 Patterning process –Photomask –Reticle Critical dimension generations Light spectrum and wavelengths Resolution Overlay accuracy Process latitude Photolithography Concepts

5. 14 - 5 Three Basic Exposure Methods 1:1 Exposure ~5:1 Exposure

6. 14 - 6 Contact printing capable of high resolution but has unacceptable defect densities. May be used in Development but not manufacturing. Proximity printing cannot easily print features below a few mm in line width. Used in nano-technolgy. Projection printing provides high resolution and low defect densities and dominates today. Typical projection systems use reduction optics (2X - 5X), step and repeat or step and scan. They print » 50 wafers/hour and cost $5 - 10M.

7. 14 - 7 Steps in Lithography Process Lithography has three parts: (1) Light source, (2) Wafer exposure (3) Resist

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9. 14 - 9 Photomask and Reticle for Microlithography 4:1 Reticle 1:1 Mask

10. 14 - 10 Three Dimensional Pattern in Photoresist Linewidth Space Thickness Substrate Photoresist

11. 14 - 11 Section of the Electromagnetic Spectrum Visible Radio waves Micro- waves Infrared Gamma rays UV X-rays f (Hz)10 468 121416221820 (m) 420 -2-4-6-8-14-10-12 10 365436 405248 193 157 g hi DUV VUV (nm) Common UV wavelengths used in optical lithography.

12. 14 - 12 Light Sources Decreasing feature sizes requires shorter λ. Hg vapor lamps : Hg plasma inside glass lamp –Produces multiple wavelengths –Limited in intensity –“g” line: λ = 436 nm (used to mid 1980s) –“I” line: λ = 365 nm (early 1990s, >0.3 μm) Deep UV by excimer lasers –Kr + NF 3 + (energy) → KrF + (photon emission) KrF: λ = 248 nm (used for 0.25 μm) ArF: λ = 193 nm (used for 0.12 μm)

13. 14 - 13 Important Wavelengths for Photolithography Exposure Table 13.1

14. 14 - 14 Importance of Mask Overlay Accuracy PMOSFET NMOSFET Cross section of CMOS inverter Top view of CMOS inverter The masking layers determine the accuracy by which subsequent processes can be performed. The photoresist mask pattern prepares individual layers for proper placement, orientation, and size of structures to be etched or implanted. Small sizes and low tolerances do not provide much room for error. Figure 13.4

15. 14 - 15 Photolithography Processes Negative Resist –Wafer image is opposite of mask image –Exposed resist hardens and is insoluble –Developer removes unexposed resist Positive Resist –Mask image is same as wafer image –Exposed resist softens and is soluble –Developer removes exposed resist

16. 14 - 16 Negative Lithography Ultraviolet light Island Areas exposed to light become crosslinked and resist the developer chemical. Resulting pattern after the resist is developed. Window Exposed area of photoresist Shadow on photoresist Chrome island on glass mask Silicon substrate Photoresist Oxide Photoresist Oxide Silicon substrate

17. 14 - 17 Positive Lithography photoresist silicon substrate oxide silicon substrate photoresist Ultraviolet light Island Areas exposed to light are dissolved. Resulting pattern after the resist is developed. Shadow on photoresist Exposed area of photoresist Chrome island on glass mask Window Silicon substrate Photoresist Oxide Photoresist Oxide Silicon substrate

18. 14 - 18 Relationship Between Mask and Resist Desired photoresist structure to be printed on wafer Window Substrate Island of photoresist QuartzChrome Island Mask pattern required when using negative photoresist (opposite of intended structure) Mask pattern required when using positive photoresist (same as intended structure)

19. 14 - 19 Clear Field and Dark Field Masks Simulation of contact holes (positive resist lithography) Simulation of metal interconnect lines (positive resist lithography) Clear Field MaskDark Field Mask

20. 14 - 20 Eight Steps of Photolithography

21. 14 - 21 Eight Steps of Photolithography 8) Develop inspect5) Post-exposure bake 6) Develop7) Hard bake UV Light Mask 4) Alignment and Exposure Resist 2) Spin coat 3) Soft bake 1) Vapor prime HMDS

22. 14 - 22 Photolithography Track System

23. 14 - 23 Vapor Prime The First Step of Photolithography: Promotes Good Photoresist-to-Wafer Adhesion Primes Wafer with Hexamethyldisilazane, HMDS Followed by Dehydration Bake Ensures Wafer Surface is Clean and Dry

24. 14 - 24 Spin Coat Process Summary: Wafer is held onto vacuum chuck Dispense ~5ml of photoresist Slow spin ~ 500 rpm Ramp up to ~ 3000 to 5000 rpm Quality measures: –time –speed –thickness –uniformity –particles and defects Vacuum chuck Spindle connected to spin motor To vacuum pump Photoresist dispenser

25. 14 - 25 Soft bake Characteristics of Soft Bake: Improves Photoresist-to-Wafer Adhesion Promotes Resist Uniformity on Wafer Improves Linewidth Control During Etch Drives Off Most of Solvent in Photoresist Typical Bake Temperatures are 90 to 100  C –For About 30 Seconds –On a Hot Plate –Followed by Cooling Step on Cold Plate

26. 14 - 26 Alignment and Exposure Process Summary: Transfers the mask image to the resist- coated wafer Activates photo-sensitive components of photoresist Quality measures: –linewidth resolution –overlay accuracy –particles and defects UV light source Mask Resist

27. 14 - 27 Post-Exposure Bake Required for Deep UV Resists Typical Temperatures 100 to 110  C on a hot plate Immediately after Exposure Has Become a Virtual Standard for DUV and Standard Resists

28. 14 - 28 Photoresist Development Process Summary: Soluble areas of photoresist are dissolved by developer chemical Visible patterns appear on wafer - windows - islands Quality measures: - line resolution - uniformity - particles and defects Vacuum chuck Spindle connected to spin motor To vacuum pump Develop dispenser

29. 14 - 29 Hard Bake A Post-Development Thermal Bake Evaporate Remaining Solvent Improve Resist-to-Wafer Adhesion Higher Temperature (120 to 140  C) than Soft Bake

30. 14 - 30 Develop / Inspect Inspect to Verify a Quality Pattern –Identify Quality Problems (Defects) –Characterize the Performance of the Photolithography Process –Prevents Passing Defects to Other Areas Etch Implant –Rework Mis-processed or Defective Resist-coated Wafers Typically an Automated Operation

31. 14 - 31 Vapor Prime Wafer Cleaning Dehydration Bake Wafer Priming –Priming Techniques Puddle Dispense and Spin Spray Dispense and Spin Vapor Prime and Dehydration Bake

32. 14 - 32 Effect of Poor Resist Adhesion Due to Surface Contamination Resist liftoff

33. 14 - 33 HMDS Puddle Dispense and Spin Puddle formation Spin wafer to remove excess liquid

34. 14 - 34 HMDS Hot Plate Dehydration Bake and Vapor Prime Wafer Exhaust Hot plate Chamber cover Process Summary: Dehydration bake in enclosed chamber with exhaust Hexamethyldisilazane (HMDS) Clean and dry wafer surface (hydrophobic) Temp ~ 200 to 250  C Time ~ 60 sec.

35. 14 - 35 Purpose of Photoresist in Wafer Fab To transfer the mask pattern to the photoresist on the top layer of the wafer surface To protect the underlying material during subsequent processing e.g. etch or ion implantation.

36. 14 - 36 Progressive Improvements in Photoresist Better image definition (resolution). Better adhesion to semiconductor wafer surfaces. Better uniformity characteristics. Increased process latitude (less sensitivity to process variations).

37. 14 - 37 Photoresist –Types of Photoresist –Negative Versus Positive Photoresists Photoresist Physical Properties Conventional I-Line Photoresists –Negative I-Line Photoresists –Positive I-Line Photoresists Deep UV (DUV) Photoresists Photoresist Dispensing Methods Spin Coat

38. 14 - 38 Types of Photoresists Two Types of Photoresist –Positive Resist –Negative Resist CD Capability –Conventional Resist –Deep UV Resist Process Applications –Non-critical Layers –Critical Layers

39. 14 - 39 Negative Versus Positive Resists Negative Resist –Wafer image is opposite of mask image –Exposed resist hardens and is insoluble –Developer removes unexposed resist Positive Resist –Mask image is same as wafer image –Exposed resist softens and is soluble –Developer removes exposed resist Resolution Issues Clear Field Versus Dark Field Masks

40. 14 - 40 Photoresist Physical Characteristics ¥Resolution ¥Contrast ¥Sensitivity ¥Viscosity ¥Adhesion ¥Etch resistance ¥Surface tension ¥Storage and handling ¥Contaminants and particles

41. 14 - 41 Resist Contrast Poor Resist Contrast Sloped walls Swelling Poor contrast Resist Film Good Resist Contrast Sharp walls No swelling Good contrast Resist Film

42. 14 - 42 Surface Tension Low surface tension High surface tension from low molecular from high molecular forces

43. 14 - 43 Components of Conventional Photoresist Additives: chemicals that control specific aspects of resist material Solvent: gives resist its flow characteristics Sensitizers: photosensitive component of the resist material Resin: mix of polymers used as binder; gives resist mechanical and chemical properties Figure 13.18

44. 14 - 44 Negative Resist Cross-Linking Areas exposed to light become crosslinked and resist the developer chemical. Unexposed areas remain soluble to developer chemical. Pre-exposure - photoresist Post-exposure - photoresist Post-develop - photoresist UV Oxide Photoresist Substrate Crosslinks Unexposed Exposed Soluble

45. 14 - 45 PAC as Dissolution Inhibitor in Positive I-Line Resist Resist exposed to light dissolves in the developer chemical. Unexposed resist, containing PACs, remain crosslinked and insoluble to developer chemical. Pre-exposure + photoresist Post-exposure + photoresist Post-develop + photoresist UV Oxide Photoresist Substrate Soluble resist Exposed Unexposed PAC

46. 14 - 46 Good Contrast Characteristics of Positive I-line Photoresist Positive Photoresist: Sharp walls No swelling Good contrast Film Resist

47. 14 - 47 DUV Emission Spectrum * Intensity of mercury lamp is too low at 248 nm to be usable in DUV photolithography applications. Excimer lasers, such as shown on the left provide more energy for a given DUV wavelength. 100 80 60 40 20 0 248 nm Relative Intensity (%) KrF laser emission spectrum Emission spectrum of high-intensity mercury lamp 120 100 80 60 40 20 0 200300 400 500 600 Wavelength (nm) Relative Intensity (%) g-line 436 nm i-line 365 nm h-line 405 nm DUV* 248 nm

48. 14 - 48 Chemically Amplified (CA) DUV Resist Resist exposed to light dissolves in the developer chemical. Unexposed resist remains crosslinked and PAGs are inactive. Pre-exposure + CA photoresist Post-exposure + CA photoresist Post-develop + CA photoresist UV Oxide Photoresist Substrate Unchanged Exposed Unexposed Acid-catalyzed reaction (during PEB) PAG H+H+ H+H+ H+H+

49. 14 - 49 Exposure Steps for Chemically- Amplified DUV Resist Table 13.5

50. 14 - 50 Steps of Photoresist Spin Coating 3) Spin-off4) Solvent evaporation 1) Resist dispense2) Spin-up

51. 14 - 51 Wafer Transfer System Load station Transfer station Vapor prime Resist coat Develop and Rinse Edge-bead removal Soft bake Cool plate Hard bake Wafer stepper (Alignment/Exposure system) Automated Wafer Track for Photolithography

52. 14 - 52 Photoresist Dispense Nozzle Z Y X  Resist dispenser nozzle Bottom side EBR Vacuum Vacuum chuck Spin motor Wafer Exhaust Drain Resist flow Stainless steel bowl Air flow Nozzle position can be adjusted in four directions.

53. 14 - 53 Resist Spin Speed Curve 80000 70000 60000 50000 40000 30000 20000 10000 0 1000200030004000500060007000 Spin Speed (RPM) Spin Speed Curve of IX300 Resist Thickness (Å) 21 cP 110 cP 70 cP

54. 14 - 54 Soft Bake on Vacuum Hot Plate Purpose of Soft Bake: Partial evaporation of photoresist solvents Improves adhesion Improves uniformity Improves etch resistance Improves linewidth control Optimizes light absorbance characteristics of photoresist Hot plate Wafer Solvent exhaust Chamber cover Figure 13.28

55. 14 - 55 Solvent Content of Resist Versus Temperature During Soft Bake DNQ/Novolak resist Bake Temperature (°C) Residual Solvent (% w/w) Figure 13.29