1. Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

2. From Traditional Cleanrooms to Minienvironments and Nano-technology Facilities Tengfang (Tim) Xu, Ph.D., PE Environmental Energy Technologies Division Lawrence Berkeley National Laboratory June 23, 2005 Issues and Trends in Clean Technologies

3. - Slide 3 Outline Introduction to clean technologies –Cleanrooms and minienvironments Energy saving opportunities Case studies Issues and trends What’s coming?

4. - Slide 4 Introduction: Cleanroom Definition –A Cleanroom is "a room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters, e.g., temperature, humidity, and pressure, are controlled as necessary." –ISO Standard 14644-1

5. - Slide 5 Introduction: Cleanroom Design –The design of cleanroom HVAC systems requires the unique understanding of cleanliness requirements, guidelines, airflow, filtration, room pressurization, code requirements, specialty equipment, precise control, and many more details. –IEST CC RP12.2 Considerations in Cleanroom Design Subgroup 1: Cleanroom Design Considerations Subgroup 2: Installation of Cleanroom Production Equipment Subgroup 3: Cleanroom Electrical Systems

6. - Slide 6 Introduction: Minienvironment Definition –A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment Guidelines –Separative Devices, ISO Standard 14644-7 (IEST) –IEST CC RP28.1: Minienvironments

7. - Slide 7 Minienvironment Applications A variety of names –“Separative devices,” “separative enclosures,” “isolators,” or “barriers” in the microelectronics, chemical, and pharmaceutical industries –“Safety cabinets” in biomedical and healthcare –“Gloveboxes” in research and defense industry

8. - Slide 8 Clean Technologies for Controlled Environment Process-driven –contamination Planning Design Qualifications Operation

9. - Slide 9 Cleanroom Measured Power Cleanroom Electric Power

10. - Slide 10 Energy Savings Opportunities Efficient Air Systems –initial costs –optimized sizing –utility costs and productivity –non-energy benefits Energy efficient planning and design – –strategy to achieve cost savings and to improve bottom lines in the industry

11. - Slide 11 Case Studies on Minienvironment/Cleanroom

12. - Slide 12 Why Minienvironment?

13. - Slide 13 Results Total fan power Power factor Pressure control EPI (W/cfm) –Comparison with Cleanrooms

14. - Slide 14 Results

15. - Slide 15 Results

16. - Slide 16 Issues and Trends… Issues - Contamination control –Source: particle, molecular, bio, mechanical, electronic –Preciseness, costs, safety, regulation Trends –Multi-level particle retention and/or bio containment –Minienvironments/Bio-safety cabinet –Nano-tech facilities

17. - Slide 17 Issues and Trends… Standards The Institute of Environmental Sciences and Technology (IEST) –ISO Standard 14644 (1 through 8): Cleanrooms and Controlled Environments –ISO Standard 14698 (1 through 3): Bio-contamination

18. - Slide 18 Issues and Trends… Solutions Resources for clean technologies –IEST RPs addressing a variety of cleanroom technologies http://www.iest.org/technical/ccwgs.html Design, construction, operation, compliance, qualifications, procedure, control, etc. WG12 > WG28 > New WGs on Nano-tech facilities –LBNL Energy related technologies and strategies

19. - Slide 19 What’s Coming… Stay Tuned Cleanrooms Minienvironments - upcoming workshop to –Share knowledge and improve performance of minienvironments –Understand energy implications of minienvironment vs. cleanroom –Develop and identify strategies in energy efficiency for effective environmental control

20. Questions TTXU@LBL.GOV Lawrence Berkeley National Laboratory