2. μMS³ μModular Substrate Sampling System μMS³ μ Modular Substrate Sampling System

3. μ MS³ Presentation  Product Description  Building Block Simplicity  Building Blocks into Systems  Features & Benefits  Specifications  Conventional to Modular Sampling Systems  Pricing Structure

4. Product Description μMS³ Product Description  The μ MS³ System…  Designed to maximize efficiency and minimize costs  Developed specifically for the Process Analytical Instrumentation market  Incorporates a single block and tubeset architecture for simplicity  The perfect solution for most gas or liquid sample conditioning systems

5.  One Building Block for all system configurations.  Standard Flow Tubesets are pre-welded and allow for flexibility in system design.  Simple building block approach allows for assembly and/or reassembly into virtually any configuration. Block & Tube Architecture μMS³ Block & Tube Architecture Building Block Standard Flow Tubes

6. Simple Assembly Steps μMS³ Simple Assembly Steps

7. From Building Blocks & Tubes to Sampling System  Assembly Requirements  One tool, screw type & seal  µMS³ blocks  µMS³ prefabricated interconnecting tubesets  µMS³ standoffs. Step 1 – Determine number of components required for each flow stream. For each flow stream, assemble µMS³ blocks together using #8-32 x 7/16” Socket Head Cap Screws. No seals are required.

8. From Building Blocks & Tubes to Sampling System (cont.) Step 2 – Based on User’s flow schematic, place seal in block counter bore and attach µMS³ prefabricated tubesets to each manifold block using #8-32 x 7/16” Socket Head Cap Screws. Step 3 – Based on User’s flow schematic, place seal in block counter bore and assemble µMS³ prefabricated manifold to manifold tubesets to each flow manifold using #8-32 x 7/16” Socket Head Cap Screws.

9. From Building Blocks & Tubes to Sampling System (cont.) Step 4 – Connect µMS³ standoffs to the bottom of each end of each modular substrate manifold using #8- 32 x 7/16” Socket Head Cap Screws. Step 5 – Based on User’s flow schematic, attach surface mount components to top of modular substrate using #10-32 x 7/16” Socket Head Cap Screws.

10. Tubed System Flow Schematic

11. μMS³ Flow Schematic

12. μMS³ System

13. NeSSI / SP76 History/Standards  Initially Semiconductor Industry Concept  Center for Process Analytical Chemistry  Washington State University  New Sampling / Sensor Initiative (NeSSI)  Ad Hoc group of manufacturers, end users, integrators worked together to improve technology and achieve ‘Smart’ systems.  ANSI / ISA Standard 76.00.02 ( 2002 ) for Industrial and Analytical Application

14. Conventional Sampling Systems  Conventional Sampling Systems  Not Simple  Expensive to Maintain  Time Consuming to Design and Build  No Standardization; all “Black Art Designs”  Space Consuming  Size of components yields greater internal volume

15. Sampling System μMS³ Sampling System  Modular Sampling System Simple / Standard / Small / Smart (Future) Standardization ANSI / ISA SP76.00.02 ( 2002 ) Ease of Maintenance Lower Internal Volumes External Space Savings

16. μMS³ Pricing  The µMS³ system is a ‘build to order” modular solution with pricing and availability based on customer specific design requirements and strict compliance to ANSI/ISA 76.00.02 (2002).  Component pricing is as follows:  Modular Building Blocks  Modular Tubesets  ANSI/ISA 76 Surface Mount Components