1. Laser application in mems babak manafi June.09,2009

2. outline outline Introduction Fabrication Laser assisted in fabrication mems structure Laser assisted in assembly mems moving part

3. introduction The term MEMS first started being used in the 1980’s. It is used primarily in the United States and is applied to a broad set of technologies with the goal of miniaturizing systems through the integration of functions into small packages

4. The name of Micro Systems US: MEMS (MicroElectroMechanical Systems) Japan: Micromachines Europe: MST (Micro System Technology) Scale of device: roughly from 1 μ m-1mm.

5. The graphic shows some of the variety found in MEMs systems - Micro-pump – used to pump small amounts of fluid - Micro-gear – this is a SEM (Scanning Electron Micrograph) of a Sandia Gear, each tooth is about 8um or the size of a human red blood cell - Micro-mirror – used in telecommunications and also displays, one example here. - Fluid Channel – well, if you have a micro pump, you need a fluid channel

7. Red blood cells (~7-8  m) Fly ash ~ 10-20  m Human hair ~ 60-120  m wide Ant ~ 5 mm Dust mite 200  m ATP synthase ~10 nm diameter 0.1 nm 1 nanometer (nm) 0.01  m 10 nm 0.1  m 100 nm 1,000 nanometers = 1 micrometer (mm) 0.01 mm 10  m 0.1 mm 100  m 1,000,000 nanometers = 1 millimeter (mm) 1 cm 10 mm 10 -2 m 10 -3 m 10 -4 m 10 -5 m 10 -6 m 10 -7 m 10 -8 m 10 -9 m 10 -10 m Atoms of silicon spacing 0.078 nm DNA ~2-1/2 nm diameter The Scale of Things – Nanometers and More Visible Infrared Ultraviolet Microwave Soft x-ray Micro-technology “The Micro World” Nanotechnology “The Nano World” Head of a pin 1-2 mm

8. DNA Atoms Small Molecules Proteins Viruses BacterialCells 100  m1x10 -4 m 10  m 1  m 100 nm 10 nm 1 nm 1 Å 1x10 -5 m 1x10 -6 m 1x10 -7 m 1x10 -8 m 1x10 -9 m 1x10 -10 m Plant & Animal Cells

9. 研究動機 Microvision Inc. Optical Scanner MEMS in Our Life

10. http://www.hp.com/oeminkjet/learn/history/worldleader.html For More Information

11. Applications: Actuators Texas Instruments Digital Micromirror Device TM Array of up to 1.3 million mirrors Invented by Texas Instruments in 1986 Each mirror is 16  m on a side with a pitch of 17  m Resolutions: 800x600 pixels (SVGA) and 1280x1024 pixels (SXGA)

12. 12 Micro-Motor and Micro-Mirror Electrostatic Micro Motor fabricated from Si (Texas Instruments) Micro Mirror (Lucent Technologies)

13. Linear Rack Gear Reduction Drive Triple-Piston Microsteam Engine Photos from Sandia National Lab. Website: http://mems.sandia.gov

16. Spider mite standing on electrostatic micro engine

17. Spider mite walking across MEMs device

20. Close-up of gears

21. 21 Penetrating Neural Probe

23. 23 Sandia’s micro mechanical lock

24. Components of MEMS

26. Summary: Applications 3 main classes of MEMS ◦ Passive structures ◦ Sensors ◦ Actuators Passive structures ◦ Microreservoirs (injet printer nozzle) ◦ Micro-channels (microfluidics) Sensors ◦ Pressure sensors ◦ Inertial sensors Actuators ◦ Digital micromirrors (projection) ◦ Gears, transmissions, motors, pumps, valves

27. How Use of micro mirror in mems

29. Basic microfabrication technologies Deposition ◦ Chemical vapor deposition (CVD/PECVD/LPCVD) ◦ Epitaxy ◦ Oxidation ◦ Evaporation ◦ Sputtering ◦ Spin-on methods Etching ◦ Wet chemical etching  Istropic  Anisotropic ◦ Dry etching  Plasma etch  Reactive Ion etch (RIE, DRIE) Patterning ◦ Optical lithography ◦ X-ray lithography

30. I discuss the use of excimer lasers in the manufacture of electromechanical devices and systems with emphasis on two application areas: laser micromachining of plymer masters for replication in metal by electroplating (laser-LIGA) laser-assisted manipulation of microparts for hybrid assembly.

31. Over the past twenty years a large number of laser-based fabrication techniques have been developed. These include: laser micromachining Laser assisted chemical etching (LCE or LACE) Laser-assisted chemical vapour deposition (LCVD) Pulsed laser deposition processes

32. 32 Laser-assisted Chemical Deposition Chemical deposition from vapor phase by laser-assisting Laser Nd-YAG (neodymium yttrium aluminum garnet) or Ar + Substrates - silicon - carbon - boron - oxides - nitrides - carbides - borides - metals

33. LASER-LIGA PROCESS

34. Fabrication microturbine

36. SEM image of micro turbine rotor (dia 470µm, height 150µm) In this process excimer laser have 193 nm wave length

38. In the following figures show the sequence of fabrication micro turbine

42. Measurement represent 0.14ms intervals of the 2.2ms thermal cycle

43. Laser assisted assembly

48. Special thank for : Reza Ghodssi Associate Professor ISR and the Electrical and Computer Engineering Department 2236 Kim Bldg. University of Maryland College Park, MD 20742 University of boston Veeco instruments inc. 2650 E.Elvira road tucson, AZ 85706 USA visit www.veeco.com

49. Reffrences: A. Gillner et al.: Proc. ICALEO 2000 Laser Microfab. Conf., Dearborn, USA, 2000-10 (Laser Institute of America, 2000), p. B1. Laser processes for MEMS manufacture, Andrew S. Holmes ∗ Department of Electrical and Electronic Engineering, Imperial College of Science, Technology and Medicine, UK

50. Simulating RF MEMS, David Bindel,UC Berkeley, CS Division MEMS TUNABLE DUAL-WAVELENGTH LASER WITH LARGE TUNING RANGE, H. Cai1, X. M. Zhang1, J. Wu2, D. Y. Tang1, Q. X. Zhang3, and A. Q. Liu11School of Electrical & Electronic Engineering, Nanyang Technological University, SINGAPORE, 2Key Laboratory of OCLT, MoE, Beijing University of Posts and Telecommunications, CHINA 3Institute for Microelectronics, SINGAPORE