1. Advanced Motion Control Techniques for Nanopositioning Applications October 2009

2. 2 Company and Product Overview System Elements Galil Control Filter Advanced Control Features Tuning – GalilTools and WSDK Adding IO to Motion Control Systems GalilTools API and LabView Medical/Biotech Sample Applications Agenda

3. 3 Established Reputation and Long History of Success Founded in 1983 by Jacob Tal and Wayne Baron Introduced 1 st microprocessor-based servo controller Profitable for over 90 consecutive quarters Delivered over 500,000 controllers world-wide Excellent Technical Support and Service World-wide network of factory-trained reps & distributors Technical support team with over 100 man-years of motion control experience On-line support tools at www.galilmc.com About the Company

4. 4 The Galil Support Team Live, prompt technical support Over 100 years of combined motion control experience Degreed MEs and EEs “ The mission of Galil’s experienced Applications Department is to provide prompt and accurate technical assistance to help OEMs successfully deliver their products to market ”

5. 5 We Are Here to Help! Tech Support Provided at Galil headquarters: Address:270 Technology Way, Rocklin, CA 95765 Email:support@galilmc.com Toll Free:800-377-6329 Phone:916-626-0101 Fax:916-626-0102 Hours:8am to 5pm PST, Monday through Friday Please provide: –Name –Company –Address –Phone/Email –Galil Products and revisions –Problem –Error messages

6. 6 On Line Tools at www.galilmc.com Galil’s free online support tools include: White Papers & application notes http://www.galilmc.com/support/application-notes.php On-Line tutorials on motion control http://www.galilmc.com/learning/tutorials.php MotionCode tm Toolkit with downloadable programs and code http://www.galilmc.com/learning/motioncode.php MotorSizer tm Software for easy sizing of motion systems http://www.galilmc.com/learning/motorsizer.php HelloGalil tm Quick start for PC programming languages http://www.galilmc.com/learning/hellogalil.php Bulletin Board with subject search http://www.galilmc.com/forums/ubbthreads.php ServoTrends Newsletter Archives http://www.galilmc.com/support/servotrends.php Product catalog with specs and pricing http://www.galilmc.com/support/catalog.php Customer applications and videos http://www.galilmc.com/support/smartmoves.php

7. 7 Galil Motion Controllers

8. 8 Features- Handles any Mode of Motion Point-to-Point Positioning Position Tracking Jogging Linear and Circular Interpolation Tangential Following Helical Electronic Gearing Electronic Cam Contouring Teach and Playback Position, Velocity, Time (PVT)

9. 9 Features – High Speed Encoder frequencies up to 22 MHz for servos Outputs pulses for steppers up to 6 MHz Servo loop updates as low as 31 µsec/axis 40 µsec command processing for application programs Ethernet available for 10Base-T and 100Base-T

10. 10 Features – Intelligent Programming On-board, non-volatile memory for storing application programs, variables and arrays  frees host Programmable event triggers including At time, At position, At input, At speed Multitasking for simultaneous execution of up to eight application programs Conditional JUMPS and IF/THEN/ELSE/Constructs Arithmetic and trigonometric functions

11. 11 Galil Product Line ACCELERA Controllers & Drives –DMC-40x0 Ethernet/RS232 –DMC-18x6 PCI ECONO Controllers & Drives –DMC-21x3 Ethernet/RS232 –DMC-18x2 PCI Single-Axis Controllers & Drives –DMC-14x5 Ethernet/RS232 –CDS-3310 Ethernet/RS232 Pocket PLC I/O Controllers –RIO-47xxx Ethernet/RS232 Software Tools –GalilTools Servo Tuning and Analysis software –Ladder Interface Converts ladder program into RIO code

12. 12 ACCELERA – Sizzling Speed. Fully Loaded. Galil’s latest generation motion controller family RISC processor for high-speed performance and processing power Accepts encoder inputs up to 22 MHz for servos Servo updates as fast as 31 µsec/axis Command processing time as low as 40 µsec 2000 lines x 80 chr program memory 16,000 array elements; 510 user defined variables Enhanced instruction set Available in 1- through 8-axis formats PCI: DMC-18x6 Ethernet/RS232: DMC-40x0

13. 13 DMC-40x0 Accelera Ethernet Controller Accelera, Ethernet/RS232 controller Full-featured, packaged controller Ultra-high speed and precision Ethernet 10/100Base-T, RS232 1 through 8 axes Optically isolated I/O, high-powered outputs, analog inputs, expanded 3.3V I/O, metal enclosure, d-type connectors Available packaged with multi-axis servo and stepper drives Compact-Box Dimensions: 1-4 axes: 8.1” x 7.25” x 1.72” 5-8 axes: 11.5” x 7.25” x 1.72” DMC-4040 4-axis controller

14. 14 DMC-40x0 Drive Options from Galil ModelDescription SDM-44040Four 1.4 A drives for step motors (Full, Half, ¼, 1/16) SDM-44140Four 3.0 A drives for microstepping AMP-43140Four 20W Linear amps for brush servos AMP-43040 AMP-43020 Four 500W PWM amps for brush/brushless servos Two 500W PWM amps for brush/brushless servos The DMC-40x0 can also connect to external drives of any size or power range.

15. 15 RIO Pocket PLC Smart. Compact. Low-Cost. Packed with I/O

16. 16 RIO-47xxx Pocket PLC Analog and Digital I/O with intelligence in a cost-effective, compact unit

17. 17 Smart. Compact. Low Cost. Lots of I/O. Smart – RISC processor, memory, counters, timers, PID process loops, web interface, data logging, email alerts, Ethernet, Power-over-Ethernet, Modbus Master/Slave, Ladder Interface Software Compact – just 3.88” x 4.26” x 1.30” Low Cost – only $295 in single quantity $195 in 100 quantity Lots of I/O – 32 digital I/O & 16 analog I/O

18. 18 RIO-471xx Provides Numerous I/O 16 isolated inputs, 5-24 VDC 8 isolated, sourcing outputs, 12-24 VDC, 500mA 8 isolated, sinking outputs, 5-24 VDC, 25mA 8 analog inputs, 0-5V – 47120: Selectable +/-10V, +/-5V, 0-5V, 0-10V 12- bit std, 16-bit opt. Differential or Single-ended. 8 analog outputs, 0-5V – 47120: Selectable +/-10V, +/-5V, 0-5V, 0-10V 12- bit std, 16-bit opt. All I/O are self-contained in each RIO unit. Network multiple RIO units to add more I/O.

19. 19 Use ICS boards for Prototyping Converts D-type to screw terminals ICS-48026 for analog I/O ICS-48044 for digital I/O

20. 20 RIO-47200 PLC with Screw terminals Pocket PLC with Screw Terminals and DIN Tray

21. 21 RIO Options RIO-47100 PLC with 0-5V analog; 12-bit RIO-47120 PLC with +/10V analog; 12-bit RIO-47120-16 16-bit ADC/DAC RIO-47102 -47100 with expanded memory RIO-47122 -47120 with expanded memory RIO-47200 PLC with screw terminals, DIN, 0-5V analog inputs, 16 high power outputs

22. 22 System Elements

23. 23 Position Control Systems

24. 24 Motion Controller Functions

25. 25 System Elements

26. 26 ProportionalP(k) = KP · X(k) DerivativeD(k) = KD · [X(k) - X(k-1)] IntegralI(k) = KI · X(k) + I(k-1) Functions: ProportionalFor speed of response DerivativeFor stability and damping IntegralFor accuracy - slow response Filter Operation

27. 27 Galil Control Filter

28. 28 Galil Control Filter

29. 29 Advanced Filter Features Proportional, Integral and Derivate gains DAC Offset Torque limiting (continuous and peak) Integral limiting (including integrator “freeze”) Feedforward terms (acceleration and velocity) Notch filter Pole filter Servo sample period

30. 30 Dual Loop block diagram

31. 31 Piezo Ceramic firmware Available as option for increasing performance of piezo ceramic motors Helps deal with static and dynamic characteristics of piezo ceramic motors Features Positive and negative anti-friction bias Deadband with hysteresis and shutoff Dual PID gainsets for static/dynamic operation Distance selectable feedforward velocity term

32. 32 Custom Firmware Options Galil offers many custom firmware modifications to achieve ultimate system performance: Feedback options: BiSS, SSI, Sine/Cosine Linear and 2D error mapping Kinematic transformations Advanced control algorithms Other customizations – FD, input notch, etc.

33. 33 System Tuning

34. 34 Connecting the system elements is done in three steps: 1.Test each function separately. 2.Close the position loop with low gain. 3.Tune the controller for fast and accurate response. Potential problems and their effects: 1.Ground loops - instability and noise sensitivity. 2.Connection with wrong polarity (positive feedback) -- causes motor to run away. 3.Too high gain -- causes instability and oscillations. System Connection and Compensation

35. 35 Set PID filter to KI = 0 KP, KD low values Step I -- KD Increase the derivative constant, KD, until system vibrates, then back off. Step II - KP Increase the proportional constant, KP, until system vibrates, then back off. Step III -- KI Increase the integral constant, KI, until system vibrates, then back off. System Compensation

36. 36 The autotuning feature allows quick and easy tuning Adjusts PID parameters for optimum performance Several autotuning methods available Step response is displayed showing risetime, overshoot and settling WSDK Auto Tuning

37. 37 Provides impulse test to check for absolute stability Actual response to impulse is displayed WSDK System Analysis

38. 38 Provides open and closed- loop frequency response test Useful for determining system bandwidth and resonances Frequency range for test is selectable WSDK System Analysis

39. 39 GalilTools- The Next Generation A new software package that enables easy set-up, tuning and analysis of Galil’s latest control systems Designed for use on Galil’s current generation of products Ethernet/RS232: DMC-40x0, DMC-21x3 and RIO-47xxx PCI: DMC-18x6 and DMC-18x2 Cross-platform compatible Communication drivers new from the ground-up, designed for quick and efficient controller communication GalilTools Lite (no charge) also available Details, demos at http://www.galilmc.com

40. 40 GalilTools- Scope

41. 41 GalilTools- Watch All

42. 42 GalilTools- Watch Some

43. 43 GalilTools- Tuning

44. 44 Adding IO To A System

45. 45 RIO-47xxx Networking Seamlessly interface to Galil motion controllers

46. 46 RIO-47xxx Networking Can be networked so all devices can access it

47. 47 Advantages to Remote IO Place controller closer to IO points Noise immunity Cat 5 cabling is cheaper and more readily available then shielded cables Open protocols ASCII strings via TCP or UDP Modbus TCP/IP Interface to many other Ethernet enabled devices PC’s, HMI’s, PLC’s…

48. 48 Advantages to Remote IO - continued Offload processes to RIO Free up controller processing time Theoretically infinite IO points

49. 49 Software

50. 50 Software In addition to the GalilTools GUI, an api and COM interface have been developed for Galil integration in the following programming languages: C++/CLI C# Visual Basic Visual C++ G++ (Linux) LabView

51. 51 LabVIEW HTML help

52. 52 LabView Example

53. 53 LabView Example

54. 54 Application Examples

55. 55 Application Examples Galil has been involved in a number of medical/biotechnology applications including: XYZ Labs – Ceramic fast step settle: 1 mm @ 60msec, 1µm @ 20msec XYZ Bio – Linear motor fast short move: 80 µm move @ 1msec XYZ Micro - FDA and ceramic motors Documentation Static configuration Verification procedure

56. 56 Application Examples/Links Links for high speed/high accuracy systems: http://www.galilmc.com/support/appnotes/miscellaneous/note5465.pdf http://www.galilmc.com/support/appnotes/miscellaneous/note5475.pdf http://www.galilmc.com/support/appnotes/miscellaneous/note5479.pdf http://www.galilmc.com/support/servotrends/st_10_08.pdf

57. 57 Galil Product Training Seminar is protected by copyright and must not be reproduced or disseminated in any form without prior written consent of Galil Motion Control, Inc.