1. Development of a mover having one nanometer precision and 4mm moving range Y. Morita, S. Yamashita ICEPP, University of Tokyo Y. Higashi, M. Masuzawa, R. Sugahara, H. Yamaoka KEK IWAA’06, SLAC, Sep. 28, 2006

2. ILC (International Linear Collider) Next generation large linear accelerator Next generation large linear accelerator The beam size at the interaction region is The beam size at the interaction region is several nm several nm

3. Motivation for the mover The beam size is several nm require 1nm precision alignment of components

4. Purpose of the mover Fine tuning for the position of ILC components Fine tuning for the position of ILC components (1nm precision) (1nm precision) Wide range adjustment (4.5mm) Wide range adjustment (4.5mm)

5. Specification Beam direction V Y X

6. Specification Mass: about 350kg Material: SUS303 The load limit: about 700kg Piezoelectric mover Cam mover This mover is for fine tuning 6 piezoelectric transducers X, Y, V and  x,  y,  v directions Moving range: 0.4  m Moving precision: 1nm This mover is for wide range adjustment 3 motors X, V and  y directions Moving range: 4.5mm Moving precision: 0.1  m

7. Cam mover 3 motors Shafts with offsets motor X V Top table moves in X, V and  y directions Rotation axis Center of the thick shaft Connecting arm 1.6mm offset

8. Piezoelectric mover 3 piezoelectric transducers for vertical motion 3 piezoelectric transducers for horizontal motion The table moves X, Y, V and  x,  y,  v directions The cross section along the line W springs

9. Cam mover

10. Calculation of the cam mover motion 4.5mm  1=0,  2=  3  2 and  3 are rotated.  1=  3=0  2 is rotated. 2mm  x 1  r · cos  1 +D  2  y 1  r · sin  1  h  2  l 2 (x 2  r · cos  2  D  2  y 2  r · sin  2  h  2  l 2  x 2  r · cos  3  D  d  2  y 2  r · sin  3  h  2  l 2  x 2  x 1  2  y 2  y 1  2  4 · D 2

11. Comparison between calculation and measurement Solid line: calculation result “ + ” marks: measurement Pulses to the motors Slope (rad) Pulses to the motors Slope (rad) Slope of the table is compared  1=0,  2=  3  2 and  3 are rotated.  1=  3=0  2 is rotated.

12. Piezoelectric mover

13. Noise of the capacitive sensor Sampling rate is 2.54kHz Sampling rate is 2.54kHz For 10 seconds For 10 seconds Standard deviation is 2.4nm Standard deviation is 2.4nm A capacitive sensor is used to examine the property of the piezoelectric transducers Capacitive sensor

14. Piezo motion Piezoelectric transducer Capacitance type displacement sensor Voltage on piezo (V) Movement of table (  m) A piezoelectric transducer has a hysteresis Moving range is about 0.4  m

15. Piezo resolution and response speed 12nm Resolution 1 or 2nm can be expected Time (sec) Movement of table (  m) Response speed of the piezoelectric transducer is 56  m/sec

16. Vibration cancellation and natural vibration of the mover stoppers Up to 30Hz vibration cancellation system will be developed Natural vibration of the mover is 45Hz near Stoppers are installed to shift the natural vibration frequency

17. Vibration of the table (PSD) Vertical directionX direction Vertical direction Red: on the table Blue: on the floor With stoppers Without stoppers 30, 50, 60Hz 65Hz 50, 60Hz over 100Hz

18. Summary Moving range 4.5mm + 0.4  m Moving range 4.5mm + 0.4  m 12nm step was clearly observed 12nm step was clearly observed  1 or 2nm resolution can be expected  1 or 2nm resolution can be expected Response speed of the piezo is 56  m/sec Response speed of the piezo is 56  m/sec Natural frequency of the mover is 65Hz or higher with stoppers Natural frequency of the mover is 65Hz or higher with stoppers

19. Future prospect The response speed of the piezoelectric transducer is high (56  m/sec) 2. Develop the vibration cancellation system up to about 30Hz (In the region>30Hz, amplitude<1nm) feedback or feedforward Michelson-Morley or Fabry-Perot laser interferometer 1. Measure again with more sensitive and stable sensors

20. The end of the slides

22. Specification Range Resolution Speed Rough movers ± 1.5 mm 0.1  m > 0.1 mm/sec Precision movers ± 0.2  m 1 nm > 0.5  m/sec Need 5 directions (X, Y,  X,  Y,  Z ) Max. weight of load is 2 tons Size of table (to install QD0) 600        H - Two stage mover Rough mover stage --> Cam movers Precision mover stage --> Piezo movers

23. X Y Z Y

24. Horizontal piezo actuator Vertical piezo actuator Beams

25. According to ANSYS calculation, rough mover stage is weak! --> Stopper is installed w/o stoppers With stoppers Primary mode 45.1 Hz 187.6 Hz Secondary mode 65.5 304.5 Third 148.6 635.5 Stoppers Total system -->