1. Department of Electronics Introductory Nanotechnology ~ Basic Condensed Matter Physics ~ Atsufumi Hirohata

2. Quick Review over the Last Lecture Classic model : Dulong-Petit empirical law T c V, mol 3R3R 0  E  D Einstein model :  E : Einstein temperature c V, mol ~ 3R for  E << T c V, mol  exp (-  E / T) for  E << T Debye model :  D : Debye temperature c V, mol ~ 3R for  D << T c V, mol  T 3 for  D << T

3. Contents of Introductory Nanotechnology First half of the course : Basic condensed matter physics 1. Why solids are solid ? 2. What is the most common atom on the earth ? 3. How does an electron travel in a material ? 4. How does lattices vibrate thermally ? 5. What is a semi-conductor ? 6. How does an electron tunnel through a barrier ? Second half of the course : Introduction to nanotechnology (nano-fabrication / application) 7. Why does a magnet attract / retract ? 8. What happens at interfaces ?

4. What Is a Semi-Conductor ? Elemental / compound semiconductor Intrinsic / extrinsic semiconductors n / p-dope Temperature dependence Schottky junctions pn junctions

5. What is semi-conductor ? Band diagrams : metal conductorsinsulators Forbidden Allowed semiconductors Forbidden Allowed Forbidden Allowed Forbidden Allowed With very small energy, electrons can overcome the forbidden band. EFEF

6. Energy Band of a semiconductor Schematic energy band diagram : E Conduction band Valence band Band gap conduction electron hole

7. Elemental Semiconductors In the periodic table, Semimetal : conduction and valence bands are slightly over ｌ aped. As (semimetal) ~ 10 20 cm -3 Sb (semimetal) ~ 10 19 cm -3 C (semimetal) ~ 10 18 cm -3 Bi (semimetal) ~ 10 17 cm -3 Carrier density : Cu (metal) ~ 10 23 cm -3 Ge (semiconductor) ~ 10 13 cm -3

8. Fabrication of a Si-Based Integrated Circuit Czochralski method : Si purity (99.999999999 %) * http://www.wikipedia.org/

9. Compound Semiconductors In the periodic table, III-V compounds : GaAs, InAs, InSb, AlP, BP,... II-VI compounds : ZnO, CdS, CdTe,... IV-IV compounds : SiC, GeSi IV-VI compounds : PbSe, PbTe, SnTe,...

10. Shockley Model Contributions for electrical transport : E Conduction band Valence band Band gap conduction electron (number density : n) positive hole (number density : p)  Ambipolar conduction  Intrinsic semiconductor * http://www.wikipedia.org/

11. Carrier Number Density of an Intrinsic Semiconductor Carrier number density is defined as Here, the Fermi distribution function is For the carriers like free electrons with m *, the density of states is For electrons with effective mass m e *, g ( E ) in the conduction band is written with respect to the energy level E C, * H. Ibach and H. Lüth, Solid-State Physics (Springer, Berlin, 2003). For holes with effective mass m p *, g ( E ) in the valence band is written with respect to the energy level E V = 0,

12. Carrier Number Density of an Intrinsic Semiconductor (Cont'd) f p ( E ) for holes equals to the numbers of unoccupied states by electrons : n is an integral in the conduction band from the bottom E C to top E ct : p is an integral in the valence band from the bottom -E Vb to top 0 : Here, E C (= E g = E C - E V ) >> k B T  E - E F  E C /2 for E C  E  E ct (E F ~ E C /2) Similarly, E C >> k B T  -(E - E F )  E C /2 for E Vb  E  0

13. Carrier Number Density of an Intrinsic Semiconductor (Cont'd) For E - E F > 3k B T, and hence E Ct  ∞ Similarly, and hence E Vb  -∞ As a result,

14. Fermi Level of an Intrinsic Semiconductor For an intrinsic semiconductor, Assuming, m e * = m p * = m * np product is calculated to be  constant for small n i  can be applied for an extrinsic (impurity) semiconductor

15. Extrinsic Semiconductors Doping of an impurity into an intrinsic semiconductor : n-type extrinsic semiconductor : e.g., Si (+ P, As, Sb : donor) * M. Sakata, Solid State Physics (Baifukan, Tokyo, 1989). p-type extrinsic semiconductor : e.g., Si (+ Ga, Al, B : acceptor) As neutral donor As positive donor conduction electron conduction band B neutral acceptor holes B negative acceptor

16. Carrier Number Density of an Extrinsic Semiconductor Numbers of holes in the valence band E V should equal to the sum of those of electrons in the conduction band E C and in the acceptor level E A : Similar to the intrinsic case, Assuming numbers of neutral acceptors are N A, valence band E C (E g ) EFEF EAEA E V (0) n nAnA p For E A - E F > k B T,

17. Carrier Number Density of an Extrinsic Semiconductor (Cont'd) At low temperature, one can assume p >> n, As n A is very small, E A > E F By substituting For T ~ 0, valence band E C (E g ) EAEA EFEF E V (0) n p nAnA At high temperature, one can assume n >> n A, Similar to the intrinsic case, for m e * = m p *,

18. Temperature Dependence of an Extrinsic Semiconductor * H. Ibach and H. Lüth, Solid-State Physics (Springer, Berlin, 2003).

19. Semiconductor Junctions Work function  : Na 11+ 1s 2s 2p 3s vacuum level EFEF  Current density of thermoelectrons :  Richardson-Dushman equation A : Richardson constant (~120 Acm 2 /K) Metal - metal junction : vacuum level  A  B E FA E FB  A -  B = E FA - E FB  A -  B : contact potential ------ + vacuum level  A  B E FA E FB E FA = E FB AB E FA E FB AB barrier

20. Metal - Semiconductor Junction - n-Type Metal - n-type semiconductor junction : vacuum level  M  S : electron affinity E FM E FS M n-S E V : valence band E D : donor level E C : conduction band  S qV d =  M -  S : Schottky barrier height E FM E FS M n-S EVEV EDED ECEC  M -  S -------- + depletion layer * http://www.dpg-physik.de/

21. Metal - Semiconductor Junction - p-Type Metal - p-type semiconductor junction : vacuum level  M  S : electron affinity E FM M p-S EVEV ECEC  S qV d =  S -  M E FM E FS M p-S EVEV ECEC  S -  M ++++++++ depletion layer E A : acceptor level E FS EAEA

22. Einstein Relationship At the equillibrium state, Numbers of electrons diffuses towards -x direction are ( n : electron number density, D e : diffusion coefficient) EFEF EDED ECEC EVEV x Drift velocity of electrons with mobility  e under E is Numbers of electrons travel towards +x direction under E are As E is generated by the gradient of E C, E is along -x and v d is +x. (-x direction) (+x direction) (equillibrium state) Assuming E V = 0, electron number density is defined as

23. Einstein Relationship (Cont'd) Now, an electric field E produces voltage V CF = V C - V F Accordingly,  Einstein relationship Therefore, a current density J n can be calculated as

24. Rectification in a Schottky Junction By applying a bias voltage V onto a metal - n-type semiconductor junction : * H. Ibach and H. Lüth, Solid-State Physics (Springer, Berlin, 2003). forward bias reverse bias  M -  S q ( V d - V )  M -  S q ( V d - V ) J V

25. pn Junction Fabrication method : Annealing method : n-type : Spread P 2 O 5 onto a Si substrate and anneal in forming gas. p-type : Spread B 2 O 3 onto a Si substrate and anneal in forming gas. Epitaxy method ( “ epi ” = on + “ taxy ” = arrangement) : Oriented overgrowth n-type : thermal deformation of SiH 4 (+ PCl 3 ) on a Si substrate p-type : thermal deformation of SiH 4 (+ BBr 3 ) on a Si substrate

26. pn Junction Interface By connecting p- and n-type semiconductors, p : Most of accepters become - ions  Holes are excited in E V. * H. Ibach and H. Lüth, Solid-State Physics (Springer, Berlin, 2003). Fermi level E F needs to be connected.  Built-in potential : qV d = E fn - E Fp n : Most of donors become + ions  Electrons are excited in E C. qV d Electron currents balances p  n = n  p Majority carriers : p : holes, n : electrons Minority carriers : p : electrons, p : holes

27. Rectification in a pn Junction Under an electrical field E, Current rectification : ** H. Ibach and H. Lüth, Solid-State Physics (Springer, Berlin, 2003). * M. Sakata, Solid State Physics (Baifukan, Tokyo, 1989). hole electron forward bias drift current hole reverse bias very small drift current