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Submicron Probing Techniques Based on AFM Technology
Dr. Michael Harz & Dr. Thomas Thärigen
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Introduction / Motivation
Content Introduction / Motivation Principle Set Up Performance Applications Conclusion Amsterdam, September 2002 4th IWoRiD
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Optical AFM Introduction Motivation Challenges Visual location
Probe placement Optical Challenges Time to data Device damage Circuit charging Standard environment AFM Amsterdam, September 2002 4th IWoRiD
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Principle Introduction / Motivation Set Up Performance Applications
Content Introduction / Motivation Principle Set Up Performance Applications Conclusion Amsterdam, September 2002 4th IWoRiD
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Principle of AFM Probing
Basic AFM principle for imaging Use of the AFM tip to make electrical contact Laser Detector Measurement Unit 3D Piezo Actuator Lens Mirror DUT x y GOAL: Collect electrical data quickly for Failure Analysis and Design Verification Amsterdam, September 2002 4th IWoRiD
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Probing Procedure Setup standard probe station Place sample on chuck
Coarse positioning of AFM ProbeHead(s) Measurement equipment setup AFM navigational scan (38 µmx38 µm) AFM positional scan (approx. 10 µm x 10 µm) Probe placement(s) Measurement Amsterdam, September 2002 4th IWoRiD
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Set Up Introduction / Motivation Principle Performance Applications
Content Introduction / Motivation Principle Set Up Performance Applications Conclusion Amsterdam, September 2002 4th IWoRiD
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Complete Submicron Probing Setup
ProbeHead with AFM Technology PC-based controller Fits to all SUSS probe stations Vibration isolation table required Up to 3 probes can be placed within 1x1µm area Easy to use software Amsterdam, September 2002 4th IWoRiD
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AFP Probehead Amsterdam, September 2002 4th IWoRiD
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Cartridge & Probe Tip Intelligent cartridges: Application decides type
Frequencies up to 3 GHz Active and passive probes Equipped with EEPROM covering Statistics (e.g. lifetime) Type Calibration data Amsterdam, September 2002 4th IWoRiD
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Performance Introduction / Motivation Principle Set Up Applications
Content Introduction / Motivation Principle Set Up Performance Applications Conclusion Amsterdam, September 2002 4th IWoRiD
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Performance: Imaging Placement accuracy: R=90 nm
Image resolution: 50 nm Zoom function Damage free imaging using constant force scan 38 x 38 µm scan 12 x 12 µm scan Amsterdam, September 2002 4th IWoRiD
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Performance: Contact Stability
Test Procedure: Resistant Measurement 10 x 60sec contact on aluminum metal wafer 1000sec contact on aluminum metal wafer Amsterdam, September 2002 4th IWoRiD
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Performance: RF Measurements
“AP3” performance Response Rise time 120 ps (3 Ghz) @ 10 MOhm input impedance Amsterdam, September 2002 4th IWoRiD
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Performance: Active Probe Linearity
50 OHM Multimeter Sourcemeter Pico- resp. AFMProbe GND SUSS AP3 Picoprobe 34A Amsterdam, September 2002 4th IWoRiD
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Applications Content Introduction / Motivation Principle Set Up
Performance Applications Conclusion Amsterdam, September 2002 4th IWoRiD
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Applications: Surface Submicron Probing
Metal layers (live part) Failure analysis Design verification Device characterization Contact level (dead part) Transistor characterization Failure analysis Design verification Amsterdam, September 2002 4th IWoRiD
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Applications: Fib – Hole Probing
Probe placement Optical image Bottom of hole scan Surface scan Amsterdam, September 2002 4th IWoRiD
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Application: CAD Navigation
Software supported Area Of Interest (AOI) search Basing on CAD chip layout SUSS PA 200 with Raith CAD Navigation Software Amsterdam, September 2002 4th IWoRiD
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Conclusions Atomic Force Micro Probing is a useful tool to master the next generation test challenges. Compared to other submicron test technologies AFM Probing offers the following major advantages: Extremely short time to data Use under standard environment conditions Portable Tester independent Easy to use Usual probing interfaces useable (e.g. CAD Navigation) Amsterdam, September 2002 4th IWoRiD
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