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http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Weir TR Temporal and Sequential Data Analysis and Performance Matching Interfaces of Thermal, Probe and CD Uniformity data Data Loading speed increase 5x to 8x Improved wafer modeling Improved intra-site data interpolation Wafer-Contour plot speed improvement 12x to 20x Improvements with Release 2.0
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 2 Product Features Weir TR Sequence & Weir TR Matching oRequires Weir TR version 2.0 or later. oProduct has two interfaces Weir TR; Sequence Analysis Weir TR; Sequence Analysis Time dependent analysis of Temperature or any metrology variable Derives critical phase elements of the cycle Weir TR: Matching Weir TR: Matching Two dataset/system matching of Thermal-to-Thermal Thermal-to-Metrology Metrology-to-Metrology Can use Weir TR Temporal Analysis calculated variables Example: Cumulative-Energy vs feature size Match any metrology, probe or sequence data Weir TR Range response by sensor over time Weir TR: Matching Temperature-to-BCD Feature
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 3 Weir TR Time Response Analysis Data sources Accept sequenced or time based data from any metrology source Clean-Track, Develop & In-line Data Scanner log and metrology Metrology & Probe Data CD-SEM and Scatter Wafer & Substrate Sensor Weir PW Process Derived Analyses & Variables
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 4 Weir TR Temporal Analysis Product Features Weir TR; Temporal Analysis Time or Sequence dependent analysis of Temperature or any metrology variable Automated time-phase deconvolution of constant and rise/fall segments Energy or (Time* Temperature) calculation with temperature threshold Local velocity or rate-calculations of rate of local change with time Automated whole-substrate or individual sensor response Critical cycle-point analysis Substrate contour mapping/vectoring Matrix display Single time-slice Animation of contour response Variables used and derived include temperature, rate-of-change, acceleration-of- change, Energy, Cumulative Energy Sensor change-rate vs Temperature
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 5 Thermal response ranges Displays variation at each sensor relative to average temperature of wafer
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 6 Average times for each phase Data is saved in Weir Data Workbook
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 7 Automated Phase Deconvolution Statistics show four thresholds which are plotted as yellow- filled squares. Range of data across wafer @ time is plotted by blue circles Max Temp Min Temp Phase change Range
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 8 Critical phase evaluation by sensor point Customize the sampling or graphic to zoom-in on time/sequence critical segments
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 9 Cumulative Energy Integrated energy at each sensor shown and the phase in which it occurred Graphics are provided by: Sensor/phase Rise time/sensor & phase Substrate Response as a function of Radius Integrated energy at each sensor shown and the phase in which it occurred Graphics are provided by: Sensor/phase Rise time/sensor & phase Substrate Response as a function of Radius Graphics selection interface tabs
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 10 Temperature Mean, Rise, Phase Length, Start Value
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 11 Local Rate Change Variation Local Rate Change plotted at 8 times over critical final rise Notice initial rise on left side of wafer at 2295 seconds with a slope range from 0.217 to 0.256 dec/sec rise
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 12 Vector/Contour mapping of user selected time-slices Three vector plots of accumulated energy
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 13 Local Acceleration, Temperature & Rate-of-Change Data taken at 2370 seconds
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 14 Localized Rise/Fall Plot vs Variable Details process-critical response to any variable such as temperature Raw Temp vs Time Cycle Mouse-zoomed response at critical settling point
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 15 Threshold Analysis data Data from the “RiseTimesPhase” worksheet for 16 sensors Transition points are marked on the thermal curve as black squares with a yellow center (previous slide) Data stored on Weir TR Spreadsheet in data workbook Temperature variation
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 16 Separate window display of Thermal variation Matrix view Animation also provided
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 17 Weir TR Matching Product Features Weir TR; Matching Match any two Temporal/Metrology/Log sources Match Bake, Temperature,Cumulative Energy, Process etc uniformity Infinitely-Variable Rotation and Notch Alignment Controls Features Includes: Automated data culling Histograms, contour, vector, XY, etc plots. Individual time-slice or integrated analysis Model across-wafer variation User-customized graphics Easy plot/copy into reports/html interfaces Reports and data stored in standardized workbook format Across-Wafer Modeled Bottom CD Variation Across two Bake Plates (Scatter data)
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 18 Weir TR Time Response Analysis Data sources Any metrology, sequenced or log based data Clean-Track, Develop & In-line Data Scanner log and metrology Metrology & Probe Data CD-SEM and Scatter Wafer & Substrate Sensor Weir PW Process Derived Analyses & Variables Weir TR Temporal Analysis Variables
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 19 Basic Operation of Weir TR Matching Wafers from two separate bake plates shown Provides a basic visual & statistical match comparison Covariance matching over time/space Compare static or sequential data For example; Bottom CD to Temperature or Cumulative Energy on the substrate
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 20 Variable Culling BCD based culling removed 309 data points to properly display wafer-graphic shown on left Easily removed Intra-Field variation and improves accuracy Original BCD data distribution Command used to generate histogram And then apply the wafer model
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 21 Individual graphics Comparison of BCD variation for wafers generated on two separate hot- plate Post Exposure Bakes
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 22 Variation by X-location on wafer Vector Contour Radial XY Horizontal XY Vertical VS Time/sequence Data here not modeled, this is raw data
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 23 Modeled wafer variation BCD Modeled variation due to slow across-wafer changes Data from two bake plates
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 24 BCD wafer fit to temperature Response as a function of X position on the wafer On-Wafer Temperature at 135.52 sec vs final Wafer-Modeled BCD 2 nd order line fitted to each dataset using mouse interface
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 25 Weir TR calculated Cumulative Energy and BCD Variation Contour grid (left) can be turned on/off
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 26 Thermal-Time Cycle & BCD Information
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 27 Thermal Energy & wafer-modeled BCD Problem OnWafer probe and CD- SEM oriented wafer differently Left=Thermal vector plot Right= Scatter-tool Contour
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 28 Thermal rotated by –135 degrees Data Rotation interface allowed thermal data to be rotated by –135 degrees to provide improved alignment
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 29 PEB and feature- BCD as contour plots Weir TR calculated Accumulated Energy from PEB cycle matched to BCD variation Performed after rotation
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 30 Radial Variation
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 31 Horizontal Variation: Temperature vs BCD modeled
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 32 Modeled Comparison of Temperature & Top CD (TCD) Analysis used the BCD variable to remove “poor” metrology Any variable such as MSE, TCD, BARC, SWA etc can be used to cull data
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 33 Thermal and Feature Distributions Temperature @ 30 sec BARCSWA2 (Side Wall Angle) Bottom Feature Size (BCD)Top Feature Size (TCD)SWA1 (Side Wall Angle)
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http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Weir TR: Matching Thermal Response Comparison of two hot plates Comparison of two separate PEB bake plates
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 35 Time sequence for two bake plates
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 36 Timed Response of Temperature
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 37 Temperature response at curve peak
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 38 Temperature at 148.77 Sec
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 39 Horizontal variation across plate Hot-plate comparison for two PEB sequences Temperature variation at 148.77 seconds Fitted curves up to 4 th order can be mouse-added to plots
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 40 Total cumulative Energy @ end of cycle
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Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 41 Summary Two very-unique companion products are offered Weir TR – Time/Sequence Response Analysis software Weir TR – Matching for any sequence, probe or metrology data Weir TR: Time Response Goes beyond thermal sensor software provided by OnWafer & SensArray Automated Sequence Phase extraction Process-Energy Injection calculation Localized Rise/Fall calculation & plotting Individual phase and sensor analysis Vector, histogram and XY plots of any time/sequence slide Matrix, Animation and visualization plots Weir TR: Matching Matching software for Critical Features and metrology elements Similar to historic overlay matching methods Includes ability to match time/sequenced data Such as Post-Exposure Bake, scanner logs, OnWafer & SensArray data Match Time-to-time Time-to-Feature distribution Feature-to-Feature Automated Data culling Wafer Model Data Rotational Alignment
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