1. Micromachining of Silicon and Its Applications in MEMS and Intelligent Sensors Mustafa G. Guvench, Ph.D. University of Southern Maine

2. What is MICRO-MACHINING?

6.  What can Micromachined Parts/Systems do for us? Be a Conduit to Microscopic Domain: 1. Sensing (Information) 2. Information Processing 3. Communication 4. Manipulation (Actuation and Control)

7. Why / Why not SILICON? Semiconductor: Active Devices + Sensors (Photo-Magneto-Strain Sensing) Insulator:SiO 2, Si 3 N 4, Glass Thin Film Conductor:Aluminum, Gold, Silicides PhotoLithography:Planar control (+ & -)

8. Mechanical Material SILICON? Stiff => Thinning is required for appreciable strain

9. Micromachining of SILICON? MICROMACHINING of SILICON => (a) BULK (substrate) (b) SURFACE (films) Additive Processes: Chemical and Physical Deposition (Thin Layers only) (Single/Poly) Removal Processes:Chemical and Physical Etching (Wet/Dry/Plasma/Inert/Reactive) (Bulk/Film) (Anisotropic/Isotropic) (Bulk/Film) (Anisotropic/Isotropic)

10. BULK MICROMACHINING (Etchants: Isotropic/Anisotropic)

11. BULK MICROMACHINING (Isotropic/Anisotropic)

12. BULK MICROMACHINING (Cavity/Cantilever Anisotropic)

13. BULK MICROMACHINED (Silicon Capillary for Insulin Infuser)

16. BULK MICROMACHINED (Silicon Mask for Cylindrical Micromotion Sensor)

17. BULK MICROMACHINED (Series Connected Photovoltaic Converter Battery)

21. MOTION? HANDLING? ASSEMBLY?COUPLING? =>

22. Micro Electro Mechanical Sytems

24. M (CMOS-IC Technology) + E (CMOS-IC Technology) + M (Silicon and Sacrificial Layers) + O (Aluminum) + S (IC Packaging Technology)

25. Three-Layer Poly-Silicon Surface Micromachining Process (to build Mechanical Parts on CMOS IC) Final cross sectional view with 7 layers

26. Three-Layer Poly-Silicon Surface Micromachining Process

27. Surface Micromachined

28. Micromachining of Projection Camera

30. M (CMOS-IC Technology) + E (CMOS-IC Technology) + M (Silicon and Sacrificial Layers) + O (Aluminum) + S (IC Packaging Technology) M.G.Guvench

31. Surface Micromachined Silicon Sensors M.G.Guvench

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33. Electrostatic Field Sensors M.G.Guvench

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36. Mass (Absorption/Deposition) Sensor M.G.Guvench

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39. Electrostatic Field Sensors M.G.Guvench

40. Flow Skin Friction Sensors M.G.Guvench

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42. CMOS Analog Chip Design (Operational Amplifier) M.G.Guvench

43. MicroFab Laboratory

44. Programmable Diffusion/Oxidation System’s Controller in The MicroFab Laboratory

45. Double-Diffused P + NN + Junction PhotoDiode Made Being Tested in The MicroFabrication Lab.

46. MicroFab Laboratory

47. Surface Micromachined Silicon Sensors M.G.Guvench

48. 3-Poly Surface Micromachining Processed Sensors Cross Section

50. MEMS Switch

51. MEMS Micromotor

52. A Mass (Absorption/Deposition) Sensor M.G.Guvench