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Huai-Yuan Michael Tseng EE C235
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Inorganic semiconductor nanowire field effect transistors (NW-FETs) Low cost printing process ◦ Large area, flexible electronics ◦ But required sub-10um resolution ◦ Difficult to form ohmic contact when print Si NW Self-aligned inkjet printing technique Printing of metal oxide NW (ZnO)
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cyclohexylbenzene(CHB )
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Au lift-off SAM treatment on Au Au nanoparticles printed, de-wet ZnO NW ◦ Chemical vapor deposition on a-plane sapphire substrate ◦ dispersed in IPA/ethylene glycol then inkjet printed Spin-cast PMMA Print PEDOT:PSS SAM used = 1H, 1H, 2H,2H-perflourodecanethiol PMMA = polymethyl methacrylate PEDOT:PSS = poly3,4-ethylenedioxithiophene doped with poly-styrene sulfonate
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L=500nm Improved by heating Without ZnO With ZnO
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All solution process ZnO NW FETs were demonstrated, however Performance limited by contact resistance as can be proved by a longer channel length device (2um) Could be improved by using lower work function metal nanoparticle or SAM treatment on Au
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