1. Hamdy Fadl 5005120111 بسم الله الرحمن الرحيم Micro Opto-Electro-Mechanical Systems (MOEMS) Hamdy Fadl 500512011

2. Hamdy Fadl 5005120112 Outlines MOEMS overview Applications Packaging

3. Hamdy Fadl 5005120113 الحسن بن الهيثم al- Ḥ asan ibn al-Haytham

4. Hamdy Fadl 5005120114 al-Ḥasan ibn al-Haytham

5. Hamdy Fadl 5005120115 مخطوطة Manuscript

6. Hamdy Fadl 5005120116 What is MOEMs ? Micro-opto-electromechanical systems (MOEMS), or optical MEMS, are systems involving micromachining of structures in the micro- to millimeter range whose purposes are to manipulate light. It is not a special class of Micro-Electro-Mechanical Systems (MEMS) but in fact it is MEMS merged with Micro-optics which involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems.

7. Hamdy Fadl 5005120117 Today ’ s MOEMS devices include Optical Switch, waveguides, moving mirrors and diffractive gratings ______________________ *Micromachining : techniques for fabrication of 3D structures on the micrometer scale Applications include MEMS devices Most methods use silicon as substrate

8. Hamdy Fadl 5005120118 MOEMS Fabrication MOEMS devices are typically made using standard lithography methods giving the advantages of a compact design and fabrication at a low cost. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.

9. Hamdy Fadl 5005120119 MEMS+MO=MOEMS how is that ? During early 1990s, Rockwell Science Center, with government sponsors, contributed to the development of micro-optics technology Teamed with MIT/Lincoln-Lab. 1992, Rockwell applied micro-optics to the system development of several industrial applications, including: microlenses for silicon focal planes high speed binary microlens in GaAs, antireflection surfaces in silicon thin film microlens arrays, etc.

10. Hamdy Fadl 50051201110 Rockwell Science Center also developed refractive microlens technology, including gray scale photolithography. Diffractive microlenses based on binary optic structures are typically fabricated in bulk material by multiple sequential layers of photoresist patterning and reactive ion etching (RIE), to form a multi-step phase profile. This profile approximates the ideal kinoform lens surface. A special staircase process, called binary optics, is used to fabricate diffractive components.

11. Hamdy Fadl 50051201111 With so many successes in Micro-optics and MEMS, Rockwell researchers who were involved in both MEMS and Micro-optics, initiate development of several of innovative photonics ideas combing both technologies. This was behind the acronym of MOEMS, when both MEMS and Micro-optics were merged in one single IC processing lab.

12. Hamdy Fadl 50051201112 MOEMS is a promising multi technology for miniaturization of critical optical systems. The acronym is defined of three high tech fields of micro-optics, micromechanics, and microelectronics. MOEMS indirectly could merge in micromachining, microsensors and microactuators if their processes are compatible with integrated circuits.

13. Hamdy Fadl 50051201113 Merging all these multi technologies, made MOEMS an ideal knowhow for many industrial demonstrations of commercial devices, such as optical switches, digital micromirror devices (DMD), bistable mirrors, laser scanners, optical shutters, and dynamic micromirror displays.

14. Hamdy Fadl 50051201114 Figure 1 : Merging Technology Hybridization

15. Hamdy Fadl 50051201115 MEOMS and commercial applications Attractive for comercial application because of : batch processing and embossed replication enabling technology for applications that cannot be addressed, using micro-optics The trend toward miniaturization and integration of conventional optical systems desirable elements of optical communication.

16. Hamdy Fadl 50051201116 What is the difference between Optical MEMS and MOEMS? Optical MEMS could include bulk optics but MOEMS is truly based on microtechnology where MOEMS devices are batched processed exactly like integrated circuits, but this is not true in most cases for Optical MEMS.

17. Hamdy Fadl 50051201117 Time for Applications!

18. Hamdy Fadl 50051201118 Applications Optical switch Wave guide Moving mirror Diffractive grating Microlens arrays Microbolometers Bistable Fabry Perot resonator for high accuracy measurement of gas concentration Micro-optical microphone to measure air pressure.

19. Hamdy Fadl 50051201119 Optical Switch Many optical components are required in the rapid development of optical networks, including optical switches. Optical switches in micro-opto-electro-mechanical systems (MOEMS) have many applications because of their excellent features, including low insertion loss and crosstalk. In telecommunications, insertion loss is the loss of signal power resulting from the insertion of a device in a transmission line or optical fiber and is usually expressed in decibels (dB).

20. Hamdy Fadl 50051201120 Optical Switch

21. Hamdy Fadl 50051201121 Then, what is Optical switch? In telecommunication, an optical switch is a switch that enables signals in optical fibers or integrated optical circuits (IOCs) to be selectively switched from one circuit to another. Away from telecom, an optical switch is the unit that actually switches light between fibers Fast optical switches, may be used to perform logic operations.

22. Hamdy Fadl 50051201122 Example : 3D-MEMS Optical Switch In a MEMS optical switch, a micro- mirror is used to reflect a light beam. The direction in which the light beam is reflected can be changed by rotating the mirror to different angles, allowing the input light to be connected to any output port.

23. Hamdy Fadl 50051201123 3D-MEMS Optical Switch

24. Hamdy Fadl 50051201124 3D-MEMS Optical Switch Features Can switch optical signals without converting them into electrical signals. Allows compact low-loss switches to be formed on any scale. Switching can be performed in 10-30 msec.

25. Hamdy Fadl 50051201125 3D-MEMS Optical Switch usages Since this device can switch large numbers of optical signals simultaneously, it can be used as a trunk switch for handling large amounts of traffic, and as a switch in large urban communication networks.

26. Hamdy Fadl 50051201126 Another Application : Waveguide A waveguide is a structure that guides waves, such as electromagnetic waves or sound waves. There are different types of waveguides for each type of wave.

27. Hamdy Fadl 50051201127 Waveguide Dispersion, whale, shark

28. Hamdy Fadl 50051201128 Some naturally occurring structures can also act as waveguides. The SOFAR channel layer in the ocean can guide the sound of whale song across enormous distances. The SOFAR channel (short for Sound Fixing and Ranging channel), or deep sound channel(DSC is a horizontal layer of water in the ocean at which depth the speed of sound is at its minimum. The SOFAR channel acts as a waveguide for sound, and low frequency sound waves within the channel may travel thousands of miles before dissipating.

29. Hamdy Fadl 50051201129 Waveguide in MOEMS Fiber-optic waveguides based (MOEMS) form a significant class of biosensors which have notable advantages like light weight, low cost and more importantly, the ability to be integrated with bio-systems.

30. Hamdy Fadl 50051201130 Example :integrated microfluidic fiber-optic waveguide biosensor. The fiber-optic waveguide is integrated with bulk micromachined fluidic channel across which different chemical and biological samples are passed through. The significant refractive index* change due to the presence of biological samples that causes the evanescent field condition in the waveguides leads to optical intensity attenuation of the transmitted light.

31. Hamdy Fadl 50051201131 Representative image for waveguide in biosensor

32. Hamdy Fadl 50051201132 Refractive index In optics the refractive index or index of refraction n of a substance (optical medium) is a dimensionless number that describes how light, or any other radiation, propagates through that medium. It is defined as n= c/v where c is the speed of light in vacuum and v is the speed of light in the substance. For example, the refractive index of water is 1.33, meaning that light travels 1.33 times as fast in vacuum as it does in water

33. Hamdy Fadl 50051201133 The speed of light The speed of light in vacuum, commonly denoted c, is a universal physical constant. Its value is 299,792,458 meters per second

34. Hamdy Fadl 50051201134 Speed of light Sunlight takes about 8 minutes 19 seconds to reach the Earth (based on the average distance).

35. Hamdy Fadl 50051201135 Evanescent waves An evanescent waves are formed at the boundary between two media with different wave motion properties, and are most intense within one third of a wavelength from the surface of formation

36. Hamdy Fadl 50051201136 evanescent waves The exponential dependence of the electromagnetic field intensity on the distance away from the interface

37. Hamdy Fadl 50051201137 Micro lenses Microlens is a small lens, generally with a diameter less than a millimetre (mm) and often as small as 10 micrometres ( µ m). The small sizes of the lenses means that a simple design can give good optical quality

38. Hamdy Fadl 50051201138 Micro lens and Microlens Array Single microlenses are used to couple light to optical fibres while microlens arrays are often used to increase the light collection efficiency of CCD arrays. They collect and focus light that would have otherwise fallen on to the non- sensitive areas of the CCD*. ___________________ *A charge-coupled device (CCD) is a device for the movement of electrical charge, usually from within the device to an area where the charge can be manipulated, for example conversion into a digital value.

39. Hamdy Fadl 50051201139 Microlens in Digital Camera

40. Hamdy Fadl 50051201140

41. Hamdy Fadl 50051201141 Applications of Microlenses Microlens arrays are in digital projectors, to focus light to the active areas of the LCD used to generate the image to be projected. Current research :microlenses act as concentrators for high efficiency photovoltaics for electricity production. Form compact imaging devices for applications such as photocopiers and mobile- phone cameras. 3D imaging and displays

42. Hamdy Fadl 50051201142 3D imaging Display

43. Hamdy Fadl 50051201143 3D imaging Microscope using Microlenses Array

44. Hamdy Fadl 50051201144 MOEMS packaging Encapsulation of electronics and sensors has traditionally been used as a protection against the outside environment, but through integration of other functions (e.g. lenses, electric and optic conductors) Advanced polymer technique has the potential to realize multifunctional encapsulation in combination with 3D-silicon technique and surface technology.

45. Hamdy Fadl 50051201145 THANK YOU