1. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201- 44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Introduction to Microelectronic Fabrication by Richard C. Jaeger Distinguished University Professor ECE Department Auburn University Chapter 8 Packaging and Yield

2. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Copyright Notice © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1.

3. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Processed Silicon Wafer 150-mm wafer ready Mounted on screen ready for dicing saw Dice on wafer tested by probing prior to mounting Good dice will then be packaged

4. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Bonding Pad Configurations (a) Peripheral Bonding Pads (b) Area Array Bonding Pads Pads Range from 125  m x 125  m down to 25  m x 25  m

5. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging “TO-Style” and Inline

6. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Gold Wire Bonding Figure 8.3 (a) An SEM of gold ball bonding (b) SEM of high density gold ball bonding (c) SEM of bonded die. Courtesy of Kulicke and Soffa Industries, Inc. (K&S). (b) (a) (c)

7. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Themosonic Ball-Wedge Bonding

8. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Ultrasonic Bonding

9. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Pin Grid Array Pin Grid Array (PGA) Package with Upward Facing Cavity PGAs also come with the Cavity Facing Downward Figure 8.7

10. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Leadless Chip Carriers Figure 8.8 (a) Ceramic leadless chip carriers with top connections. (b) LCC with edge connections in grooves on the side of the package.

11. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Plastic Packaging Gull wing surface mount J-lead surface mount Through hole Surface Mount

12. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Solder Ball Formation Layers of chrome, copper, lead and tin are sequentially deposited After heating for reflow, the 5% tin - 95% lead solder ball forms

13. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Solder Balls - Area Array Figure 8.10 (a) Cross section through a solder ball before and after reflowing. Copyright 1969 by International Business Machines Corporation. Reprinted with permission from Ref. [4]. (b) Flip-chip Pb/Sn solder bumps in standard 250  m pitch (right) and 50  m. Courtesy of MCNC Optical and Electronic Packaging Group. (a)(b)

14. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Solder Bumps Figure 8.11 Bumps formed by modification of the wire- bond process. Courtesy of Kulicke and Soffa Industiries, Inc. (K&S).

15. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Ball Grid Array Figure 8.12 (a) Ball grid array cross section (b) Intel microprocessor using a BGA. Courtesy of Intel Corp.

16. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Gold Bumps on Aluminum

17. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Tape Automated Bonding

18. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging Chip Scale Packages Figure 8.15 (a)Chip scale package using wire bonding (b)Alternate form of CSP (c)Chip-on-board packaging

19. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Yield Yield versus Area Figure 8.16 Illustration of wafers showing effect of die size on yield. Dots indicate the presence of a defective die location. (Die are inked at test.) (a) For a particular die size, yield is 43%. (b) If the die size were doubled, the yield would be only 22%

20. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Yield Modeling Possible Defect Distributions Figure 8.17 (a) Impulse where every wafer has exactly the same number of defects (b) A triangular approximation to a Gaussian density (c) A uniform density function

21. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Yield Modeling Theory ITRS 2010 (  = 5) –D 0 ≤ 0.1/cm 2 –Critical Defect Size < 30 nm

22. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Yield Modeling Yield Curves Theoretical yield curves versus defect density - area product Yield drops off rapidly as die area increases, but not as rapidly as Poisson distribution predicts Early predictions were based upon Y = exp(D 0 A). Fortunately, this result was far too pessimistic. ITRS Assumption Figure 8.18

23. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201-44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. Packaging and Yield References

24. For the exclusive use of adopters of the book Introduction to Microelectronic Fabrication, Second Edition by Richard C. Jaeger. ISBN0-201- 44494-1. © 2002 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved. This material is protected under all copyright laws as they currently exist. No portion of this material may be reproduced, in any form or by any means, without permission in writing from the publisher. End of Chapter 8