1. Photolithography Machine Control System Ben Conrad and Mark Edwards Projects in Computer Engineering II December 9, 2003

2. System Overview – Solitec 8360 Used in the photolithography process to evenly apply chemicals to wafers 25 200mm wafer capacity Main components: Wafer input cartridge, wafer output cartridge, spin chuck, bake chuck, system tray Spin Chuck Vacuum Tube Bake Chuck Vacuum Tube Wafer Output Cartridge (25 wafers) Wafer Input Cartridge (25 wafers)

3. System Overview – Solitec 8360 Wafer Load Processing on Spin Chuck Bake on Bake Chuck Multipass Mode Check Wafer Egress

4. System Overview – Solitec 8360

5. System Controller Provides an interface between the operator and the control unit. Formats data for display to the user Interprets and forwards user requests and input to the control unit

6. System Controller Cont’ Control the system’s mode of operation Three operating modes Service: manual system operation Program: writing and editing of recipes Run: recipe execution/system calibration

7. Recipe Commands Seven Executable Commands PREWET: Dispense de-ionized(DI) water Dispense DEV#1: Dispense developer solution RINSE: Dispenses DI water to clean wafer N2: Dispenses Stream of Nitrogen (N 2 ) SPIN: Spin Dry the wafer WAIT: Static delay option. Parameters Time:.1 – 999.9 sec. (.1 second resolution) Speed: 0-7,999 RPM Ramp: 0 – 40 KRPM/s

8. Motivation Old controller was corroded; less elements in our design -> more reliable Cost savings to customer, Dr. Raisanen, associate director of RIT’s fab Our design ~$350, vs. $3k-$15k

9. Feasibility Motor Control Board will be reused – no digital controller need be implemented Other than 3 analog, all I/0 are TTL digital logic, no conditioning needed Sensors have been tested and functionality for most is verified Timing Budget: Asynchronous System

10. System Design- High Level The STD Bus will be replaced with a HC12-s microcontroller A HC11 will be connected to the HC12 via SPI protocol to handle UI Custom Circuits are created to multiplex numerous I/0 lines to the HC12’s limited pins

11. System Design – High Level HC12 A B P S A/D 50 Pin Input Cable 50 Pin Out Cable Keypad and LCD Servo Board 3 16-bit serial in, parallel out shift registers for output = 48 output bits 2 16-bit parallel in, serial out shift registers for input = 32 input bits 1 16-bit serial in, parallel out shifter 2 8-bit DACs HC 11

12. System Controller Hardware Input 4x4 Matrix keypad  Interrupt driven SPI bus  Three wire interface to digital controller  Used to communicate status and display information

13. System Controller H/W Cont’ Output 40x4 Character LCD display SPI bus  Forwards user input the control unit. Status Lights  Run mode  Program mode  End of Processing  Interlock

14. System Controller H/W Cont’ Processing unit Motorola 68HC11  512 bytes RAM, 512 bytes EEPROM  Synchronous peripheral interface (SPI)  Real time interrupt circuit Data aggregation Distribute workload

15. System Controller Schematic

16. System Design – System I/O Shows the detailed HC-12 Control Unit I/O connections

17. System Design – System I/O

18. System Software Design Run mode flowchart

19. System Software Design Task control block(TCB) Tracks the processing of a single wafer

20. Already Completed Parts ordered and received Hardware schematics Software flowcharts Task control design Sensor/System tests

21. Expected Difficulties Unreliability of mechanical system No ability to completely test system Servo control board - analog signals Overall system complexity